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Correction to: Design and Theoretical Study of One-Dimensional Photonic Crystal Sensors for Refractive Index and Incident Angle 修正:折射率和入射角一维光子晶体传感器的设计与理论研究
IF 3.3 3区 材料科学 Q3 CHEMISTRY, PHYSICAL Pub Date : 2025-09-17 DOI: 10.1007/s12633-025-03448-8
Ahmed K. S. AbuAltayef, Anas A. M. Alqanoo, Sofyan A. Taya, K. H. Ibnaouf
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引用次数: 0
Effect of the Crucible Cover Coating Materials on the Carbon Impurity for the Multi-Crystalline Silicon Ingot Grown by the Directional Solidification Process 坩埚包覆材料对定向凝固多晶硅锭碳杂质含量的影响
IF 3.3 3区 材料科学 Q3 CHEMISTRY, PHYSICAL Pub Date : 2025-08-18 DOI: 10.1007/s12633-025-03415-3
Mangmang Gao, Jiahui Chen, Pingping Yang, Yaguo Ding, Yanbin Gu, Shaheen Kausar, Ziwei Zhao

The multi-crystalline silicon (mc-Si) grown by directional solidification (DS) system is a suitable candidate for fabricating the Si parts used for the semiconductor etching application, which requires less SiC precipitates and low thermal stress in the bulk ingot. In this paper, we employed a global simulation model to analyze the influence of crucible covers on the distribution of carbon impurities during the DS process. The entire process, including impurity generation, penetration, transport, and incorporation, has been characterized during crystal growth using both traditional uncoated crucible covers and those coated with W, Mo, and SiN layers, respectively. The protective effect of the coating layer is primarily attributed to two mechanisms. A noticeable isolation effect of the coating materials in the impurity generation process has been found, inhibiting the reaction between SiO gas and the graphite components along the crucible cover surface at high temperatures. Moreover, a detaining effect of impurity transport during the transport process occurs, where the C atoms are detained in the natural convection-dominated region of the Si melt, depending strongly on the melt temperature gradient. Therefore, fewer C atoms can be incorporated into the grown Si ingot. Through comparative investigation, Mo is an optimal coating material for crucible covers due to its lower emissivity, resulting in a 18.4% decrease in SiC content in the Si ingot compared to that of the traditional uncoated crucible cover. Thus, coating a Mo layer on the crucible cover surface is an effective solution for fabricating the bulk mc-Si ingot for semiconductor etching applications.

通过定向凝固(DS)系统生长的多晶硅(mc-Si)是制造用于半导体蚀刻应用的硅部件的合适人选,这对块状铸锭中SiC析出物较少,热应力低。本文采用全局模拟模型分析了坩埚盖对DS过程中碳杂质分布的影响。采用传统的无涂层坩埚盖和分别涂有W、Mo和SiN层的坩埚盖,对晶体生长过程中的杂质生成、渗透、输运和掺入等全过程进行了表征。涂层的保护作用主要有两种机制。发现涂层材料在杂质生成过程中有明显的隔离作用,抑制了高温下沿坩埚盖面SiO气体与石墨组分之间的反应。此外,在输运过程中会发生杂质输运的滞留效应,其中C原子被滞留在Si熔体的自然对流主导区域,这在很大程度上取决于熔体温度梯度。因此,生长后的Si锭中可以掺入较少的C原子。通过对比研究,Mo具有较低的发射率,是坩埚盖的最佳涂层材料,与传统的未涂层坩埚盖相比,其Si锭中的SiC含量降低了18.4%。因此,在坩埚盖表面涂覆Mo层是制造用于半导体刻蚀应用的大块mc-Si铸锭的有效解决方案。
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引用次数: 0
Bandgap Engineering and Impedance Spectroscopy Analysis of Linearly Graded Group IV Material-based Alloys for Photovoltaic Applications 光电应用线性梯度IV族材料基合金的带隙工程和阻抗谱分析
IF 3.3 3区 材料科学 Q3 CHEMISTRY, PHYSICAL Pub Date : 2025-08-18 DOI: 10.1007/s12633-025-03442-0
Devansh Gahlawat, Jaspinder Kaur, Rikmantra Basu, Ajay Kumar Sharma, Uma Rani, Jaya Madan, Rahul Pandey

