频率锁定型无线多功能表面声波传感器

Luyu Bo, Jiali Li, Zhide Wang, Chongpeng Qiu, Bowen Cai, Yingshan Du, Teng Li, Hongye Liu, Zhenhua Tian
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摘要

表面声波(saw)在结构健康监测(SHM)和芯片实验室(LOC)应用传感器方面显示出巨大的潜力。现有的声表面波传感器主要依赖于测量高频(如>;0.1 GHz)共振峰的频移。本研究提出了一种锁频无线多功能SAW传感器,可实现多种无线传感功能,包括应变传感、温度测量、水存在检测和振动传感。这些传感器利用压电芯片上的SAW谐振器,基于电感耦合的无线电力传输,特别是在低频(例如0.1 GHz)下工作的频率锁定无线传感机制。该机制将输入频率锁定在传感器反射频谱的斜率上,监测由于传感参数变化引起的反射信号幅度变化。概念验证实验表明,这些无线传感器可以在低功耗有源模式下工作,用于按需无线应变测量、温度传感和水存在检测。此外,这些传感器可以在无电源被动模式下工作,用于振动传感,其结果与激光测振仪的测量结果一致。预计锁频无线声表面波传感器的设计和机制将激励研究人员开发用于SHM和LOC应用的未来无线多功能传感器。
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Frequency-Locked Wireless Multifunctional Surface Acoustic Wave Sensors

Surface acoustic waves (SAWs) have shown great potential for developing sensors for structural health monitoring (SHM) and lab-on-a-chip (LOC) applications. Existing SAW sensors mainly rely on measuring the frequency shifts of high-frequency (e.g., >0.1 GHz) resonance peaks. This study presents frequency-locked wireless multifunctional SAW sensors that enable multiple wireless sensing functions, including strain sensing, temperature measurement, water presence detection, and vibration sensing. These sensors leverage SAW resonators on piezoelectric chips, inductive coupling-based wireless power transmission, and, particularly, a frequency-locked wireless sensing mechanism that works at low frequencies (e.g., <0.1 GHz). This mechanism locks the input frequency on the slope of a sensor's reflection spectrum and monitors the reflection signal's amplitude change induced by the changes of sensing parameters. The proof-of-concept experiments show that these wireless sensors can operate in a low-power active mode for on-demand wireless strain measurement, temperature sensing, and water presence detection. Moreover, these sensors can operate in a power-free passive mode for vibration sensing, with results that agree well with laser vibrometer measurements. It is anticipated that the designs and mechanisms of the frequency-locked wireless SAW sensors will inspire researchers to develop future wireless multifunctional sensors for SHM and LOC applications.

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