混合场和γ辐照环境下n-on-p器件表面态诱导电极间隔离的建模

IF 1.4 3区 物理与天体物理 Q3 INSTRUMENTS & INSTRUMENTATION Nuclear Instruments & Methods in Physics Research Section A-accelerators Spectrometers Detectors and Associated Equipment Pub Date : 2025-05-01 Epub Date: 2025-02-18 DOI:10.1016/j.nima.2025.170310
N. Akchurin, T. Peltola
{"title":"混合场和γ辐照环境下n-on-p器件表面态诱导电极间隔离的建模","authors":"N. Akchurin,&nbsp;T. Peltola","doi":"10.1016/j.nima.2025.170310","DOIUrl":null,"url":null,"abstract":"<div><div>Position sensitive <span><math><mi>n</mi></math></span>-on-<span><math><mi>p</mi></math></span> silicon sensors will be utilized in the tracker and in the High Granularity Calorimeter (HGCAL) of the Compact Muon Solenoid (CMS) experiment at High Luminosity Large Hadron Collider (HL-LHC). The detrimental effect of the radiation-induced accumulation of positive net oxide charge on position resolution in <span><math><mi>n</mi></math></span>-on-<span><math><mi>p</mi></math></span> sensors has typically been countered by the application of isolation implants like <span><math><mi>p</mi></math></span>-stop or <span><math><mi>p</mi></math></span>-spray between <span><math><msup><mrow><mi>n</mi></mrow><mrow><mo>+</mo></mrow></msup></math></span>-electrodes. In addition to the positively charged layer inside the oxide and close to the Si/SiO<sub>2</sub>-interface, surface damage introduced by ionizing radiation in SiO<sub>2</sub>-passivated silicon particle detectors includes the accumulation of trapped-oxide-charge and interface traps. A previous study of either n/<span><math><mi>γ</mi></math></span> (mixed field)- or <span><math><mi>γ</mi></math></span>-irradiated Metal-Oxide-Semiconductor (MOS) capacitors showed evidence of substantially higher introduction rates of acceptor- and donor-type deep interface traps (<span><math><msub><mrow><mi>N</mi></mrow><mrow><mtext>it,acc/don</mtext></mrow></msub></math></span>) in mixed-field environment. In this work, an inter-pad and -strip resistance (or resistivity (<span><math><msub><mrow><mi>ρ</mi></mrow><mrow><mtext>int</mtext></mrow></msub></math></span>)) simulation study of <span><math><mi>n</mi></math></span>-on-<span><math><mi>p</mi></math></span> sensors with and without <span><math><mi>p</mi></math></span>-stop isolation implants was conducted for both irradiation types. Higher levels of <span><math><msub><mrow><mi>ρ</mi></mrow><mrow><mtext>int</mtext></mrow></msub></math></span> showed correlation to higher densities of deep <span><math><msub><mrow><mi>N</mi></mrow><mrow><mtext>it,acc/don</mtext></mrow></msub></math></span>, with the inter-pad isolation performance of the mixed-field irradiated sensors becoming independent of the presence of <span><math><mi>p</mi></math></span>-stop implant between the <span><math><msup><mrow><mi>n</mi></mrow><mrow><mo>+</mo></mrow></msup></math></span>-electrodes up to about 100 kGy. The low introduction rates of deep <span><math><msub><mrow><mi>N</mi></mrow><mrow><mtext>it,acc/don</mtext></mrow></msub></math></span> in <span><math><mi>γ</mi></math></span>-irradiated sensors resulted in high sensitivity of <span><math><msub><mrow><mi>ρ</mi></mrow><mrow><mtext>int</mtext></mrow></msub></math></span> to the presence and peak doping of <span><math><mi>p</mi></math></span>-stop above the lowest dose of about 7 kGy in the study. As a consequence of the advantageous influence of radiation-induced accumulation of deep <span><math><msub><mrow><mi>N</mi></mrow><mrow><mtext>it</mtext></mrow></msub></math></span> on the inter-electrode isolation, position sensitive <span><math><mi>n</mi></math></span>-on-<span><math><mi>p</mi></math></span> sensors without isolation implants may be considered for future HEP-experiments where the radiation is largely due to hadrons.