{"title":"基于掺钪氮化铝压电微机械超声换能器的二元气体浓度和流速测量系统","authors":"Hanzhe Liu , Yuzhe Lin , Guoqiang Wu , Jifang Tao","doi":"10.1016/j.flowmeasinst.2024.102724","DOIUrl":null,"url":null,"abstract":"<div><div>This paper presents an ultrasonic binary gas concentration and flow rate measurement system (UBCFS) based on a scandium-doped aluminum nitride (Sc<span><math><mrow><mn>0</mn><mo>.</mo><mn>2</mn></mrow></math></span>Al<span><math><mrow><mn>0</mn><mo>.</mo><mn>8</mn></mrow></math></span>N) piezoelectric micromachined ultrasonic transducer (PMUT) array, enabling the simultaneous measurement of binary gas concentration and flow rate. The ultrasonic propagation time method is employed to determine binary gas concentration and flow rate. To assess the feasibility of the proposed UBCFS, it is integrated into an experimental setup composed of nitrogen (N<sub>2</sub>) and argon (Ar) gas paths. Results indicate that the reported UBCFS measures both gas concentration and flow rate with high accuracy and repeatability. For binary gas flow rate measurements, the mean error and repeatability error are below 0.403% and 0.667%, respectively, across all binary gas concentrations. Within the concentration range of 0% to 100%, the minimum mean error and repeatability error for concentration measurements are 0.03% and 0.04%, respectively, which is almost unaffected by gas flow rate. The performance of the proposed UBCFS based on PMUT arrays surpasses that of most reported or commercialized devices. The compact, cost-effective, and highly reliable UBCFS provides a feasible solution for portable equipment utilized in binary gas detection and control in semiconductor processing.</div></div>","PeriodicalId":50440,"journal":{"name":"Flow Measurement and Instrumentation","volume":null,"pages":null},"PeriodicalIF":2.3000,"publicationDate":"2024-10-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A binary gas concentration and flow rate measurement system based on scandium-doped aluminum nitride piezoelectric micromachined ultrasonic transducers\",\"authors\":\"Hanzhe Liu , Yuzhe Lin , Guoqiang Wu , Jifang Tao\",\"doi\":\"10.1016/j.flowmeasinst.2024.102724\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>This paper presents an ultrasonic binary gas concentration and flow rate measurement system (UBCFS) based on a scandium-doped aluminum nitride (Sc<span><math><mrow><mn>0</mn><mo>.</mo><mn>2</mn></mrow></math></span>Al<span><math><mrow><mn>0</mn><mo>.</mo><mn>8</mn></mrow></math></span>N) piezoelectric micromachined ultrasonic transducer (PMUT) array, enabling the simultaneous measurement of binary gas concentration and flow rate. The ultrasonic propagation time method is employed to determine binary gas concentration and flow rate. To assess the feasibility of the proposed UBCFS, it is integrated into an experimental setup composed of nitrogen (N<sub>2</sub>) and argon (Ar) gas paths. Results indicate that the reported UBCFS measures both gas concentration and flow rate with high accuracy and repeatability. For binary gas flow rate measurements, the mean error and repeatability error are below 0.403% and 0.667%, respectively, across all binary gas concentrations. Within the concentration range of 0% to 100%, the minimum mean error and repeatability error for concentration measurements are 0.03% and 0.04%, respectively, which is almost unaffected by gas flow rate. The performance of the proposed UBCFS based on PMUT arrays surpasses that of most reported or commercialized devices. The compact, cost-effective, and highly reliable UBCFS provides a feasible solution for portable equipment utilized in binary gas detection and control in semiconductor processing.</div></div>\",\"PeriodicalId\":50440,\"journal\":{\"name\":\"Flow Measurement and Instrumentation\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":2.3000,\"publicationDate\":\"2024-10-28\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Flow Measurement and Instrumentation\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0955598624002048\",\"RegionNum\":3,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, MECHANICAL\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Flow Measurement and Instrumentation","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0955598624002048","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, MECHANICAL","Score":null,"Total":0}
A binary gas concentration and flow rate measurement system based on scandium-doped aluminum nitride piezoelectric micromachined ultrasonic transducers
This paper presents an ultrasonic binary gas concentration and flow rate measurement system (UBCFS) based on a scandium-doped aluminum nitride (ScAlN) piezoelectric micromachined ultrasonic transducer (PMUT) array, enabling the simultaneous measurement of binary gas concentration and flow rate. The ultrasonic propagation time method is employed to determine binary gas concentration and flow rate. To assess the feasibility of the proposed UBCFS, it is integrated into an experimental setup composed of nitrogen (N2) and argon (Ar) gas paths. Results indicate that the reported UBCFS measures both gas concentration and flow rate with high accuracy and repeatability. For binary gas flow rate measurements, the mean error and repeatability error are below 0.403% and 0.667%, respectively, across all binary gas concentrations. Within the concentration range of 0% to 100%, the minimum mean error and repeatability error for concentration measurements are 0.03% and 0.04%, respectively, which is almost unaffected by gas flow rate. The performance of the proposed UBCFS based on PMUT arrays surpasses that of most reported or commercialized devices. The compact, cost-effective, and highly reliable UBCFS provides a feasible solution for portable equipment utilized in binary gas detection and control in semiconductor processing.
期刊介绍:
Flow Measurement and Instrumentation is dedicated to disseminating the latest research results on all aspects of flow measurement, in both closed conduits and open channels. The design of flow measurement systems involves a wide variety of multidisciplinary activities including modelling the flow sensor, the fluid flow and the sensor/fluid interactions through the use of computation techniques; the development of advanced transducer systems and their associated signal processing and the laboratory and field assessment of the overall system under ideal and disturbed conditions.
FMI is the essential forum for critical information exchange, and contributions are particularly encouraged in the following areas of interest:
Modelling: the application of mathematical and computational modelling to the interaction of fluid dynamics with flowmeters, including flowmeter behaviour, improved flowmeter design and installation problems. Application of CAD/CAE techniques to flowmeter modelling are eligible.
Design and development: the detailed design of the flowmeter head and/or signal processing aspects of novel flowmeters. Emphasis is given to papers identifying new sensor configurations, multisensor flow measurement systems, non-intrusive flow metering techniques and the application of microelectronic techniques in smart or intelligent systems.
Calibration techniques: including descriptions of new or existing calibration facilities and techniques, calibration data from different flowmeter types, and calibration intercomparison data from different laboratories.
Installation effect data: dealing with the effects of non-ideal flow conditions on flowmeters. Papers combining a theoretical understanding of flowmeter behaviour with experimental work are particularly welcome.