塑造未来:硅晶片生产和精加工的创新

IF 2.8 3区 材料科学 Q3 CHEMISTRY, PHYSICAL Silicon Pub Date : 2024-10-12 DOI:10.1007/s12633-024-03168-5
Shagun Kainth, Piyush Sharma, P.K. Diwan, O.P. Pandey
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引用次数: 0

摘要

硅晶片是生产集成电路、微芯片和太阳能电池等各种设备的重要部件。硅晶片的质量和特性在很大程度上影响着这些设备的性能和可靠性。硅晶片是通过 Czochralski 法等工艺生产出来的,这种方法是先培育出单晶硅锭,然后将其切成薄片。这些方法虽然有效,但在可扩展性、成本和均匀性方面存在局限性。硅晶片生产的最新进展主要集中在提高效率、降低成本和提高质量方面。硅晶片生产和精加工领域的创新对电子、电信、汽车和可再生能源等各行各业都有重大影响。本文概述了高纯度硅的生产过程,高纯度硅是半导体设备制造的重要组成部分。文章全面介绍了从二氧化硅中提取硅、精炼冶金级硅 (MGS) 以达到高纯度的过程。此外,文章还介绍了硅晶片制造过程中涉及的各种工艺,包括切割、成型、抛光和清洁,并探讨了可提高晶片制造能力的先进技术。
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Shaping the Future: Innovations in Silicon Wafer Production and Finishing

Silicon wafers are essential components in the production of various devices, including integrated circuits, microchips, and solar cells. The quality and characteristics of silicon wafers greatly influence the performance and reliability of these devices. Silicon wafers have been produced through processes like the Czochralski method, which involves growing a single crystal ingot of silicon and then slicing it into thin wafers. While effective, these methods have limitations in terms of scalability, cost, and uniformity. Recent advancements in silicon wafer production focus on improving efficiency, reducing costs, and enhancing quality. The innovations in silicon wafer production and finishing have significant implications for various industries, including electronics, telecommunications, automotive, and renewable energy. This article provides an overview of the production of high-purity silicon, a vital component in semiconductor device manufacturing. A comprehensive description related to the extraction of silicon from silica, the refinement of metallurgical grade silicon (MGS) to achieve high purity. Additionally, the article covers various processes involved in silicon wafer manufacturing, including cutting, shaping, polishing, and cleaning, and explores advancements in technology that could enhance wafer manufacturing capabilities.

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来源期刊
Silicon
Silicon CHEMISTRY, PHYSICAL-MATERIALS SCIENCE, MULTIDISCIPLINARY
CiteScore
5.90
自引率
20.60%
发文量
685
审稿时长
>12 weeks
期刊介绍: The journal Silicon is intended to serve all those involved in studying the role of silicon as an enabling element in materials science. There are no restrictions on disciplinary boundaries provided the focus is on silicon-based materials or adds significantly to the understanding of such materials. Accordingly, such contributions are welcome in the areas of inorganic and organic chemistry, physics, biology, engineering, nanoscience, environmental science, electronics and optoelectronics, and modeling and theory. Relevant silicon-based materials include, but are not limited to, semiconductors, polymers, composites, ceramics, glasses, coatings, resins, composites, small molecules, and thin films.
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