基于 128°Y 切割铌酸锂的近零 TCF 11.6-GHz lamb 波谐振器

IF 3.5 2区物理与天体物理 Q2 PHYSICS, APPLIED Applied Physics Letters Pub Date : 2024-11-18 DOI:10.1063/5.0233718

Feixuan Huang, Mingye Du, Chen Ma, Xi He, Feiya Suo, Jiawei Li, Tao Wu, Nan Wang

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引用次数: 0

摘要

本文设计、制造并测量了一种频率温度系数（TCF）接近于零的高频羔羊波谐振器（LWR）。报告中的谐振器采用双层结构，由铌酸锂（LiNbO3 或 LN）和二氧化硅（SiO2）组成，双层结构的顶部是光刻图案的铝（Al）间点蚀电极指。通过调整 LN 层和 SiO2 层的厚度比，优化了厚度剪切（TS）型 LWR 的机电耦合（k2）和 TCF（包括共振频率 TCFr 和反共振频率 TCFa）。实验结果与理论分析非常吻合，显示制造出的 11.6 GHz LWR 的 k2 达到 12.2%，在 30 °C 至 85 °C 的温度范围内，TCFr 和 TCFa 分别为 -4.2 和 -5.4 ppm/K，显示了未来 10 GHz 以上无线通信系统的巨大应用潜力。

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Near-zero TCF 11.6-GHz lamb wave resonator based on 128°Y-cut LiNbO3

In this paper, a high-frequency lamb wave resonator (LWR) with near zero temperature coefficient of frequency (TCF) is designed, fabricated, and measured. The reported resonator is of a bi-layer structure consisting of lithium niobate (LiNbO3 or LN) and silicon dioxide (SiO2), and lithographically patterned aluminum (Al) inter-digitated electrode fingers on top of the bi-layer structure. By adjusting the thickness ratio of LN and SiO2 layers, both the electromechanical coupling (k2) and the TCF, including both TCF at resonant frequency (TCFr) and TCF at anti-resonant frequency (TCFa), of the thickness shear (TS) type LWR are optimized. Experimental results, which are in excellent agreement with theoretical analysis, show that the fabricated 11.6-GHz LWR achieves a k2 of 12.2%, with TCFr and TCFa being −4.2 and −5.4 ppm/K over a temperature range from 30 °C to 85 °C, respectively, demonstrating huge potential in applications for future wireless communication systems above 10 GHz.

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来源期刊

Applied Physics Letters 物理-物理：应用

CiteScore

6.40

自引率

10.00%

发文量

1821

审稿时长

1.6 months

期刊介绍： Applied Physics Letters (APL) features concise, up-to-date reports on significant new findings in applied physics. Emphasizing rapid dissemination of key data and new physical insights, APL offers prompt publication of new experimental and theoretical papers reporting applications of physics phenomena to all branches of science, engineering, and modern technology. In addition to regular articles, the journal also publishes invited Fast Track, Perspectives, and in-depth Editorials which report on cutting-edge areas in applied physics. APL Perspectives are forward-looking invited letters which highlight recent developments or discoveries. Emphasis is placed on very recent developments, potentially disruptive technologies, open questions and possible solutions. They also include a mini-roadmap detailing where the community should direct efforts in order for the phenomena to be viable for application and the challenges associated with meeting that performance threshold. Perspectives are characterized by personal viewpoints and opinions of recognized experts in the field. Fast Track articles are invited original research articles that report results that are particularly novel and important or provide a significant advancement in an emerging field. Because of the urgency and scientific importance of the work, the peer review process is accelerated. If, during the review process, it becomes apparent that the paper does not meet the Fast Track criterion, it is returned to a normal track.