A multifunctional optical MEMS logic device for integration into reprogrammable photonic circuits for artificial intelligence applications

This paper presents a multifunctional optical Micro-Electro-Mechanical Systems (MEMS) logic gate that uses an electrostatic comb-drive configuration to perform various logical operations. The proposed device includes a MEMS actuator that converts electrostatic input signals to mechanical displacement. In this design, a microring resonator has been positioned close to a straight waveguide that carries the propagating mode. By adjusting the actuator displacement, the distance between the microring resonator and the waveguide can be varied, causing a change in the transmission spectrum of the waveguide and determining the output logic. This device can perform different logical operations such as NAND, OR, XOR, and NOT operations based on the signals applied to the gate ports, making it ideal for integration into reprogrammable photonic circuits for complex applications such as neural networks. The functional characteristics of the proposed device, including an operating voltage of 30 V, a switching time of 800 ns, and a footprint of 792µm², demonstrate its potential to enable advanced functionalities in PICs.