具有大相对孔径的凸双曲面反射镜无效测试的距离偏差灵敏度

Shijie Li , Jiani Liu , Bingcai Liu , Ailing Tian , Sibo Niu , Lumin Zhao , Haitao Liu , Chunyan Shi , Jin Zhang , Haifeng Liang , Changlong Cai
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引用次数: 0

摘要

在对具有较大相对孔径的凸面双曲面反射镜进行形状测量时,对准偏差会由于其灵敏度而严重影响无效测试结果的准确性,导致结果不准确。本文介绍了自动对准和补偿方法。随后,利用上述方法对直径为 15 毫米的大相对孔径凸双曲面反射镜进行了形状检测实验。此外,针对两次检测结果不一致的问题,还进行了详细的模拟分析。结果表明,Hindle 球方法对距离偏差非常敏感。此外,光路中的距离会产生互补效应,很容易掩盖被测零件的真实表面形状。计算机生成全息图(CGH)方法可以根据对准的 CGH 零件提供的对准判断准确确定真实的表面形状偏差。这些研究为更准确地获取被测双曲面镜的真实表面形状误差提供了科学指导,具有重要的工程应用价值。
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Distance deviation sensitivity on null test of convex hyperboloid mirrors with large relative aperture
In the shape measurement of convex hyperboloid mirrors with large relative apertures, alignment deviations can significantly affect the accuracy of null test results owing to their sensitivity, resulting in inaccurate results. This paper introduces autocollimation and compensation methods. Subsequently, a shape detection experiment of a large relative aperture convex hyperboloid mirror with a diameter of 15 mm was conducted using the aforementioned methods. Further, a detailed simulation analysis was performed to address the inconsistencies between the two test results. The results suggested that the Hindle sphere method was highly sensitive to distance deviation. Furthermore, the distances in the optical path exerted a complementary effect, which easily obscured the true surface shape of the measured part. The computer-generated hologram (CGH) method could accurately determine the true surface shape deviation based on the alignment judgment provided by the aligned CGH part. These studies provide scientific guidance for more accurately obtaining the true surface shape error of the hyperboloid mirror under test, and have significant engineering application value.
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来源期刊
CiteScore
7.40
自引率
5.60%
发文量
177
审稿时长
46 days
期刊介绍: Precision Engineering - Journal of the International Societies for Precision Engineering and Nanotechnology is devoted to the multidisciplinary study and practice of high accuracy engineering, metrology, and manufacturing. The journal takes an integrated approach to all subjects related to research, design, manufacture, performance validation, and application of high precision machines, instruments, and components, including fundamental and applied research and development in manufacturing processes, fabrication technology, and advanced measurement science. The scope includes precision-engineered systems and supporting metrology over the full range of length scales, from atom-based nanotechnology and advanced lithographic technology to large-scale systems, including optical and radio telescopes and macrometrology.
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