</div></div>","PeriodicalId":19359,"journal":{"name":"Nuclear Instruments & Methods in Physics Research Section A-accelerators Spectrometers Detectors and Associated Equipment","volume":"1074 ","pages":"Article 170310"},"PeriodicalIF":1.4000,"publicationDate":"2025-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Modeling of surface-state induced inter-electrode isolation of n-on-p devices in mixed-field and γ-irradiation environments\",\"authors\":\"N. Akchurin,&nbsp;T. Peltola\",\"doi\":\"10.1016/j.nima.2025.170310\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>Position sensitive <span><math><mi>n</mi></math></span>-on-<span><math><mi>p</mi></math></span> silicon sensors will be utilized in the tracker and in the High Granularity Calorimeter (HGCAL) of the Compact Muon Solenoid (CMS) experiment at High Luminosity Large Hadron Collider (HL-LHC). The detrimental effect of the radiation-induced accumulation of positive net oxide charge on position resolution in <span><math><mi>n</mi></math></span>-on-<span><math><mi>p</mi></math></span> sensors has typically been countered by the application of isolation implants like <span><math><mi>p</mi></math></span>-stop or <span><math><mi>p</mi></math></span>-spray between <span><math><msup><mrow><mi>n</mi></mrow><mrow><mo>+</mo></mrow></msup></math></span>-electrodes. In addition to the positively charged layer inside the oxide and close to the Si/SiO<sub>2</sub>-interface, surface damage introduced by ionizing radiation in SiO<sub>2</sub>-passivated silicon particle detectors includes the accumulation of trapped-oxide-charge and interface traps. A previous study of either n/<span><math><mi>γ</mi></math></span> (mixed field)- or <span><math><mi>γ</mi></math></span>-irradiated Metal-Oxide-Semiconductor (MOS) capacitors showed evidence of substantially higher introduction rates of acceptor- and donor-type deep interface traps (<span><math><msub><mrow><mi>N</mi></mrow><mrow><mtext>it,acc/don</mtext></mrow></msub></math></span>) in mixed-field environment. In this work, an inter-pad and -strip resistance (or resistivity (<span><math><msub><mrow><mi>ρ</mi></mrow><mrow><mtext>int</mtext></mrow></msub></math></span>)) simulation study of <span><math><mi>n</mi></math></span>-on-<span><math><mi>p</mi></math></span> sensors with and without <span><math><mi>p</mi></math></span>-stop isolation implants was conducted for both irradiation types. Higher levels of <span><math><msub><mrow><mi>ρ</mi></mrow><mrow><mtext>int</mtext></mrow></msub></math></span> showed correlation to higher densities of deep <span><math><msub><mrow><mi>N</mi></mrow><mrow><mtext>it,acc/don</mtext></mrow></msub></math></span>, with the inter-pad isolation performance of the mixed-field irradiated sensors becoming independent of the presence of <span><math><mi>p</mi></math></span>-stop implant between the <span><math><msup><mrow><mi>n</mi></mrow><mrow><mo>+</mo></mrow></msup></math></span>-electrodes up to about 100 kGy. The low introduction rates of deep <span><math><msub><mrow><mi>N</mi></mrow><mrow><mtext>it,acc/don</mtext></mrow></msub></math></span> in <span><math><mi>γ</mi></math></span>-irradiated sensors resulted in high sensitivity of <span><math><msub><mrow><mi>ρ</mi></mrow><mrow><mtext>int</mtext></mrow></msub></math></span> to the presence and peak doping of <span><math><mi>p</mi></math></span>-stop above the lowest dose of about 7 kGy in the study. As a consequence of the advantageous influence of radiation-induced accumulation of deep <span><math><msub><mrow><mi>N</mi></mrow><mrow><mtext>it</mtext></mrow></msub></math></span> on the inter-electrode isolation, position sensitive <span><math><mi>n</mi></math></span>-on-<span><math><mi>p</mi></math></span> sensors without isolation implants may be considered for future HEP-experiments where the radiation is largely due to hadrons.</div></div>\",\"PeriodicalId\":19359,\"journal\":{\"name\":\"Nuclear Instruments & Methods in Physics Research Section A-accelerators Spectrometers Detectors and Associated Equipment\",\"volume\":\"1074 \",\"pages\":\"Article 170310\"},\"PeriodicalIF\":1.4000,\"publicationDate\":\"2025-05-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Nuclear Instruments & Methods in Physics Research Section A-accelerators Spectrometers Detectors and Associated Equipment\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0168900225001111\",\"RegionNum\":3,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"2025/2/18 0:00:00\",\"PubModel\":\"Epub\",\"JCR\":\"Q3\",\"JCRName\":\"INSTRUMENTS & INSTRUMENTATION\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Nuclear Instruments & Methods in Physics Research Section A-accelerators Spectrometers Detectors and Associated Equipment","FirstCategoryId":"101","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0168900225001111","RegionNum":3,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"2025/2/18 0:00:00","PubModel":"Epub","JCR":"Q3","JCRName":"INSTRUMENTS & INSTRUMENTATION","Score":null,"Total":0}
