{"title":"RF-MEMS的进展。","authors":"R Niall Tait","doi":"10.3390/mi16020233","DOIUrl":null,"url":null,"abstract":"<p><p>As micro-electro-mechanical systems (MEMS) have evolved and matured over the last few decades, they have impacted a broad range of technologies and application areas [...].</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 2","pages":""},"PeriodicalIF":3.0000,"publicationDate":"2025-02-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11857245/pdf/","citationCount":"0","resultStr":"{\"title\":\"Progress in RF-MEMS.\",\"authors\":\"R Niall Tait\",\"doi\":\"10.3390/mi16020233\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p><p>As micro-electro-mechanical systems (MEMS) have evolved and matured over the last few decades, they have impacted a broad range of technologies and application areas [...].</p>\",\"PeriodicalId\":18508,\"journal\":{\"name\":\"Micromachines\",\"volume\":\"16 2\",\"pages\":\"\"},\"PeriodicalIF\":3.0000,\"publicationDate\":\"2025-02-19\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11857245/pdf/\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Micromachines\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://doi.org/10.3390/mi16020233\",\"RegionNum\":3,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"CHEMISTRY, ANALYTICAL\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Micromachines","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.3390/mi16020233","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"CHEMISTRY, ANALYTICAL","Score":null,"Total":0}
As micro-electro-mechanical systems (MEMS) have evolved and matured over the last few decades, they have impacted a broad range of technologies and application areas [...].
期刊介绍：
Micromachines (ISSN 2072-666X) is an international, peer-reviewed open access journal which provides an advanced forum for studies related to micro-scaled machines and micromachinery. It publishes reviews, regular research papers and short communications. Our aim is to encourage scientists to publish their experimental and theoretical results in as much detail as possible. There is no restriction on the length of the papers. The full experimental details must be provided so that the results can be reproduced.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
