4H-SiC 金属膜:缓解大功率激光照射下的热漂移效应

IF 27.4 1区 材料科学 Q1 CHEMISTRY, MULTIDISCIPLINARY Advanced Materials Pub Date : 2024-11-19 DOI:10.1002/adma.202412414
Boqu Chen, Xiaoyu Sun, Xiaoxuan Li, Lu Cai, Ding Zhao, Kaikai Du, Meiyan Pan, Min Qiu
{"title":"4H-SiC 金属膜:缓解大功率激光照射下的热漂移效应","authors":"Boqu Chen, Xiaoyu Sun, Xiaoxuan Li, Lu Cai, Ding Zhao, Kaikai Du, Meiyan Pan, Min Qiu","doi":"10.1002/adma.202412414","DOIUrl":null,"url":null,"abstract":"<p><p>Enhancing energy density and efficiency in laser processing hinges on precise beam focusing, yet this often causes severe heat absorption and focus shifts in optical lenses. Traditional cooling methods increase cost and complexity, severely limiting versatility. Here, monolithic silicon carbide (SiC) metalens is introduced, which shows unparalleled thermal stability, integrated with a high-power laser. This metalens achieves diffraction-limited focusing with a numerical aperture (NA) of 0.5 and a focal length of 1 cm. Under a 1030 nm pulsed laser at 15 W for 1 h, it shows a minimal temperature rise of 3.2 °C and a tiny focal shift of 14 µm (0.1% relative), only 6% of the shift in conventional lenses. When used to cut a 4H-SiC substrate with the same laser, the metalens exhibit only an 11.4% change in cutting depth after 1 h of operation, correlating with the focal shift results. The results unveil a groundbreaking class of compact SiC photonics devices nearly impervious to heat absorption, representing a monumental leap for high-power laser systems and opening new horizons for their applications and efficiency.</p>","PeriodicalId":114,"journal":{"name":"Advanced Materials","volume":" ","pages":"e2412414"},"PeriodicalIF":27.4000,"publicationDate":"2024-11-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"4H-SiC Metalens: Mitigating Thermal Drift Effect in High-Power Laser Irradiation.\",\"authors\":\"Boqu Chen, Xiaoyu Sun, Xiaoxuan Li, Lu Cai, Ding Zhao, Kaikai Du, Meiyan Pan, Min Qiu\",\"doi\":\"10.1002/adma.202412414\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p><p>Enhancing energy density and efficiency in laser processing hinges on precise beam focusing, yet this often causes severe heat absorption and focus shifts in optical lenses. Traditional cooling methods increase cost and complexity, severely limiting versatility. Here, monolithic silicon carbide (SiC) metalens is introduced, which shows unparalleled thermal stability, integrated with a high-power laser. This metalens achieves diffraction-limited focusing with a numerical aperture (NA) of 0.5 and a focal length of 1 cm. Under a 1030 nm pulsed laser at 15 W for 1 h, it shows a minimal temperature rise of 3.2 °C and a tiny focal shift of 14 µm (0.1% relative), only 6% of the shift in conventional lenses. When used to cut a 4H-SiC substrate with the same laser, the metalens exhibit only an 11.4% change in cutting depth after 1 h of operation, correlating with the focal shift results. The results unveil a groundbreaking class of compact SiC photonics devices nearly impervious to heat absorption, representing a monumental leap for high-power laser systems and opening new horizons for their applications and efficiency.</p>\",\"PeriodicalId\":114,\"journal\":{\"name\":\"Advanced Materials\",\"volume\":\" \",\"pages\":\"e2412414\"},\"PeriodicalIF\":27.4000,\"publicationDate\":\"2024-11-19\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Advanced Materials\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://doi.org/10.1002/adma.202412414\",\"RegionNum\":1,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"CHEMISTRY, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Advanced Materials","FirstCategoryId":"88","ListUrlMain":"https://doi.org/10.1002/adma.202412414","RegionNum":1,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"CHEMISTRY, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0

摘要

提高激光加工的能量密度和效率取决于精确的光束聚焦,但这往往会导致光学透镜严重吸热和聚焦偏移。传统的冷却方法增加了成本和复杂性,严重限制了多功能性。这里介绍的单片碳化硅(SiC)金属膜具有无与伦比的热稳定性,并与高功率激光器集成在一起。这种金属膜实现了衍射极限聚焦,数值孔径(NA)为 0.5,焦距为 1 厘米。在 15 W 的 1030 nm 脉冲激光照射 1 小时后,它的温升仅为 3.2 °C,焦距偏移仅为 14 µm(相对偏移 0.1%),仅为传统透镜偏移的 6%。当使用相同的激光切割 4H-SiC 衬底时,金属膜在工作 1 小时后仅显示出 11.4% 的切割深度变化,这与焦距偏移的结果是一致的。这些结果揭示了一种几乎不受热量吸收影响的开创性紧凑型碳化硅光子器件,代表了高功率激光系统的一次巨大飞跃,为其应用和效率开辟了新天地。
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4H-SiC Metalens: Mitigating Thermal Drift Effect in High-Power Laser Irradiation.

Enhancing energy density and efficiency in laser processing hinges on precise beam focusing, yet this often causes severe heat absorption and focus shifts in optical lenses. Traditional cooling methods increase cost and complexity, severely limiting versatility. Here, monolithic silicon carbide (SiC) metalens is introduced, which shows unparalleled thermal stability, integrated with a high-power laser. This metalens achieves diffraction-limited focusing with a numerical aperture (NA) of 0.5 and a focal length of 1 cm. Under a 1030 nm pulsed laser at 15 W for 1 h, it shows a minimal temperature rise of 3.2 °C and a tiny focal shift of 14 µm (0.1% relative), only 6% of the shift in conventional lenses. When used to cut a 4H-SiC substrate with the same laser, the metalens exhibit only an 11.4% change in cutting depth after 1 h of operation, correlating with the focal shift results. The results unveil a groundbreaking class of compact SiC photonics devices nearly impervious to heat absorption, representing a monumental leap for high-power laser systems and opening new horizons for their applications and efficiency.

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来源期刊
Advanced Materials
Advanced Materials 工程技术-材料科学:综合
CiteScore
43.00
自引率
4.10%
发文量
2182
审稿时长
2 months
期刊介绍: Advanced Materials, one of the world's most prestigious journals and the foundation of the Advanced portfolio, is the home of choice for best-in-class materials science for more than 30 years. Following this fast-growing and interdisciplinary field, we are considering and publishing the most important discoveries on any and all materials from materials scientists, chemists, physicists, engineers as well as health and life scientists and bringing you the latest results and trends in modern materials-related research every week.
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