引用次数: 0

摘要

位置敏感的n-on-p硅传感器将用于高亮度大型强子对撞机(HL-LHC)紧凑型介子螺线(CMS)实验的跟踪器和高粒度量热计(HGCAL)。在n-on-p传感器中,辐射引起的正净氧化电荷积累对位置分辨率的有害影响通常通过在n+电极之间应用隔离植入物(如p-stop或p-spray)来抵消。除了氧化物内部和靠近Si/ sio2界面的带正电层外,电离辐射在sio2钝化硅粒子探测器中引入的表面损伤还包括捕获氧化物电荷和界面陷阱的积累。先前对n/γ(混合场)或γ辐照金属氧化物半导体(MOS)电容器的研究表明,在混合场环境中,受体和供体型深界面陷阱(Nit,acc/don)的引入率要高得多。在这项工作中,对两种辐照类型的n-on-p传感器进行了衬垫间和条间电阻(或电阻率(ρint))模拟研究。较高的ρint水平与较高的深度Nit密度(acc/don)相关,且混合场辐照传感器的衬垫间隔离性能与n+电极之间p-stop植入物的存在无关,最高可达100 kGy左右。在γ辐照传感器中,由于深Nit、acc/don的引入率较低,使得ρint对p-stop的存在具有较高的灵敏度,且在最低剂量约7 kGy以上出现p-stop掺杂峰。由于辐射诱导的深Nit积累对电极间隔离的有利影响,无需隔离植入物的位置敏感n-on-p传感器可以考虑用于未来的hep实验,其中辐射主要是由强子引起的。
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Modeling of surface-state induced inter-electrode isolation of n-on-p devices in mixed-field and γ-irradiation environments
Position sensitive n-on-p silicon sensors will be utilized in the tracker and in the High Granularity Calorimeter (HGCAL) of the Compact Muon Solenoid (CMS) experiment at High Luminosity Large Hadron Collider (HL-LHC). The detrimental effect of the radiation-induced accumulation of positive net oxide charge on position resolution in n-on-p sensors has typically been countered by the application of isolation implants like p-stop or p-spray between n+-electrodes. In addition to the positively charged layer inside the oxide and close to the Si/SiO2-interface, surface damage introduced by ionizing radiation in SiO2-passivated silicon particle detectors includes the accumulation of trapped-oxide-charge and interface traps. A previous study of either n/γ (mixed field)- or γ-irradiated Metal-Oxide-Semiconductor (MOS) capacitors showed evidence of substantially higher introduction rates of acceptor- and donor-type deep interface traps (Nit,acc/don) in mixed-field environment. In this work, an inter-pad and -strip resistance (or resistivity (ρint)) simulation study of n-on-p sensors with and without p-stop isolation implants was conducted for both irradiation types. Higher levels of ρint showed correlation to higher densities of deep Nit,acc/don, with the inter-pad isolation performance of the mixed-field irradiated sensors becoming independent of the presence of p-stop implant between the n+-electrodes up to about 100 kGy. The low introduction rates of deep Nit,acc/don in γ-irradiated sensors resulted in high sensitivity of ρint to the presence and peak doping of p-stop above the lowest dose of about 7 kGy in the study. As a consequence of the advantageous influence of radiation-induced accumulation of deep Nit on the inter-electrode isolation, position sensitive n-on-p sensors without isolation implants may be considered for future HEP-experiments where the radiation is largely due to hadrons.
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来源期刊
CiteScore
3.20
自引率
21.40%
发文量
787
审稿时长
1 months
期刊介绍: Section A of Nuclear Instruments and Methods in Physics Research publishes papers on design, manufacturing and performance of scientific instruments with an emphasis on large scale facilities. This includes the development of particle accelerators, ion sources, beam transport systems and target arrangements as well as the use of secondary phenomena such as synchrotron radiation and free electron lasers. It also includes all types of instrumentation for the detection and spectrometry of radiations from high energy processes and nuclear decays, as well as instrumentation for experiments at nuclear reactors. Specialized electronics for nuclear and other types of spectrometry as well as computerization of measurements and control systems in this area also find their place in the A section. Theoretical as well as experimental papers are accepted.
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