应变调制表面孔结构柔性压阻传感器的灵敏度提高

IF 4.9 3区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Sensors and Actuators A-physical Pub Date : 2025-05-01 Epub Date: 2025-02-18 DOI:10.1016/j.sna.2025.116344
Ying Chen, Yujiao Qin, Muzi Fang, Peng Wang, Ruishan Xie, Haibin Liu
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引用次数: 0

摘要

具有增强灵敏度的兼容传感器是广泛应用的兴趣。然而,在降低制造成本的情况下实现高性能传感器仍然具有挑战性。本文利用应变相关的压阻材料特性和简单的应变调制表面孔结构,研究了一种提高灵敏度的柔性传感器的新设计。表面孔结构放大了应变集中区域的局部压阻响应,提高了整体灵敏度。通过多目标优化,以最小的孔结构机械强度损失获得最大的灵敏度。通过一种简单、可扩展的切割和喷涂技术,对低成本剥落石墨纳米复合材料制成的传感器进行了实验验证。结果表明,与没有表面结构的传感器相比,单个矩形孔结构的灵敏度最高为~ 8.25,机械强度降低了44% %。t形孔结构可以更有效地提高灵敏度(~ 14.56),其系数为2.4,而机械强度损失为21. %。应变调制传感器在循环测试中也表现出长期稳定性(~ 500个周期),并且在跟踪机器人手指的运动方面表现可靠。这项工作提供了一种有希望的方法来实现具有成本竞争力和增强灵敏度的柔性传感器。
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Enhanced sensitivity of compliant piezoresistive sensors with strain-modulated surface hole structures
Compliant sensors with enhanced sensitivity are of interest for a wide range of applications. However, it is still challenging to implement high-performance sensors at reduced fabrication costs. Herein, a new design of compliant sensors with enhanced sensitivity is investigated by jointly utilizing strain-dependent piezoresistive material properties and simple strain-modulated surface hole structures. The surface hole structure amplifies local piezoresistive responses at strain-concentrated regions, and enhances sensitivity globally. Multi-objective optimization is conducted to obtain maximal sensitivity at a minimal loss in mechanical strength due to the hole structure. Experimental validations are performed on sensors made of low-cost exfoliated graphite nanocomposites via a simple and scalable cut-and-spray technique. Results show that the single rectangular-hole structure maximizes sensitivity to ∼ 8.25 with a decrease in mechanical strength by 44 %, compared to sensors without surface structures. T-shape hole structures are shown to improve sensitivity (∼14.56) more effectively by a factor of 2.4 with a loss of mechanical strength by 21 %. The strain-modulated sensor also demonstrates long-term stability (∼ 500 cycles) in cyclic tests, and reliable performance in tracking the movement of a robotic finger. This work provides a promising way to achieve cost-competitive compliant sensors with enhanced sensitivity.
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来源期刊
Sensors and Actuators A-physical
Sensors and Actuators A-physical 工程技术-工程:电子与电气
CiteScore
8.10
自引率
6.50%
发文量
630
审稿时长
49 days
期刊介绍: Sensors and Actuators A: Physical brings together multidisciplinary interests in one journal entirely devoted to disseminating information on all aspects of research and development of solid-state devices for transducing physical signals. Sensors and Actuators A: Physical regularly publishes original papers, letters to the Editors and from time to time invited review articles within the following device areas: • Fundamentals and Physics, such as: classification of effects, physical effects, measurement theory, modelling of sensors, measurement standards, measurement errors, units and constants, time and frequency measurement. Modeling papers should bring new modeling techniques to the field and be supported by experimental results. • Materials and their Processing, such as: piezoelectric materials, polymers, metal oxides, III-V and II-VI semiconductors, thick and thin films, optical glass fibres, amorphous, polycrystalline and monocrystalline silicon. • Optoelectronic sensors, such as: photovoltaic diodes, photoconductors, photodiodes, phototransistors, positron-sensitive photodetectors, optoisolators, photodiode arrays, charge-coupled devices, light-emitting diodes, injection lasers and liquid-crystal displays. • Mechanical sensors, such as: metallic, thin-film and semiconductor strain gauges, diffused silicon pressure sensors, silicon accelerometers, solid-state displacement transducers, piezo junction devices, piezoelectric field-effect transducers (PiFETs), tunnel-diode strain sensors, surface acoustic wave devices, silicon micromechanical switches, solid-state flow meters and electronic flow controllers. Etc...
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