We report a comprehensive numerical study of single-junction photovoltaic devices incorporating linearly graded Si1-x-yGeySnx absorber layers, performed using the SCAPS-1D simulator. Four compositional profiles—Si0.75-xGe0.25Snx, Si0.70-xGe0.30Snx, Si0.65-xGe0.35Snₓ, and Si0.60Ge0.40Snx—were engineered over a 1 μm thickness to achieve graded bandgaps from 1.28 eV down to 1.19 eV, extending the absorption edge from 970 nm to 1,040 nm. Optimization of absorber thickness, doping densities (1012–1018 cm−3 acceptors), trap densities (1010–1015 cm−3), and capture cross Sects. (10–20–10–10 cm2) yielded peak power conversion efficiencies of 26.02%, 26.37%, 26.25%, and 25.77%, respectively. Corresponding short-circuit current densities (27.95–30.60 mA/cm2) and open-circuit voltages (1.00–1.08 V) highlight the trade-off between photocurrent enhancement and voltage retention. External quantum efficiency profiles exhibited gradual roll-off beyond the critical wavelength, with peak spectral responses of 0.510 A/W (750 nm), 0.542 A/W (800 nm), 0.539 A/W (790 nm), and 0.519 A/W (770 nm). Impedance spectroscopy (10–12–1012 Hz) demonstrated reduced charge-transfer resistance with thicker absorbers and a resistive-to-capacitive transition between 10–2 and 102 Hz, beyond which capacitive bypassing dominates. Johnson-Nyquist noise analysis revealed series noise attenuation at low frequencies and parallel noise emergence at high frequencies, elucidating charge-transport regimes. These findings establish a robust theoretical framework for SiGeSn ternary alloys, providing critical design guidelines for bandgap engineering, interface optimization, and noise management in next-generation high-efficiency photovoltaic technologies.

我们报告了采用SCAPS-1D模拟器对包含线性梯度Si1-x-yGeySnx吸收层的单结光伏器件进行的全面数值研究。采用si0.75 - xge0.25 snx、Si0.70-xGe0.30Snx、Si0.65-xGe0.35Snₓ和si0.60 ge0.40 snx四种厚度为1 μm的结构,实现了从1.28 eV到1.19 eV的渐变带隙,将吸收边从970 nm延伸到1040 nm。吸收剂厚度、掺杂密度(1012-1018 cm−3受体)、陷阱密度(1010-1015 cm−3)和捕获截面的优化。(10-20-10-10 cm2)的峰值功率转换效率分别为26.02%、26.37%、26.25%和25.77%。相应的短路电流密度(27.95-30.60 mA/cm2)和开路电压(1.00-1.08 V)突出了光电流增强和电压保持之间的权衡。在临界波长之外,外部量子效率曲线呈逐渐滚降的趋势,峰值光谱响应分别为0.510 A/W (750 nm)、0.542 A/W (800 nm)、0.539 A/W (790 nm)和0.519 A/W (770 nm)。阻抗谱(10-12-1012 Hz)表明,较厚的吸收剂降低了电荷转移电阻,10-2和102 Hz之间的电阻-电容过渡,超过电容旁路占主导地位。Johnson-Nyquist噪声分析揭示了低频时的串联噪声衰减和高频时的并行噪声出现,阐明了电荷输运机制。这些发现为SiGeSn三元合金建立了强大的理论框架,为下一代高效光伏技术的带隙工程、界面优化和噪声管理提供了关键的设计指导。
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引用次数: 0
Accurate Estimation of Density of Liquid Siloxanes Via Robust Machine Learning Methods 基于鲁棒机器学习方法的液体硅氧烷密度精确估计
IF 3.3 3区 材料科学 Q3 CHEMISTRY, PHYSICAL Pub Date : 2025-08-15 DOI: 10.1007/s12633-025-03375-8
Huan Liu, Ayat Hussein Adhab, G. PadmaPriya, Anupam Yadav, Aditya Kashyap, Kattela Chennakesavulu, Biswaranjan Mohanty, Manish Srivastava, Morug Salih Mahdi, Shirin Shomurotova, Aseel Salah Mansoor, Usama Kadem Radi, Nasr Saadoun Abd, Samim Sherzod

