Hao Liu, Jifei Ye, Wei Rao, Haichao Cui, Sibo Wang
{"title":"利用组合脉冲激光器增强硅烧蚀的实验研究。","authors":"Hao Liu, Jifei Ye, Wei Rao, Haichao Cui, Sibo Wang","doi":"10.1364/OL.541964","DOIUrl":null,"url":null,"abstract":"<p><p>The combined pulse laser (CPL) based on long-pulsed lasers has been proven to be an effective way of improving laser processing efficiency by combining their processing advantages. In this Letter, a CPL with a 500 mJ millisecond pulse and a 150 mJ nanosecond pulse is utilized to study the interaction process between laser and silicon. Based on high-speed images of plasma distribution and laser supported detonation wave (LSDW), as well as the height characteristics of ablation morphology, the energy coupling of plasma with variable delay time is analyzed. The irradiation of the material by millisecond pulse within the delay time enhances the strong coupling process between nanosecond pulse and the target.</p>","PeriodicalId":19540,"journal":{"name":"Optics letters","volume":"49 24","pages":"7158-7161"},"PeriodicalIF":3.1000,"publicationDate":"2024-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Experimental investigation on enhanced ablation of silicon with the combined pulse laser.\",\"authors\":\"Hao Liu, Jifei Ye, Wei Rao, Haichao Cui, Sibo Wang\",\"doi\":\"10.1364/OL.541964\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p><p>The combined pulse laser (CPL) based on long-pulsed lasers has been proven to be an effective way of improving laser processing efficiency by combining their processing advantages. In this Letter, a CPL with a 500 mJ millisecond pulse and a 150 mJ nanosecond pulse is utilized to study the interaction process between laser and silicon. Based on high-speed images of plasma distribution and laser supported detonation wave (LSDW), as well as the height characteristics of ablation morphology, the energy coupling of plasma with variable delay time is analyzed. The irradiation of the material by millisecond pulse within the delay time enhances the strong coupling process between nanosecond pulse and the target.</p>\",\"PeriodicalId\":19540,\"journal\":{\"name\":\"Optics letters\",\"volume\":\"49 24\",\"pages\":\"7158-7161\"},\"PeriodicalIF\":3.1000,\"publicationDate\":\"2024-12-15\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optics letters\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://doi.org/10.1364/OL.541964\",\"RegionNum\":2,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"OPTICS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optics letters","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.1364/OL.541964","RegionNum":2,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"OPTICS","Score":null,"Total":0}
Experimental investigation on enhanced ablation of silicon with the combined pulse laser.
The combined pulse laser (CPL) based on long-pulsed lasers has been proven to be an effective way of improving laser processing efficiency by combining their processing advantages. In this Letter, a CPL with a 500 mJ millisecond pulse and a 150 mJ nanosecond pulse is utilized to study the interaction process between laser and silicon. Based on high-speed images of plasma distribution and laser supported detonation wave (LSDW), as well as the height characteristics of ablation morphology, the energy coupling of plasma with variable delay time is analyzed. The irradiation of the material by millisecond pulse within the delay time enhances the strong coupling process between nanosecond pulse and the target.
期刊介绍：
The Optical Society (OSA) publishes high-quality, peer-reviewed articles in its portfolio of journals, which serve the full breadth of the optics and photonics community.
Optics Letters offers rapid dissemination of new results in all areas of optics with short, original, peer-reviewed communications. Optics Letters covers the latest research in optical science, including optical measurements, optical components and devices, atmospheric optics, biomedical optics, Fourier optics, integrated optics, optical processing, optoelectronics, lasers, nonlinear optics, optical storage and holography, optical coherence, polarization, quantum electronics, ultrafast optical phenomena, photonic crystals, and fiber optics. Criteria used in determining acceptability of contributions include newsworthiness to a substantial part of the optics community and the effect of rapid publication on the research of others. This journal, published twice each month, is where readers look for the latest discoveries in optics.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
