{"title":"Pt衬底外延ga2o3的高速高响应准垂直肖特基光电探测器","authors":"Huanyu Zhang;Chunhong Zeng;Tiwei Chen;Li Zhang;Gaofu Guo;Zhucheng Li;Yu Hu;Zhili Zou;Xiaodong Zhang;Wenhua Shi;Zhongming Zeng;Baoshun Zhang","doi":"10.1109/LED.2024.3496557","DOIUrl":null,"url":null,"abstract":"A quasi-vertical Schottky diodes with high speed and high responsivity were demonstrated by epitaxially growing Ga 2O 3on Pt. The research further investigated the impact of incorporating metal stripes in the photosensitive region to enhance both the responsivity and response speed of the device. Characterization of the photoresponses reveals that these devices exhibit high sensitivity to solar-blind ultraviolet light, peaking at approximately 260 nm. At the bias of −5V, the detector achieves a responsivity of 2998 A/W, an exceptional specific detectivity of \n<inline-formula> <tex-math>$1.68\\times 10^{{7}}$ </tex-math></inline-formula>\n Jones and a high response speed about 0.1 ms. By applying these metrics demonstrate substantial improvements over existing technologies and suggest a promising avenue for developing high speed and high responsivity photodetectors.","PeriodicalId":13198,"journal":{"name":"IEEE Electron Device Letters","volume":"46 1","pages":"60-63"},"PeriodicalIF":4.1000,"publicationDate":"2024-11-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"High-Speed and High-Responsivity Quasi- Vertical Schottky Photodetectors of Epitaxial Ga 2O 3on Pt Substrate\",\"authors\":\"Huanyu Zhang;Chunhong Zeng;Tiwei Chen;Li Zhang;Gaofu Guo;Zhucheng Li;Yu Hu;Zhili Zou;Xiaodong Zhang;Wenhua Shi;Zhongming Zeng;Baoshun Zhang\",\"doi\":\"10.1109/LED.2024.3496557\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A quasi-vertical Schottky diodes with high speed and high responsivity were demonstrated by epitaxially growing Ga 2O 3on Pt. The research further investigated the impact of incorporating metal stripes in the photosensitive region to enhance both the responsivity and response speed of the device. Characterization of the photoresponses reveals that these devices exhibit high sensitivity to solar-blind ultraviolet light, peaking at approximately 260 nm. At the bias of −5V, the detector achieves a responsivity of 2998 A/W, an exceptional specific detectivity of \\n<inline-formula> <tex-math>$1.68\\\\times 10^{{7}}$ </tex-math></inline-formula>\\n Jones and a high response speed about 0.1 ms. By applying these metrics demonstrate substantial improvements over existing technologies and suggest a promising avenue for developing high speed and high responsivity photodetectors.\",\"PeriodicalId\":13198,\"journal\":{\"name\":\"IEEE Electron Device Letters\",\"volume\":\"46 1\",\"pages\":\"60-63\"},\"PeriodicalIF\":4.1000,\"publicationDate\":\"2024-11-12\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE Electron Device Letters\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://ieeexplore.ieee.org/document/10750873/\",\"RegionNum\":2,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Electron Device Letters","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/10750873/","RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
摘要
通过在铂上外延生长ga2o3,得到了具有高速和高响应率的准垂直肖特基二极管。研究进一步探讨了在光敏区加入金属条纹对提高器件的响应率和响应速度的影响。光响应特性表明,这些器件对太阳盲紫外光具有高灵敏度,峰值约为260 nm。在- 5V的偏置下,探测器的响应率为2998 a /W,比检出率为1.68\ × 10^{{7}}$ Jones,响应速度约为0.1 ms。通过应用这些指标,证明了对现有技术的实质性改进,并为开发高速高响应光电探测器提供了一条有前途的途径。
High-Speed and High-Responsivity Quasi- Vertical Schottky Photodetectors of Epitaxial Ga 2O 3on Pt Substrate
A quasi-vertical Schottky diodes with high speed and high responsivity were demonstrated by epitaxially growing Ga 2O 3on Pt. The research further investigated the impact of incorporating metal stripes in the photosensitive region to enhance both the responsivity and response speed of the device. Characterization of the photoresponses reveals that these devices exhibit high sensitivity to solar-blind ultraviolet light, peaking at approximately 260 nm. At the bias of −5V, the detector achieves a responsivity of 2998 A/W, an exceptional specific detectivity of
$1.68\times 10^{{7}}$
Jones and a high response speed about 0.1 ms. By applying these metrics demonstrate substantial improvements over existing technologies and suggest a promising avenue for developing high speed and high responsivity photodetectors.
期刊介绍:
IEEE Electron Device Letters publishes original and significant contributions relating to the theory, modeling, design, performance and reliability of electron and ion integrated circuit devices and interconnects, involving insulators, metals, organic materials, micro-plasmas, semiconductors, quantum-effect structures, vacuum devices, and emerging materials with applications in bioelectronics, biomedical electronics, computation, communications, displays, microelectromechanics, imaging, micro-actuators, nanoelectronics, optoelectronics, photovoltaics, power ICs and micro-sensors.