通过铝表面加工硬化实现多尺度 3D 光刻技术

IF 37.2 1区 材料科学 Q1 CHEMISTRY, PHYSICAL Nature Materials Pub Date : 2024-11-11 DOI:10.1038/s41563-024-02036-2
Lang Wang, Hangtong Li, Chen Zhao, Liqiang Zhang, Jiye Li, Salah Ud Din, Zichen Wang, Jiacheng Sun, Sergio Andres Galindo Torres, Zhiyong Fan, Liaoyong Wen
{"title":"通过铝表面加工硬化实现多尺度 3D 光刻技术","authors":"Lang Wang, Hangtong Li, Chen Zhao, Liqiang Zhang, Jiye Li, Salah Ud Din, Zichen Wang, Jiacheng Sun, Sergio Andres Galindo Torres, Zhiyong Fan, Liaoyong Wen","doi":"10.1038/s41563-024-02036-2","DOIUrl":null,"url":null,"abstract":"<p>Multi-scale structures are ubiquitous in biological systems. However, manufacturing man-made structures with controllable features spanning multiple length scales, particularly down to nanoscale features, is very challenging, which seriously impacts their collective properties. Here we introduce an aluminium-based three-dimensional lithography that combines sequential nano–micro–macro-imprinting and anodization of multi-scale anodic aluminium oxide templates to manufacture well-defined multi-scale structures, using various materials. The high-fidelity nano-patterns and micro-patterns were facilitated by the surface work hardening phenomenon, where the nano-patterns can be further fine-tailored by anodization to have high-aspect-ratio and tunable nano-holes. Based on the aluminium-based three-dimensional lithography, multi-scale materials across length scales of at least 10<sup>7</sup> orders of magnitude were precisely fabricated, including carbon, semiconductors and metals. We integrated pressure sensors and biosensors with superior and customizable performances by tailoring the multi-scale carbon networks on different length scales from nanofibres and micropyramids to macrodome arrays. This work provides a versatile technique for prototyping on-demand multi-scale structures and materials to explore desirable mechanical and physical properties.</p>","PeriodicalId":19058,"journal":{"name":"Nature Materials","volume":null,"pages":null},"PeriodicalIF":37.2000,"publicationDate":"2024-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Aluminium surface work hardening enables multi-scale 3D lithography\",\"authors\":\"Lang Wang, Hangtong Li, Chen Zhao, Liqiang Zhang, Jiye Li, Salah Ud Din, Zichen Wang, Jiacheng Sun, Sergio Andres Galindo Torres, Zhiyong Fan, Liaoyong Wen\",\"doi\":\"10.1038/s41563-024-02036-2\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p>Multi-scale structures are ubiquitous in biological systems. However, manufacturing man-made structures with controllable features spanning multiple length scales, particularly down to nanoscale features, is very challenging, which seriously impacts their collective properties. Here we introduce an aluminium-based three-dimensional lithography that combines sequential nano–micro–macro-imprinting and anodization of multi-scale anodic aluminium oxide templates to manufacture well-defined multi-scale structures, using various materials. The high-fidelity nano-patterns and micro-patterns were facilitated by the surface work hardening phenomenon, where the nano-patterns can be further fine-tailored by anodization to have high-aspect-ratio and tunable nano-holes. Based on the aluminium-based three-dimensional lithography, multi-scale materials across length scales of at least 10<sup>7</sup> orders of magnitude were precisely fabricated, including carbon, semiconductors and metals. We integrated pressure sensors and biosensors with superior and customizable performances by tailoring the multi-scale carbon networks on different length scales from nanofibres and micropyramids to macrodome arrays. This work provides a versatile technique for prototyping on-demand multi-scale structures and materials to explore desirable mechanical and physical properties.</p>\",\"PeriodicalId\":19058,\"journal\":{\"name\":\"Nature Materials\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":37.2000,\"publicationDate\":\"2024-11-11\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Nature Materials\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://doi.org/10.1038/s41563-024-02036-2\",\"RegionNum\":1,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"CHEMISTRY, PHYSICAL\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Nature Materials","FirstCategoryId":"88","ListUrlMain":"https://doi.org/10.1038/s41563-024-02036-2","RegionNum":1,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"CHEMISTRY, PHYSICAL","Score":null,"Total":0}
引用次数: 0