This study addresses the challenge of accurately predicting the density of liquid siloxanes, which are widely used as working fluids in systems designed for recovering waste heat from low-temperature and minor-scale origins such as solar energy, biomass, geothermal energy, and turbine exhaust. Accurate modeling of transport properties, including density, is essential for improving the performance of these systems. In this research, several machine learning algorithms were created and assessed to predict siloxane density based on temperature, pressure, boiling point, and molar mass. The methods include decision trees, ensemble methods, boosting techniques, random forest, convolutional neural networks, support vector machines, k-nearest neighbors, and multilayer perceptron artificial neural networks. A sensitivity assessment was performed to evaluate the influence of each input variable, and an outlier detection method was applied to enhance data reliability. The multilayer perceptron model outperformed all other algorithms, achieving a coefficient of determination (R2) of 0.982 and an average absolute relative error of 0.58% on the testing dataset. Furthermore, temperature exhibited a negative correlation with density, while pressure was identified as the most influential factor.

该研究解决了准确预测液态硅氧烷密度的挑战,液态硅氧烷被广泛用作回收低温和小规模热源废热的系统的工作流体,如太阳能、生物质、地热能和涡轮废气。包括密度在内的输运特性的精确建模对于改善这些系统的性能至关重要。在这项研究中,我们创建并评估了几种机器学习算法,以根据温度、压力、沸点和摩尔质量来预测硅氧烷密度。这些方法包括决策树、集成方法、增强技术、随机森林、卷积神经网络、支持向量机、k近邻和多层感知器人工神经网络。通过敏感性评估来评估每个输入变量的影响,并采用离群值检测方法来提高数据的可靠性。多层感知器模型优于所有其他算法,在测试数据集上实现了0.982的决定系数(R2)和0.58%的平均绝对相对误差。此外,温度与密度呈负相关,而压力是最重要的影响因素。
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引用次数: 0
Mechanical and Thermal Properties of the Novel Ultra-light SiC Ceramic with Double-layer Hollow Interconnected Skeleton 新型双层空心互联骨架超轻SiC陶瓷的力学和热性能
IF 3.3 3区 材料科学 Q3 CHEMISTRY, PHYSICAL Pub Date : 2025-08-15 DOI: 10.1007/s12633-025-03446-w
Bangxiao Mao, Xisheng Xia, Dakui Wang, Sheng Wang, Guangren Yang, Shan Gao, Guosheng Gao, Chunhui Li

In this paper, a novel ultra-light SiC ceramic with double-layer hollow interconnected skeleton (SSCi) was successfully synthesized by combining controllable CVI technology with an oxidation process. Pyrolytic carbon of CVI was the key technology to introduce into porosity. The pore structure, XRD, microstructure, compression properties, and thermal insulation performance of the prepared SSCi were investigated. The effect of the number of hollow layers on the SiC ceramics was also studied, which provided certain guidance for the optimization of parameters and properties of porous SiC ceramic materials. SSCi exhibited ultra-light characteristics with a density of 92 mg·cm−3. Benefiting from the double-layer hollow structure, the specific surface area of SSCi reached 906 m2·g−1. SEM results indicated that the double-layer hollow structure was successfully fabricated. SSCi consisted of two layers of SiC, and the double-layer hollow skeleton ensured the continuity of SSCi. Due to the synergistic strengthening effect of the double-layer structure, the compression strength of SSCi was enhanced. The compression strength of SSCi reached 2.55 MPa, with a specific strength of 27.72 MPa·g−1·cm3. The hierarchical energy dissipation mechanism delayed the overall failure of SSCi, and strain hardening enhanced the load-bearing capacity of the matrix. The thermal conductivity of SSCi increased most slowly with temperature. The high crystallinity of the outer SiC layer gave it strong infrared radiation reflection capability, reducing radiative heat transfer. The ultra-high specific surface area of the double-layer hollow structure also caused multiple reflections of thermal radiation, significantly hindering radiative heat transfer. SSCi exhibited potential applications in the field of high-temperature thermal insulation.

