论非晶硅薄膜中氦填充纳米孔的特性

IF 6.3 2区材料科学 Q2 CHEMISTRY, PHYSICAL Applied Surface Science Pub Date : 2024-11-17 DOI:10.1016/j.apsusc.2024.161772

Bertrand Lacroix, Asunción Fernández, N.C. Pyper, Alex J.W. Thom, Colm T. Whelan

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引用次数: 0

摘要

本论文对非晶硅中的不规则纳米孔隙进行了理论与实验相结合的研究。测量了每个孔的 STEM- ELLS 光谱。研究发现，观测到的氦 1s2→1s2p(1P) 激发能量与自由原子的激发能量相比发生了偏移。孔隙中的氦密度与这些能量偏移之间的关系得到了探讨，结果表明，这种关系与早先对氦在大块凝聚相中以及作为气泡封装在固体硅中的情况进行的研究完全一致。孔隙的密度、压力和深度都是应用中的关键特性。此外，还介绍了另一种更准确地确定孔隙深度的新方法。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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On the characteristics of helium filled nano-pores in amorphous silicon thin films

A joint theory–experimental study is presented of irregularly shaped nano-pores in amorphous silicon. STEM– ELLS spectra were measured for each pore. The observed helium

1 s^{2} \to 1 s 2 p

(¹P) excitation energies were found to be shifted from that of a free atom. The relation between the helium density in the pore and these energy shifts is explored and shown to be completely consistent with earlier studies of helium in its bulk condensed phases as well as encapsulated as bubbles in solid silicon. The density, pressure and depth of the pores, all key properties for applications, were determined. An alternative and novel method for determining the depth of the pores more accurately is presented.

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来源期刊

Applied Surface Science 工程技术-材料科学：膜

CiteScore

12.50

自引率

7.50%

发文量

3393

审稿时长

67 days

期刊介绍： Applied Surface Science covers topics contributing to a better understanding of surfaces, interfaces, nanostructures and their applications. The journal is concerned with scientific research on the atomic and molecular level of material properties determined with specific surface analytical techniques and/or computational methods, as well as the processing of such structures.