倾斜柱状金属膜作为皮秒声学中横向相干声子的换能器

IF 3.5 2区 物理与天体物理 Q2 PHYSICS, APPLIED Applied Physics Letters Pub Date : 2024-11-08 DOI:10.1063/5.0228331
A. Chargui, N. Martin, G. Ferro, A. Devos
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引用次数: 0

摘要

皮秒声学已被广泛用于研究薄膜弹性、超音衰减以及薄膜与基底的粘附性。该技术的一个主要局限性是仅限于纵波。虽然已有关于超快产生和检测横波的研究报道,但仍缺少一种与沉积在硅上的薄膜兼容的通用方法。在这项工作中,我们展示了通过沉积倾斜的柱状金属膜和使用对光偏振敏感的光学检测器,可以在薄膜中激发和光学检测两种类型的体声波。该方案首先在金属化玻璃基底上建立,然后应用于一系列沉积在硅上的透明薄膜(二氧化硅、AlN、AlScN 和 SiC)。在每种情况下,都能检测到两种频率的布里渊振荡,一种是纵向模式,另一种是横向模式。在每种薄膜中都测量了薄膜厚度和两个声速。在碳化硅薄膜中观察到高达 116 GHz 的横向相干声子。
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Tilted columnar metal film as transducer of transverse coherent acoustic phonons in picosecond acoustics
Picosecond acoustics has been widely used to study thin film elasticity, hypersound attenuation, and adhesion of thin films to substrates. A major limitation of the technique is its restriction to only longitudinal waves. Although work has been reported on the ultrafast generation and detection of transverse waves, a general method compatible with thin films deposited on silicon is still missing. In this work, we show that by depositing a tilted columnar metal film and using an optical detection sensitive to light polarization, it is possible to excite and detect optically both types of bulk acoustic waves in thin films. The protocol is first established on metalized glass substrates, then applied to a range of transparent films deposited on silicon (silica, AlN, AlScN, and SiC). In each case, Brillouin oscillations are detected at two frequencies, one being the longitudinal mode, the other the transverse. The film thickness and two sound velocities are measured in each thin film. Transverse coherent phonons as high as 116 GHz are observed in the SiC thin film.
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来源期刊
Applied Physics Letters
Applied Physics Letters 物理-物理:应用
CiteScore
6.40
自引率
10.00%
发文量
1821
审稿时长
1.6 months
期刊介绍: Applied Physics Letters (APL) features concise, up-to-date reports on significant new findings in applied physics. Emphasizing rapid dissemination of key data and new physical insights, APL offers prompt publication of new experimental and theoretical papers reporting applications of physics phenomena to all branches of science, engineering, and modern technology. In addition to regular articles, the journal also publishes invited Fast Track, Perspectives, and in-depth Editorials which report on cutting-edge areas in applied physics. APL Perspectives are forward-looking invited letters which highlight recent developments or discoveries. Emphasis is placed on very recent developments, potentially disruptive technologies, open questions and possible solutions. They also include a mini-roadmap detailing where the community should direct efforts in order for the phenomena to be viable for application and the challenges associated with meeting that performance threshold. Perspectives are characterized by personal viewpoints and opinions of recognized experts in the field. Fast Track articles are invited original research articles that report results that are particularly novel and important or provide a significant advancement in an emerging field. Because of the urgency and scientific importance of the work, the peer review process is accelerated. If, during the review process, it becomes apparent that the paper does not meet the Fast Track criterion, it is returned to a normal track.
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