本文将可控CVI技术与氧化工艺相结合,成功合成了一种新型的双层空心互联骨架(SSCi)超轻SiC陶瓷。CVI的热解碳是引入孔隙的关键技术。研究了制备的SSCi的孔隙结构、XRD、微观结构、压缩性能和保温性能。研究了空心层数对SiC陶瓷性能的影响,为多孔SiC陶瓷材料的参数优化和性能优化提供了一定的指导。SSCi表现出超轻的特征,密度为92 mg·cm−3。得益于双层中空结构,SSCi的比表面积达到906 m2·g−1。SEM结果表明,双层空心结构制备成功。SSCi由两层SiC组成,双层中空骨架保证了SSCi的连续性。由于双层结构的协同强化作用,SSCi的抗压强度得到了提高。SSCi的抗压强度为2.55 MPa,比强度为27.72 MPa·g−1·cm3。分层能量耗散机制延缓了SSCi的整体破坏,应变硬化增强了基体的承载能力。SSCi的导热系数随温度的升高最为缓慢。外SiC层的高结晶度使其具有较强的红外辐射反射能力,减少了辐射传热。双层中空结构的超高比表面积也引起了热辐射的多次反射,显著阻碍了辐射传热。SSCi在高温保温领域具有潜在的应用前景。
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引用次数: 0
Melt-Pool Sledding of SiC-AISI304 Stainless Steel Cladding on Low-Carbon Steel Using Gas Metal Arc Welding Process 低碳钢包层SiC-AISI304不锈钢的熔池焊接
IF 3.3 3区 材料科学 Q3 CHEMISTRY, PHYSICAL Pub Date : 2025-08-14 DOI: 10.1007/s12633-025-03408-2
Mohd Aslam, Ahmad Baharuddin Abdullah, Guddakesh Kumar Chandan, Mehdi Mehtab Mirad

A successful attempt has been done to use conventional gas metal arc welding (GMAW) to increase the melt-pool sledding in width using SiC-reinforced with AISI304 stainless steel (ASS) clad layer on low carbon steel (LCS) substrate. Defect-free melt-pool sledding width was observed at voltages greater than 24 V, with a feed rate of 5 m/min to 6 m/min. Additionally, a uniformly distributed fine SiC-reinforced clad layer with improved clad dilution on the LCS substrate was found. SiC-reinforced clad layer showed hard-intermetallic phases such as Cr7C3, Fe5C2, Fe2C, Mn3Ni2Si, and CrSi2. Additionally, the hardened phases in the SiC-ASS clad layer enhanced the hardness to 519 HV0.5, compared to 177 HV0.5 for the LCS substrate. The SiC-ASS clad layer also improved wear resistance up to eight times that of the LCS substrate.

在低碳钢(LCS)衬底上采用AISI304不锈钢(ASS)包覆sic增强的传统气体金属电弧焊(GMAW)增加熔池宽度的成功尝试。当电压大于24 V,进料速率为5 ~ 6 m/min时,熔池无缺陷滑橇宽度。此外,在LCS基体上发现了均匀分布的细sic增强包覆层,包覆层稀释度有所改善。sic增强包覆层表现为Cr7C3、Fe5C2、Fe2C、Mn3Ni2Si、CrSi2等硬金属间相。此外,SiC-ASS包覆层中的硬化相将硬度提高到519 HV0.5,而LCS衬底的硬度为177 HV0.5。SiC-ASS包覆层的耐磨性也比LCS基板提高了8倍。
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引用次数: 0
Silica Nanoplatform with Bioactive Molecule Detection and Delivery for Diabetic Nephropathy Therapy 具有生物活性分子检测和递送的二氧化硅纳米平台用于糖尿病肾病治疗
IF 3.3 3区 材料科学 Q3 CHEMISTRY, PHYSICAL Pub Date : 2025-08-13 DOI: 10.1007/s12633-025-03440-2
Yaguang Zhang, Mingyan Zhou, Xiaoyu Zhao

