基于瞬态电流法的氮化镓高电子迁移率晶体管陷阱定位与应力退化分析

IF 2.5 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC IEEE Transactions on Device and Materials Reliability Pub Date : 2024-11-11 DOI:10.1109/TDMR.2024.3495987
Qian Wen;Lixing Zhou;Xianwei Meng;Shiwei Feng;Yamin Zhang
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引用次数: 0

摘要

本文基于瞬态电流研究了不同偏置条件下AlGaN/GaN高电子迁移率晶体管(hemt)的载流子捕获行为和电学特性。通过考虑hemt在不同温度下的瞬态漏极电流,确定了三种捕获机制:(1)电荷捕获在二维电子气(2DEG)通道附近的AlGaN势垒层的栅极-漏极区;(2)电荷捕获在GaN层,在栅极附近的栅极-漏极区;(3)在栅极附近的栅极-漏极区,AlGaN层表面的电荷捕获。分析了源极电压和漏极电压对陷阱行为的影响,进一步阐明了陷阱的位置。实验结果表明,电荷捕获主要受漏极电压的影响。高电场应力影响器件内部局部结构秩序,从而影响电荷逃逸率。阈值电压位移主要受栅极附近AlGaN层表面陷阱的影响。
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Trap Location and Stress Degradation Analysis of GaN High Electron Mobility Transistors Based on the Transient Current Method
In this paper, the carrier trapping behavior and electrical characteristics of AlGaN/GaN high electron mobility transistors (HEMTs) under different bias conditions are studied based on the transient current. By considering the transient drain current of HEMTs at different temperatures, three trapping mechanisms are identified: (1) charge trapping in the AlGaN barrier layer, in the gate-drain region near the two-dimensional electron gas (2DEG) channel; (2) charge trapping in the GaN layer, in the gate-drain region near the gate; and (3) charge trapping on the surface of the AlGaN layer, in the gate-drain region near the gate. The influences of the source-gate and drain-gate voltages on trapping behavior are analyzed to further elucidate the trap locations. The experimental results show that charge capture is mainly affected by the drain-gate voltage. High electric field stress affects the local structure order inside the device, thus affecting the charge escape rate. The threshold voltage shift is mainly affected by the surface trap of the AlGaN layer near the gate.
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来源期刊
IEEE Transactions on Device and Materials Reliability
IEEE Transactions on Device and Materials Reliability 工程技术-工程:电子与电气
CiteScore
4.80
自引率
5.00%
发文量
71
审稿时长
6-12 weeks
期刊介绍: The scope of the publication includes, but is not limited to Reliability of: Devices, Materials, Processes, Interfaces, Integrated Microsystems (including MEMS & Sensors), Transistors, Technology (CMOS, BiCMOS, etc.), Integrated Circuits (IC, SSI, MSI, LSI, ULSI, ELSI, etc.), Thin Film Transistor Applications. The measurement and understanding of the reliability of such entities at each phase, from the concept stage through research and development and into manufacturing scale-up, provides the overall database on the reliability of the devices, materials, processes, package and other necessities for the successful introduction of a product to market. This reliability database is the foundation for a quality product, which meets customer expectation. A product so developed has high reliability. High quality will be achieved because product weaknesses will have been found (root cause analysis) and designed out of the final product. This process of ever increasing reliability and quality will result in a superior product. In the end, reliability and quality are not one thing; but in a sense everything, which can be or has to be done to guarantee that the product successfully performs in the field under customer conditions. Our goal is to capture these advances. An additional objective is to focus cross fertilized communication in the state of the art of reliability of electronic materials and devices and provide fundamental understanding of basic phenomena that affect reliability. In addition, the publication is a forum for interdisciplinary studies on reliability. An overall goal is to provide leading edge/state of the art information, which is critically relevant to the creation of reliable products.
期刊最新文献
2024 Index IEEE Transactions on Device and Materials Reliability Vol. 24 Table of Contents Blank Page IEEE Transactions on Device and Materials Reliability Information for Authors TechRxiv: Share Your Preprint Research with the World!
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