高梯度介质绝缘体 - 多层绝缘结构的进展

IF 3.8 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Vacuum Pub Date : 2024-11-22 DOI:10.1016/j.vacuum.2024.113858
Anat Karlin , Michal Sakajio , Meirav Mann-Lahav , Gennady E. Shter , Shai Zamir , Gideon S. Grader
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引用次数: 0

摘要

由陶瓷和金属交替层结构组成的高梯度绝缘体(HGI)已被证明可以减少高压设备中的表面击穿现象。最近,HGI 的金属层被高介电常数陶瓷取代,从而产生了介电高梯度绝缘体 (DHGI),其性能超过了纯氧化铝类似物。与普通氧化铝相比,通过火花等离子烧结(SPS)制造的双层 DHGI 原型在调节过程中显示出更高的表面击穿场和更少的表面击穿。然而,在 2 层结构中观察到了极性相反的微弱击穿。本研究主要通过引入 3 层设计来克服这一问题,即在普通氧化铝层上覆盖两层高介电层。击穿测试证实消除了弱击穿现象,提高了介电强度,这与模拟预测一致。此外,SPS 后的空气退火对于去除吸附气体和恢复在 SPS 期间发生变化的高介电层成分至关重要。退火后的 DHGI 在高压调节过程中可显著降低击穿脉冲。三层 DHGI 的击穿场强比普通氧化铝高出 33.5%,比之前报告的两层 DHGI 高出 13.5%。
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Dielectric high gradient insulator – Progress towards multilayer insulating structures
High gradient insulators (HGI) consisting of ceramic and metallic alternating layer structure, have been shown to reduce surface breakdown occurrence in high voltage devices. Recently, the HGI's metal layers were replaced with high dielectric constant ceramics, creating dielectric high gradient insulators (DHGI) that were shown to outperform pure alumina analog. A 2-layer DHGI prototype manufactured by spark plasma sintering (SPS) demonstrated an increased surface breakdown field and fewer surface breakdowns during conditioning, compared to plain alumina. However, weak breakdowns at the opposite polarity were observed in the 2-layer structure. This study focuses on overcoming this issue by introducing a 3-layer design, with two high dielectric layers capping a plain alumina layer. Breakdown tests confirmed the elimination of weak breakdowns and improved dielectric strength, consistent with simulations predictions. Additionally, post-SPS air annealing was shown to be essential for removing adsorbed gases and recovering the high dielectric layers composition that changed during SPS. The annealed DHGIs were shown to reduce significantly the breakdown pulses during high-voltage conditioning. The 3-layer DHGI exhibited a 33.5 % higher breakdown field than plain alumina and a 13.5 % improvement over the 2-layer DHGI reported earlier.
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来源期刊
Vacuum
Vacuum 工程技术-材料科学:综合
CiteScore
6.80
自引率
17.50%
发文量
0
审稿时长
34 days
期刊介绍: Vacuum is an international rapid publications journal with a focus on short communication. All papers are peer-reviewed, with the review process for short communication geared towards very fast turnaround times. The journal also published full research papers, thematic issues and selected papers from leading conferences. A report in Vacuum should represent a major advance in an area that involves a controlled environment at pressures of one atmosphere or below. The scope of the journal includes: 1. Vacuum; original developments in vacuum pumping and instrumentation, vacuum measurement, vacuum gas dynamics, gas-surface interactions, surface treatment for UHV applications and low outgassing, vacuum melting, sintering, and vacuum metrology. Technology and solutions for large-scale facilities (e.g., particle accelerators and fusion devices). New instrumentation ( e.g., detectors and electron microscopes). 2. Plasma science; advances in PVD, CVD, plasma-assisted CVD, ion sources, deposition processes and analysis. 3. Surface science; surface engineering, surface chemistry, surface analysis, crystal growth, ion-surface interactions and etching, nanometer-scale processing, surface modification. 4. Materials science; novel functional or structural materials. Metals, ceramics, and polymers. Experiments, simulations, and modelling for understanding structure-property relationships. Thin films and coatings. Nanostructures and ion implantation.
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