Diabetic nephropathy (DN), a progressive microvascular complication of diabetes, is primarily driven by chronic hyperglycemia-induced inflammation, fibrosis, and cell cycle dysregulation. Recent studies identified mitotic arrest deficient 2-like protein B (MAD2B) as a critical regulatory protein in DN, markedly upregulated in high-glucose-treated human glomerular mesangial cells (HGMCs), accompanied by a 2.8-fold increase in IL-6 expression, highlighting its pathological relevance. To achieve targeted therapy and real-time monitoring, we designed a silica-based hybrid nanoplatform incorporating a lanthanide coordination polymer [Sm(L)₃·CH₃OH] (CP1) with a well-defined tricapped trigonal prismatic geometry (confirmed by SCXRD). CP1 was loaded with a lipophilic bioactive molecule—Compound 1, a diterpenoid quinone derived from Salvia miltiorrhiza known for anti-inflammatory and anti-fibrotic properties—and subsequently coated with carboxymethyl chitosan (CMCS) and 3-aminopropyltrimethoxysilane (APTMS) to yield CMCS-APTMS@CP1@1. The resulting nanoplatform exhibited enhanced aqueous stability, biocompatibility, and sustained-release capability under physiological conditions. Notably, CMCS-APTMS@CP1@1 also demonstrated robust fluorescence responsiveness toward MAD2B, enabling sensitive detection with a linear response in the 0–40 μM range (R2 = 0.998) and a detection limit of 58 nM. Fluorescence lifetime and UV–vis analyses revealed a Förster resonance energy transfer (FRET)-mediated quenching–recovery mechanism. Molecular docking confirmed strong hydrogen bonding (∼1.7 Å) between the imide moiety of the Sm complex and the hydroxyl group of TYR-280 in MAD2B. These findings underscore the dual functionality of CMCS-APTMS@CP1@1 as both a smart therapeutic carrier and a MAD2B-responsive fluorescence probe, offering promising potential for precision DN treatment and monitoring.

糖尿病肾病(DN)是糖尿病的一种进行性微血管并发症,主要由慢性高血糖诱导的炎症、纤维化和细胞周期失调驱动。最近的研究发现,有丝分裂停止缺陷2样蛋白B (MAD2B)是DN的一个关键调节蛋白,在高糖处理的人肾小球系膜细胞(HGMCs)中显著上调,并伴有IL-6表达增加2.8倍,突出了其病理相关性。为了实现靶向治疗和实时监测,我们设计了一种基于硅的混合纳米平台,该平台包含镧系配位聚合物[Sm(L)₃·CH₃OH] (CP1),具有明确的三向三角棱柱形几何结构(经SCXRD证实)。CP1负载亲脂性生物活性分子化合物1,这是一种从丹参中提取的二萜醌,具有抗炎和抗纤维化的特性,随后用羧甲基壳聚糖(CMCS)和3-氨基丙基三甲氧基硅烷(APTMS)包被,得到CMCS-APTMS@CP1@1。所制备的纳米平台在生理条件下表现出更高的水稳定性、生物相容性和缓释能力。值得注意的是,CMCS-APTMS@CP1@1对MAD2B也表现出强大的荧光响应性,在0 ~ 40 μM范围内具有线性响应(R2 = 0.998),检测限为58 nM。荧光寿命和紫外-可见分析揭示了Förster共振能量转移(FRET)介导的猝灭-恢复机制。分子对接证实了Sm配合物的亚胺部分与MAD2B中TYR-280的羟基之间存在强氢键(~ 1.7 Å)。这些发现强调了CMCS-APTMS@CP1@1作为智能治疗载体和mad2b响应荧光探针的双重功能,为精确治疗和监测DN提供了有希望的潜力。
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引用次数: 0
Comparative Study of Group-IV Materials in SPR Sensors: Silicon as an Optimized Choice Based on Theoretical Analysis 四族材料在SPR传感器中的比较研究:基于理论分析的优化选择硅
IF 3.3 3区 材料科学 Q3 CHEMISTRY, PHYSICAL Pub Date : 2025-08-13 DOI: 10.1007/s12633-025-03445-x
Mohan Kumar Paswan, Rikmantra Basu

