用于双向气流检测的仿生毛发辅助氮化镓光学器件。

IF 7.3 1区 工程技术 Q1 INSTRUMENTS & INSTRUMENTATION Microsystems & Nanoengineering Pub Date : 2024-11-08 DOI:10.1038/s41378-024-00794-2
Tianyu Ye, Jian Chen, Xinke Tang, Kwai Hei Li
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引用次数: 0

摘要

气流感应在医疗、工业和环境监测等众多领域发挥着举足轻重的作用。然而,使用单个传感装置检测双向气流是一项重大挑战。在这项工作中,我们介绍了一种微型气流传感装置,它采用了一种与仿生物毛发结构集成的氮化镓光学芯片。该传感装置由单片式氮化镓芯片组成,可同时处理光发射和检测。仿生毛发由尼龙纤维和 PDMS 薄膜构成,在将气流信号转换为光学变化的过程中会发生结构弯曲,从而调节芯片上探测器捕捉到的光线。气流强度与仿生毛发的弯曲程度直接相关,有助于通过光电流的变化精确检测气流速率。该集成装置可测量 -23.87 ms-1 至 21.29 ms-1 的大范围气流速率,快速响应时间为 13 ms,检测限为 0.1 ms-1。所开发的装置具有体积小、响应时间快和双向检测能力强等特点,在呼吸检测、语音识别、信息编码和实现逻辑运算等方面具有巨大的应用潜力。
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Biomimetic hair-assisted GaN optical devices for bidirectional airflow detection.

Airflow sensing plays a pivotal role in numerous fields, including medicine, industry, and environmental monitoring. However, detecting bidirectional airflow using a single sensing unit poses significant challenges. In this work, a miniature airflow sensing device is introduced, utilizing a GaN optical chip integrated with a biomimetic hair structure. The sensing device comprises a monolithic GaN chip that handles both light emission and detection. The biomimetic hairs, constructed from nylon fibers and PDMS film, undergo structural bending in converting airflow signals into optical changes, modulating the light captured by the on-chip detector. The intensity of the airflow directly correlates with the bending extent of the biomimetic hair, facilitating the precise detection of airflow rates through changes in the photocurrent. The integrated device can measure a wide range of airflow rates from -23.87 ms-1 to 21.29 ms-1, and exhibit a rapid response time of 13 ms and a detection limit of 0.1 ms-1. Characterized by its compact size, fast response time, and bidirectional detection ability, the developed device holds immense potential for applications in breath detection, speech recognition, encoding information, and the realization of logic operations.

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来源期刊
Microsystems & Nanoengineering
Microsystems & Nanoengineering Materials Science-Materials Science (miscellaneous)
CiteScore
12.00
自引率
3.80%
发文量
123
审稿时长
20 weeks
期刊介绍: Microsystems & Nanoengineering is a comprehensive online journal that focuses on the field of Micro and Nano Electro Mechanical Systems (MEMS and NEMS). It provides a platform for researchers to share their original research findings and review articles in this area. The journal covers a wide range of topics, from fundamental research to practical applications. Published by Springer Nature, in collaboration with the Aerospace Information Research Institute, Chinese Academy of Sciences, and with the support of the State Key Laboratory of Transducer Technology, it is an esteemed publication in the field. As an open access journal, it offers free access to its content, allowing readers from around the world to benefit from the latest developments in MEMS and NEMS.
期刊最新文献
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