有机材料在集成电路先进封装中的应用综述

Liu Jikang
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引用次数: 0

摘要

随着先进技术的发展,半导体封装的重要性进一步凸显。为了满足半导体器件日益增长的复杂性和性能要求,许多集成电路(IC)先进封装技术得到了发展,包括倒装芯片(FC)、碰撞、扇入晶圆级封装(FIWLP)、扇出晶圆级封装(FOWLP)、2.5D封装(interposer)、CMOS图像传感器通硅孔(CIS-TSV)、扇出面板级封装(FOPLP)等。在这些集成电路先进封装技术的制造过程中,应用了许多有机材料,包括光刻胶(PR)、光敏聚酰亚胺(PSPI)、下填料、环氧成型化合物(EMC)、临时粘结剂、高温粘结剂、干膜和油墨。本文介绍了有机材料PR、PSPI、底填料、EMC、临时粘结剂、高温粘结剂、干膜、油墨等在IC高级封装中的应用。
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The application of organic materials used in IC advanced packaging:A review
With the development of advanced technologies, the importance of semiconductor packaging has been further highlighted. To meet the increasing complexity and performance requirements of semiconductor devices, many integrated circuit (IC) advanced packaging technologies have been developed, which including flip chip (FC), bumping, fan-in wafer level packaging (FIWLP), fan-out wafer level packaging (FOWLP), 2.5D packaging (interposer), CMOS image sensor through silicon via (CIS-TSV), fan-out panel level packaging (FOPLP) and so on. During the manufacturing process of those IC advanced packaging technologies, many organic materials including photoresist (PR), photosensitive polyimide (PSPI), underfill, epoxy molding compound (EMC), temporary bonding adhesive, high temperature bonding adhesive, dry film and printing ink have been applied. In this paper, we described the application of organic materials including PR, PSPI, underfill, EMC, temporary bonding adhesive, high temperature bonding adhesive, dry film and printing ink used in the IC advanced packaging.
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