This study presents an optimized high-sensitivity Surface Plasmon Resonance (SPR) sensor based on Group-IV materials integrated with a CaF(_{2}) prism in the Kretschmann configuration. The research aims to enhance sensor performance by leveraging the high refractive index(RI) and strong plasmonic coupling of Group-IV materials with silver. The proposed structure consists of CaF(_{2})/Ag/Group-IV materials/Analyte and operates at a wavelength of 633 nm. Through systematic optimization, a silicon configuration of seven monolayers (total thickness 2.31nm) yielded the best performance, achieving a maximum sensitivity(S) of 472(^circ )/RIU, a Figure of Merit (FoM) of 140.89, a Limit of Detection (LoD) of (0.636 times 10^{-5}), and a Full Width at Half Maximum (FWHM) of (3.35^circ ) for a refractive index range of 1.331 to 1.336. Compared to conventional SPR sensors, the proposed design demonstrates superior plasmonic confinement and reduced damping losses, as evidenced by strong field localization at the metal–dielectric interface and a narrower reflectance dip (FWHM = 3.35(^circ )), leading to enhanced sensing accuracy. These findings highlight the sensor’s potential for highly precise chemical and biochemical detection.

本研究提出了一种优化的高灵敏度表面等离子体共振(SPR)传感器,该传感器基于Group-IV材料,集成了Kretschmann结构的CaF (_{2})棱镜。该研究旨在利用iv族材料与银的高折射率(RI)和强等离子体耦合来提高传感器性能。该结构由CaF (_{2}) /Ag/Group-IV材料/Analyte组成,工作波长为633 nm。通过系统优化,在折射率范围为1.331 ~ 1.336的情况下,7层单层(总厚度2.31nm)的硅结构获得了最佳性能,最大灵敏度(S)为472 (^circ ) /RIU,品质因数(FoM)为140.89,检测限(LoD)为(0.636 times 10^{-5}),半最大全宽(FWHM)为(3.35^circ )。与传统的SPR传感器相比,该设计具有优越的等离子体约束和更低的阻尼损失,这可以通过金属-介电界面处的强场定位和更窄的反射倾角(FWHM = 3.35 (^circ ))来证明,从而提高了传感精度。这些发现突出了该传感器在高精度化学和生化检测方面的潜力。
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引用次数: 0
Comparative Study of Double Gate Inverted-T Shaped, TFET for Extremely Low Power Logic and Analog Circuit in AI Chips 人工智能芯片中超低功耗逻辑电路与模拟电路双栅倒t型TFET的比较研究
IF 3.3 3区 材料科学 Q3 CHEMISTRY, PHYSICAL Pub Date : 2025-08-13 DOI: 10.1007/s12633-025-03437-x
Saket Suman, A. Srivastava, Angsuman Sarkar

In this paper, a novel structure, double gate with inverted T-shaped TFET (DG-IT-TFET has been proposed and studied with and without charge plasma technique. We have further studied the DG-IT-TFET structures on three different substrate namely, Silicon-based, Germanium-based and hetero Silicon–Germanium based. In this novel structure we have used 15 nm gate thickness for both gates. Lateral length (LT) has been optimized as 1 nm that gives vertical tunneling and enhanced the subthreshold slope (SS). The novel structure with dual gate provides flexibility over electrostatics control, improved ON current, lowers subthreshold swing and improves ON-current to OFF-current ratio. One has also studied and analyzes the digital and analog parameters of novel structure DG-IT-TFET with and without charge plasma. In this charge plasma concept, apply appropriate work function to both electrodes. Our comparative study shows that Si-DG-IT-TFET(without charge plasma) structure has most significant improvement in ON current of value 2.2 × 10−4A/μm, very low leakage current 6.8 × 10−17A/μm, and very low SS with a value of (13.5 mV/dec). Si-DG-IT-TFET structure produces improved ION/IOFF with the peak value of 1012. Comparative results with charge plasma and without charge plasma of DG-IT-TFET structure listed are Tables 2 and 3. The Ge based DG-IT-TFET(without charge plasma) structure shows promising results for analog circuits. Thus our proposed DG-IT-TFET structure is good electrical characteristics. Thus this structure is most promising candidate for extremely low power digital and analog chips.

