The multi-crystalline silicon (mc-Si) grown by directional solidification (DS) system is a suitable candidate for fabricating the Si parts used for the semiconductor etching application, which requires less SiC precipitates and low thermal stress in the bulk ingot. In this paper, we employed a global simulation model to analyze the influence of crucible covers on the distribution of carbon impurities during the DS process. The entire process, including impurity generation, penetration, transport, and incorporation, has been characterized during crystal growth using both traditional uncoated crucible covers and those coated with W, Mo, and SiN layers, respectively. The protective effect of the coating layer is primarily attributed to two mechanisms. A noticeable isolation effect of the coating materials in the impurity generation process has been found, inhibiting the reaction between SiO gas and the graphite components along the crucible cover surface at high temperatures. Moreover, a detaining effect of impurity transport during the transport process occurs, where the C atoms are detained in the natural convection-dominated region of the Si melt, depending strongly on the melt temperature gradient. Therefore, fewer C atoms can be incorporated into the grown Si ingot. Through comparative investigation, Mo is an optimal coating material for crucible covers due to its lower emissivity, resulting in a 18.4% decrease in SiC content in the Si ingot compared to that of the traditional uncoated crucible cover. Thus, coating a Mo layer on the crucible cover surface is an effective solution for fabricating the bulk mc-Si ingot for semiconductor etching applications.
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