摘要

多尺度结构在生物系统中无处不在。然而,制造具有跨越多个长度尺度的可控特征(尤其是纳米级特征)的人造结构非常具有挑战性,这严重影响了它们的集体特性。在此,我们介绍一种铝基三维光刻技术,该技术结合了多尺度阳极氧化铝模板的连续纳米-微米-宏观压印和阳极氧化,利用各种材料制造出定义明确的多尺度结构。表面加工硬化现象促进了高保真纳米图案和微图案的形成,纳米图案可通过阳极氧化进一步微调,以形成高宽比和可调的纳米孔。在铝基三维光刻技术的基础上,我们精确地制造出了长度尺度至少为 107 数量级的多尺度材料,包括碳、半导体和金属。我们通过定制不同长度尺度的多尺度碳网络(从纳米纤维、微金字塔到大圆顶阵列),集成了性能优越且可定制的压力传感器和生物传感器。这项工作为按需制作多尺度结构和材料原型以探索理想的机械和物理特性提供了一种通用技术。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

摘要图片

查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
Aluminium surface work hardening enables multi-scale 3D lithography

Multi-scale structures are ubiquitous in biological systems. However, manufacturing man-made structures with controllable features spanning multiple length scales, particularly down to nanoscale features, is very challenging, which seriously impacts their collective properties. Here we introduce an aluminium-based three-dimensional lithography that combines sequential nano–micro–macro-imprinting and anodization of multi-scale anodic aluminium oxide templates to manufacture well-defined multi-scale structures, using various materials. The high-fidelity nano-patterns and micro-patterns were facilitated by the surface work hardening phenomenon, where the nano-patterns can be further fine-tailored by anodization to have high-aspect-ratio and tunable nano-holes. Based on the aluminium-based three-dimensional lithography, multi-scale materials across length scales of at least 107 orders of magnitude were precisely fabricated, including carbon, semiconductors and metals. We integrated pressure sensors and biosensors with superior and customizable performances by tailoring the multi-scale carbon networks on different length scales from nanofibres and micropyramids to macrodome arrays. This work provides a versatile technique for prototyping on-demand multi-scale structures and materials to explore desirable mechanical and physical properties.

求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
Nature Materials
Nature Materials 工程技术-材料科学:综合
CiteScore
62.20
自引率
0.70%
发文量
221
审稿时长
3.2 months
期刊介绍: Nature Materials is a monthly multi-disciplinary journal aimed at bringing together cutting-edge research across the entire spectrum of materials science and engineering. It covers all applied and fundamental aspects of the synthesis/processing, structure/composition, properties, and performance of materials. The journal recognizes that materials research has an increasing impact on classical disciplines such as physics, chemistry, and biology. Additionally, Nature Materials provides a forum for the development of a common identity among materials scientists and encourages interdisciplinary collaboration. It takes an integrated and balanced approach to all areas of materials research, fostering the exchange of ideas between scientists involved in different disciplines. Nature Materials is an invaluable resource for scientists in academia and industry who are active in discovering and developing materials and materials-related concepts. It offers engaging and informative papers of exceptional significance and quality, with the aim of influencing the development of society in the future.
期刊最新文献
Terra incognita unravelled Electrochemically mutable soft metasurfaces Antithrombotic coating with sheltered positive charges prevents contact activation by controlling factor XII–biointerface binding Aluminium surface work hardening enables multi-scale 3D lithography Human immune organoids to decode B cell response in healthy donors and patients with lymphoma
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1