单壁碳纳米管掺杂对溶液法制备氧化铟薄膜晶体管的影响

IF 2.9 2区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC IEEE Transactions on Electron Devices Pub Date : 2024-11-27 DOI:10.1109/TED.2024.3499941
Han-Lin Zhao;Sung-Jin Kim
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引用次数: 0

摘要

单壁碳纳米管(SW-CNT)薄膜晶体管(TFTs)中经常观察到的p型电导率通常归因于SW-CNT暴露于空气中时由于氧吸附的掺杂效应而导致的品质系数差异,从而导致不对称的电子和空穴注入。我们将SW-CNTs掺杂到氧化铟(In2O3/SW-CNT)通道层中,制备半导体器件,并对器件性能和薄膜性能进行了对比测试。结果表明,在正偏压下,In2O3和In2O3/SW-CNT器件均表现出n型行为,具有显著的饱和行为和栅极控制。In2O3/SW-CNT tft具有较高的饱和迁移率($\mu _{\text {sat}}$)和通断电流比(${I}_{\text {ON}}/{I}_{\text {OFF}}$)。特别是,$\mu _{\text {sat}}$增加了3倍,${I}_{\text {ON}}/{I}_{\text {OFF}}$增加到$\sim 10^{{6}}$。此外,在负偏置应力(NBS)下,通过逆变器的电阻负载,它表现出更好的稳定性和信号反转能力。这些结果表明,溶液法制备的In2O3/SW-CNT tft可用于低成本、低温、高性能的电子器件。
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Effect of Single-Wall Carbon Nanotube Doping on Solution-Processed Indium Oxide Thin-Film Transistors
The p-type conductivity often observed in single-wall carbon nanotube (SW-CNT) thin-film transistors (TFTs) is usually attributed to the doping effect of oxygen adsorption when SW-CNT are exposed to air caused by differences in the figure of merit, which results in asymmetric electron and hole injection. We performed comparative tests by doping SW-CNTs into the Indium oxide (In2O3/SW-CNT) channel layer, fabricated semiconductor devices, and investigated the device performance and film properties. It was determined that both In2O3 and In2O3/SW-CNT devices exhibit n-type behavior with significant saturation behavior and gate control under positive bias. The In2O3/SW-CNT TFTs have higher saturation mobility ( $\mu _{\text {sat}}$ ) and on/off current ratio ( ${I}_{\text {ON}}/{I}_{\text {OFF}}$ ). In particular, the $\mu _{\text {sat}}$ is increased by ~3 times, and the ${I}_{\text {ON}}/{I}_{\text {OFF}}$ is increased to $\sim 10^{{6}}$ . Also, under negative bias stress (NBS), it exhibits better stability and signal inversion capability by resistive loading of the inverter. These results indicate that solution-prepared In2O3/SW-CNT TFTs can be used in low-cost, low-temperature, high-performance electronic devices.
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来源期刊
IEEE Transactions on Electron Devices
IEEE Transactions on Electron Devices 工程技术-工程:电子与电气
CiteScore
5.80
自引率
16.10%
发文量
937
审稿时长
3.8 months
期刊介绍: IEEE Transactions on Electron Devices publishes original and significant contributions relating to the theory, modeling, design, performance and reliability of electron and ion integrated circuit devices and interconnects, involving insulators, metals, organic materials, micro-plasmas, semiconductors, quantum-effect structures, vacuum devices, and emerging materials with applications in bioelectronics, biomedical electronics, computation, communications, displays, microelectromechanics, imaging, micro-actuators, nanoelectronics, optoelectronics, photovoltaics, power ICs and micro-sensors. Tutorial and review papers on these subjects are also published and occasional special issues appear to present a collection of papers which treat particular areas in more depth and breadth.
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