{"title":"设计用于中红外甲烷传感的片上多槽卤化铝波导","authors":"Ningbo Ma, Zhengkun Qin, Mingquan Pi, Xueying Wang, Chuantao Zheng, Yuting Min, Huan Zhao, Mingxing Song","doi":"10.1002/mop.70036","DOIUrl":null,"url":null,"abstract":"<div>\n \n <p>A chalcogenide (ChG) multi-slot waveguide gas sensor with ChG as the core layer and silicon dioxide (SiO<sub>2</sub>) as the under-cladding layer is proposed. Multi-slot waveguide can be used in the mid-infrared gas measurement. The optimized power confinement factor (PCF) of the ChG multi-slot waveguide can be up to 41.3%, which is ∼20% higher than that of the optimized single-slot waveguide. At the absorption line located at 3.291 μm for methane (CH<sub>4</sub>) measurement, the limits of detection (LoD) of single-slot, double-slot, triple-slot, quadruple-slot waveguide sensors are determined to be 68.9, 57.4, 52, 48.6 parts per million (ppm), respectively. Compared with other waveguide sensors in the mid-infrared, the PCF of the proposed multi-slot ChG/SiO<sub>2</sub> waveguide sensor is enhanced by five times, which has the potential for highly sensitive gas sensing.</p>\n </div>","PeriodicalId":18562,"journal":{"name":"Microwave and Optical Technology Letters","volume":"66 11","pages":""},"PeriodicalIF":1.0000,"publicationDate":"2024-11-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Design of On-Chip Multi-Slot Chalcogenide Waveguide for Mid-Infrared Methane Sensing\",\"authors\":\"Ningbo Ma, Zhengkun Qin, Mingquan Pi, Xueying Wang, Chuantao Zheng, Yuting Min, Huan Zhao, Mingxing Song\",\"doi\":\"10.1002/mop.70036\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div>\\n \\n <p>A chalcogenide (ChG) multi-slot waveguide gas sensor with ChG as the core layer and silicon dioxide (SiO<sub>2</sub>) as the under-cladding layer is proposed. Multi-slot waveguide can be used in the mid-infrared gas measurement. The optimized power confinement factor (PCF) of the ChG multi-slot waveguide can be up to 41.3%, which is ∼20% higher than that of the optimized single-slot waveguide. At the absorption line located at 3.291 μm for methane (CH<sub>4</sub>) measurement, the limits of detection (LoD) of single-slot, double-slot, triple-slot, quadruple-slot waveguide sensors are determined to be 68.9, 57.4, 52, 48.6 parts per million (ppm), respectively. Compared with other waveguide sensors in the mid-infrared, the PCF of the proposed multi-slot ChG/SiO<sub>2</sub> waveguide sensor is enhanced by five times, which has the potential for highly sensitive gas sensing.</p>\\n </div>\",\"PeriodicalId\":18562,\"journal\":{\"name\":\"Microwave and Optical Technology Letters\",\"volume\":\"66 11\",\"pages\":\"\"},\"PeriodicalIF\":1.0000,\"publicationDate\":\"2024-11-15\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Microwave and Optical Technology Letters\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://onlinelibrary.wiley.com/doi/10.1002/mop.70036\",\"RegionNum\":4,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Microwave and Optical Technology Letters","FirstCategoryId":"5","ListUrlMain":"https://onlinelibrary.wiley.com/doi/10.1002/mop.70036","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
Design of On-Chip Multi-Slot Chalcogenide Waveguide for Mid-Infrared Methane Sensing
A chalcogenide (ChG) multi-slot waveguide gas sensor with ChG as the core layer and silicon dioxide (SiO2) as the under-cladding layer is proposed. Multi-slot waveguide can be used in the mid-infrared gas measurement. The optimized power confinement factor (PCF) of the ChG multi-slot waveguide can be up to 41.3%, which is ∼20% higher than that of the optimized single-slot waveguide. At the absorption line located at 3.291 μm for methane (CH4) measurement, the limits of detection (LoD) of single-slot, double-slot, triple-slot, quadruple-slot waveguide sensors are determined to be 68.9, 57.4, 52, 48.6 parts per million (ppm), respectively. Compared with other waveguide sensors in the mid-infrared, the PCF of the proposed multi-slot ChG/SiO2 waveguide sensor is enhanced by five times, which has the potential for highly sensitive gas sensing.
期刊介绍：
Microwave and Optical Technology Letters provides quick publication (3 to 6 month turnaround) of the most recent findings and achievements in high frequency technology, from RF to optical spectrum. The journal publishes original short papers and letters on theoretical, applied, and system results in the following areas.
- RF, Microwave, and Millimeter Waves
- Antennas and Propagation
- Submillimeter-Wave and Infrared Technology
- Optical Engineering
All papers are subject to peer review before publication
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
