镁锡原子比对Mg2Sn薄膜热电性能的影响

IF 2 4区 材料科学 Q3 MATERIALS SCIENCE, COATINGS & FILMS Thin Solid Films Pub Date : 2025-01-01 Epub Date: 2024-12-09 DOI:10.1016/j.tsf.2024.140585
Ying Liu , Guihong Song , Kaiping Tai , Zhi Yu , Yijun Ran , Juan He , Yusheng Wu
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引用次数: 0

摘要

通过在SiO2/Si衬底上制备不同Mg和Sn原子比的Mg2Sn薄膜,深入研究了Mg/Sn比对Mg-Sn薄膜热电性能的影响。结果表明:随着[Mg]/[Sn]的增大,沉积Mg2Sn薄膜的相结构由亚稳正交相转变为正交相和立方相的混合相,再转变为高度对称的立方相;同时,随着[Mg]/[Sn]的增加,沉积膜的载流子浓度和电导率先降低后升高,载流子迁移率和塞贝克系数的变化趋势相反。[Mg]/[Sn] = 1.94的Mg2Sn相膜具有最高的塞贝克系数和合适的电导率,在235℃时达到最高的功率因数3.10 μW cm-1 K-2,在125℃时达到最高的品质因数0.059。
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Influence of atomic ratio of Mg to Sn on thermoelectric properties of Mg2Sn films
The influence of Mg/Sn ratio of on the thermoelectric properties of Mg-Sn films was deeply studied through preparing a series of Mg2Sn films with different Mg and Sn atomic ratios on SiO2/Si substrate. The results showed that the phase structure of the deposited Mg2Sn films varied from a metastable orthogonal phase to a mixture of orthogonal and cubic phase, and then to a highly symmetric cubic phase with increasing [Mg]/[Sn]. Meanwhile, with increasing [Mg]/[Sn], the carrier concentration and electrical conductivity of the deposited films first decreased and then increased, while the carrier mobility and Seebeck coefficient varied in an opposite trend. The cubic Mg2Sn phase film with [Mg]/[Sn] = 1.94 has the highest Seebeck coefficient and appropriate electrical conductivity, reaching the highest power factor of 3.10 μW cm-1 K-2 at 235 °C and figure of merit of 0.059 at 125 °C.
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来源期刊
Thin Solid Films
Thin Solid Films 工程技术-材料科学:膜
CiteScore
4.00
自引率
4.80%
发文量
381
审稿时长
7.5 months
期刊介绍: Thin Solid Films is an international journal which serves scientists and engineers working in the fields of thin-film synthesis, characterization, and applications. The field of thin films, which can be defined as the confluence of materials science, surface science, and applied physics, has become an identifiable unified discipline of scientific endeavor.
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