InGaAsSb扩展短波长的红外探测器的台地侧壁上的孔洞积累

IF 3.4 3区 物理与天体物理 Q2 INSTRUMENTS & INSTRUMENTATION Infrared Physics & Technology Pub Date : 2025-03-01 Epub Date: 2024-12-26 DOI:10.1016/j.infrared.2024.105695
Nong Li , Dongwei Jiang , Guowei Wang , Donghai Wu , Wenguang Zhou , Xiangyu Zhang , Faran Chang , Ruoyu Xie , Ye Zhang , Yifan Shan , Yan Liang , Lingze Yao , Qiuyao Pang , Chen Li , Hongyue Hao , Yingqiang Xu , Zhichuan Niu
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引用次数: 0

摘要

本工作通过检查台面侧壁的表面状态和钝化层的寿命来研究InGaAsSb e-SWIR探测器中的泄漏机制。以未钝化的光电探测器为参照,评价了SU8、SiO2和S-SiO2薄膜的钝化效果。钝化InGaAsSb台面侧壁的S-SiO2复合膜的表面电阻率最高。为了研究导致这种高表面电阻率的因素,我们采用了门控光电探测器。我们的研究结果表明,硫化物在InGaAsSb表面中和悬空键并不是主要因素。相反,通过检查这些钝化膜的寿命,我们确定S-SiO2膜的高电阻率与其密封性有关。此外,GCPD结果表明在InGaAsSb表面有孔洞的积累。这些发现表明,pBp结构可能在降低InGaAsSb e-SWIR光电探测器的泄漏电流方面具有优势。
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Accumulation of holes at the mesa sidewall surface of InGaAsSb extended-short wavelength infrared photodetectors
This work investigates leakage mechanisms in InGaAsSb e-SWIR detectors by examining the surface states of the mesa sidewall and the longevity of passivation layers. The passivation efficacy of SU8, SiO2 and S-SiO2 films is evaluated, using an un-passivated photodetector as a reference. The S-SiO2 composite film passivated InGaAsSb mesa sidewall exhibits the highest surface resistivity. To investigate the factors contributing to this high surface resistivity, we employed gate-controlled photodetectors. Our findings indicate that the neutralization of dangling bonds at the InGaAsSb surface by sulfide is not the main factor. Instead, by examining the longevity of these passivation films, we determined that the high resistivity of the S-SiO2 film is related to its airtightness. Additionally, the GCPD results indicate an accumulation of holes at the InGaAsSb surface. These findings suggest that a pBp structure may provide advantages in reducing the leakage current of InGaAsSb e-SWIR photodetectors.
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来源期刊
CiteScore
5.70
自引率
12.10%
发文量
400
审稿时长
67 days
期刊介绍: The Journal covers the entire field of infrared physics and technology: theory, experiment, application, devices and instrumentation. Infrared'' is defined as covering the near, mid and far infrared (terahertz) regions from 0.75um (750nm) to 1mm (300GHz.) Submissions in the 300GHz to 100GHz region may be accepted at the editors discretion if their content is relevant to shorter wavelengths. Submissions must be primarily concerned with and directly relevant to this spectral region. Its core topics can be summarized as the generation, propagation and detection, of infrared radiation; the associated optics, materials and devices; and its use in all fields of science, industry, engineering and medicine. Infrared techniques occur in many different fields, notably spectroscopy and interferometry; material characterization and processing; atmospheric physics, astronomy and space research. Scientific aspects include lasers, quantum optics, quantum electronics, image processing and semiconductor physics. Some important applications are medical diagnostics and treatment, industrial inspection and environmental monitoring.
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