{"title":"提高氧化钇薄膜中击穿场强超过实验标度规律的策略。","authors":"Tomohiko Nakajima, Yuuki Kitanaka, Iwao Yamaguchi, Kazuhiro Kumagai, Junichi Nomoto, Masayuki Fukuda and Ryohei Hokari","doi":"10.1039/D4MH01524J","DOIUrl":null,"url":null,"abstract":"<p >Aiming to increase the dielectric breakdown field strength (<em>E</em><small><sub>bf</sub></small>) of yttria films for application in semiconductor manufacturing, a synthetic strategy based on photo-assisted chemical solution deposition was developed to prepare yttria films with aggregates of very small nanocrystallites. Despite containing many elliptical pores, the films exhibited an <em>E</em><small><sub>bf</sub></small> exceeding 12.7 MV cm<small><sup>−1</sup></small>, much higher than that predicted according to conventional experimental scaling laws. The combination of nanocrystallite agglomerates and elliptical pores, generally seen as defects, provides a new strategy for increasing the <em>E</em><small><sub>bf</sub></small>.</p>","PeriodicalId":87,"journal":{"name":"Materials Horizons","volume":" 9","pages":" 2989-2998"},"PeriodicalIF":11.4000,"publicationDate":"2025-01-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A strategy for increasing the breakdown field strength beyond the experimental scaling law in yttria films†\",\"authors\":\"Tomohiko Nakajima, Yuuki Kitanaka, Iwao Yamaguchi, Kazuhiro Kumagai, Junichi Nomoto, Masayuki Fukuda and Ryohei Hokari\",\"doi\":\"10.1039/D4MH01524J\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p >Aiming to increase the dielectric breakdown field strength (<em>E</em><small><sub>bf</sub></small>) of yttria films for application in semiconductor manufacturing, a synthetic strategy based on photo-assisted chemical solution deposition was developed to prepare yttria films with aggregates of very small nanocrystallites. Despite containing many elliptical pores, the films exhibited an <em>E</em><small><sub>bf</sub></small> exceeding 12.7 MV cm<small><sup>−1</sup></small>, much higher than that predicted according to conventional experimental scaling laws. The combination of nanocrystallite agglomerates and elliptical pores, generally seen as defects, provides a new strategy for increasing the <em>E</em><small><sub>bf</sub></small>.</p>\",\"PeriodicalId\":87,\"journal\":{\"name\":\"Materials Horizons\",\"volume\":\" 9\",\"pages\":\" 2989-2998\"},\"PeriodicalIF\":11.4000,\"publicationDate\":\"2025-01-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Materials Horizons\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://pubs.rsc.org/en/content/articlelanding/2025/mh/d4mh01524j\",\"RegionNum\":2,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"CHEMISTRY, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Materials Horizons","FirstCategoryId":"88","ListUrlMain":"https://pubs.rsc.org/en/content/articlelanding/2025/mh/d4mh01524j","RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"CHEMISTRY, MULTIDISCIPLINARY","Score":null,"Total":0}
A strategy for increasing the breakdown field strength beyond the experimental scaling law in yttria films†
Aiming to increase the dielectric breakdown field strength (Ebf) of yttria films for application in semiconductor manufacturing, a synthetic strategy based on photo-assisted chemical solution deposition was developed to prepare yttria films with aggregates of very small nanocrystallites. Despite containing many elliptical pores, the films exhibited an Ebf exceeding 12.7 MV cm−1, much higher than that predicted according to conventional experimental scaling laws. The combination of nanocrystallite agglomerates and elliptical pores, generally seen as defects, provides a new strategy for increasing the Ebf.
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