{"title":"应变调制表面孔结构柔性压阻传感器的灵敏度提高","authors":"Ying Chen, Yujiao Qin, Muzi Fang, Peng Wang, Ruishan Xie, Haibin Liu","doi":"10.1016/j.sna.2025.116344","DOIUrl":null,"url":null,"abstract":"<div><div>Compliant sensors with enhanced sensitivity are of interest for a wide range of applications. However, it is still challenging to implement high-performance sensors at reduced fabrication costs. Herein, a new design of compliant sensors with enhanced sensitivity is investigated by jointly utilizing strain-dependent piezoresistive material properties and simple strain-modulated surface hole structures. The surface hole structure amplifies local piezoresistive responses at strain-concentrated regions, and enhances sensitivity globally. Multi-objective optimization is conducted to obtain maximal sensitivity at a minimal loss in mechanical strength due to the hole structure. Experimental validations are performed on sensors made of low-cost exfoliated graphite nanocomposites via a simple and scalable cut-and-spray technique. Results show that the single rectangular-hole structure maximizes sensitivity to ∼ 8.25 with a decrease in mechanical strength by 44 %, compared to sensors without surface structures. T-shape hole structures are shown to improve sensitivity (∼14.56) more effectively by a factor of 2.4 with a loss of mechanical strength by 21 %. The strain-modulated sensor also demonstrates long-term stability (∼ 500 cycles) in cyclic tests, and reliable performance in tracking the movement of a robotic finger. This work provides a promising way to achieve cost-competitive compliant sensors with enhanced sensitivity.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"386 ","pages":"Article 116344"},"PeriodicalIF":4.9000,"publicationDate":"2025-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Enhanced sensitivity of compliant piezoresistive sensors with strain-modulated surface hole structures\",\"authors\":\"Ying Chen, Yujiao Qin, Muzi Fang, Peng Wang, Ruishan Xie, Haibin Liu\",\"doi\":\"10.1016/j.sna.2025.116344\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>Compliant sensors with enhanced sensitivity are of interest for a wide range of applications. However, it is still challenging to implement high-performance sensors at reduced fabrication costs. Herein, a new design of compliant sensors with enhanced sensitivity is investigated by jointly utilizing strain-dependent piezoresistive material properties and simple strain-modulated surface hole structures. The surface hole structure amplifies local piezoresistive responses at strain-concentrated regions, and enhances sensitivity globally. Multi-objective optimization is conducted to obtain maximal sensitivity at a minimal loss in mechanical strength due to the hole structure. Experimental validations are performed on sensors made of low-cost exfoliated graphite nanocomposites via a simple and scalable cut-and-spray technique. Results show that the single rectangular-hole structure maximizes sensitivity to ∼ 8.25 with a decrease in mechanical strength by 44 %, compared to sensors without surface structures. T-shape hole structures are shown to improve sensitivity (∼14.56) more effectively by a factor of 2.4 with a loss of mechanical strength by 21 %. The strain-modulated sensor also demonstrates long-term stability (∼ 500 cycles) in cyclic tests, and reliable performance in tracking the movement of a robotic finger. This work provides a promising way to achieve cost-competitive compliant sensors with enhanced sensitivity.</div></div>\",\"PeriodicalId\":21689,\"journal\":{\"name\":\"Sensors and Actuators A-physical\",\"volume\":\"386 \",\"pages\":\"Article 116344\"},\"PeriodicalIF\":4.9000,\"publicationDate\":\"2025-05-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Sensors and Actuators A-physical\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0924424725001505\",\"RegionNum\":3,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"2025/2/18 0:00:00\",\"PubModel\":\"Epub\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Sensors and Actuators A-physical","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0924424725001505","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"2025/2/18 0:00:00","PubModel":"Epub","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
Enhanced sensitivity of compliant piezoresistive sensors with strain-modulated surface hole structures
Compliant sensors with enhanced sensitivity are of interest for a wide range of applications. However, it is still challenging to implement high-performance sensors at reduced fabrication costs. Herein, a new design of compliant sensors with enhanced sensitivity is investigated by jointly utilizing strain-dependent piezoresistive material properties and simple strain-modulated surface hole structures. The surface hole structure amplifies local piezoresistive responses at strain-concentrated regions, and enhances sensitivity globally. Multi-objective optimization is conducted to obtain maximal sensitivity at a minimal loss in mechanical strength due to the hole structure. Experimental validations are performed on sensors made of low-cost exfoliated graphite nanocomposites via a simple and scalable cut-and-spray technique. Results show that the single rectangular-hole structure maximizes sensitivity to ∼ 8.25 with a decrease in mechanical strength by 44 %, compared to sensors without surface structures. T-shape hole structures are shown to improve sensitivity (∼14.56) more effectively by a factor of 2.4 with a loss of mechanical strength by 21 %. The strain-modulated sensor also demonstrates long-term stability (∼ 500 cycles) in cyclic tests, and reliable performance in tracking the movement of a robotic finger. This work provides a promising way to achieve cost-competitive compliant sensors with enhanced sensitivity.
期刊介绍:
Sensors and Actuators A: Physical brings together multidisciplinary interests in one journal entirely devoted to disseminating information on all aspects of research and development of solid-state devices for transducing physical signals. Sensors and Actuators A: Physical regularly publishes original papers, letters to the Editors and from time to time invited review articles within the following device areas:
• Fundamentals and Physics, such as: classification of effects, physical effects, measurement theory, modelling of sensors, measurement standards, measurement errors, units and constants, time and frequency measurement. Modeling papers should bring new modeling techniques to the field and be supported by experimental results.
• Materials and their Processing, such as: piezoelectric materials, polymers, metal oxides, III-V and II-VI semiconductors, thick and thin films, optical glass fibres, amorphous, polycrystalline and monocrystalline silicon.
• Optoelectronic sensors, such as: photovoltaic diodes, photoconductors, photodiodes, phototransistors, positron-sensitive photodetectors, optoisolators, photodiode arrays, charge-coupled devices, light-emitting diodes, injection lasers and liquid-crystal displays.
• Mechanical sensors, such as: metallic, thin-film and semiconductor strain gauges, diffused silicon pressure sensors, silicon accelerometers, solid-state displacement transducers, piezo junction devices, piezoelectric field-effect transducers (PiFETs), tunnel-diode strain sensors, surface acoustic wave devices, silicon micromechanical switches, solid-state flow meters and electronic flow controllers.
Etc...