本文提出了一种新型结构的双栅极倒t形TFET (DG-IT-TFET),并对其进行了带和不带电荷等离子体技术的研究。我们进一步研究了三种不同衬底上的DG-IT-TFET结构,即硅基、锗基和异质硅-锗基。在这种新颖的结构中,我们对两个栅极都使用了15nm的栅极厚度。横向长度(LT)已优化为1 nm,可实现垂直隧道并增强阈下坡度(SS)。双栅极结构提供了静电控制的灵活性,提高了导通电流,降低了亚阈值摆幅,提高了导通与关断电流比。研究并分析了新型结构DG-IT-TFET带和不带电荷等离子体的数字和模拟参数。在这种电荷等离子体概念中,对两个电极施加适当的功函数。对比研究表明,Si-DG-IT-TFET(无电荷等离子体)结构在导通电流2.2 × 10−4A/μm、极低漏电流6.8 × 10−17A/μm和极低SS值(13.5 mV/dec)方面改善最为显著。Si-DG-IT-TFET结构产生了更好的离子/IOFF,峰值为1012。DG-IT-TFET结构带电荷等离子体与不带电荷等离子体的对比结果见表2和表3。基于Ge的DG-IT-TFET(无电荷等离子体)结构在模拟电路中显示出有希望的结果。因此,我们所提出的DG-IT-TFET结构具有良好的电特性。因此,这种结构是极低功耗数字和模拟芯片最有希望的候选人。
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引用次数: 0
Junction Depth Optimization in Trench Gate Nanosheet FETs for Reduced Off-State Current 沟槽栅极纳米片场效应管结深度优化以减小关断电流
IF 3.3 3区 材料科学 Q3 CHEMISTRY, PHYSICAL Pub Date : 2025-08-12 DOI: 10.1007/s12633-025-03439-9
Da-Eun Bang, Moon-Kwon Lee, Eui-Cheol Yun, Tae-Hyun Kil, Hyo-Jun Park, Ju-Won Yeon, Min-Woo Kim, Su-Jin Jeon, A-Young Kim, Jun-Young Park

Recently introduced nanosheet field-effect transistors (NS FETs) are cutting-edge technology in the foundry business. Compared to conventional FinFETs, NS FETs exhibit superior gate controllability and output current. However, NS FETs are still limited by the presence of a substrate parasitic n-type metal–oxide–semiconductor (NMOS), which increases off-state current (IOFF) and impacts overall device reliability. Trench gate (TG) NS FETs have been proposed as a solution, but the process for source/drain (S/D) formation in TG NS FETs remains unclear. This study focuses on optimizing the junction depth (Xj) in TG NS FETs, which is a key factor to enhancing device performance. A shallow Xj increases the effective gate length (LG.EFF) of the substrate parasitic NMOS, effectively suppressing short-channel effects (SCEs). To guide the development of these TG NS FETs, both device fabrication and electrical characteristics were simulated using 3-dimensional (3-D) technology computer-aided design (TCAD), with various design parameters considered.

最近推出的纳米片场效应晶体管(NS fet)是代工行业的前沿技术。与传统的finfet相比,NS fet具有优越的栅极可控性和输出电流。然而,NS fet仍然受到衬底寄生n型金属氧化物半导体(NMOS)的限制,这会增加断开状态电流(IOFF)并影响整体器件的可靠性。沟槽栅(TG) NS fet已被提出作为一种解决方案,但在TG NS fet中源极/漏极(S/D)形成的过程尚不清楚。本文主要研究如何优化TG NS fet的结深(Xj),这是提高器件性能的关键因素。较浅的Xj增加了衬底寄生NMOS的有效栅极长度,有效地抑制了短通道效应(SCEs)。为了指导这些TG NS fet的开发,使用三维(3-D)技术计算机辅助设计(TCAD)模拟了器件的制造和电气特性,并考虑了各种设计参数。
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引用次数: 0
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