P. Daniel Dapkus , Chun Yung Chi , Sang Jun Choi , Hyung Joon Chu , Mitchell Dreiske , Rijuan Li , Yenting Lin , Yoshitake Nakajima , Dawei Ren , Ryan Stevenson , Maoqing Yao , Ting Wei Yeh , Hanmin Zhao
{"title":"金属有机化学气相沉积的选择性区域外延——光子与新型纳米结构集成的工具","authors":"P. Daniel Dapkus , Chun Yung Chi , Sang Jun Choi , Hyung Joon Chu , Mitchell Dreiske , Rijuan Li , Yenting Lin , Yoshitake Nakajima , Dawei Ren , Ryan Stevenson , Maoqing Yao , Ting Wei Yeh , Hanmin Zhao","doi":"10.1016/j.pquantelec.2020.100304","DOIUrl":null,"url":null,"abstract":"<div><p><span>Selective area epitaxial (SAE) growth of III-V materials and devices by metalorganic chemical vapor deposition<span> is selectively reviewed to illustrate the concepts employed in this technology and its most relevant applications. Special focus on the use of SAE use for photonic integration, heterogeneous integration of materials relevant to photonic integration, and </span></span>nanostructure integration is made. Throughout, the pioneering work led by Professor James J. Coleman is used to illustrate the value of using selective growth for various applications.</p></div>","PeriodicalId":414,"journal":{"name":"Progress in Quantum Electronics","volume":"75 ","pages":"Article 100304"},"PeriodicalIF":7.4000,"publicationDate":"2021-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/j.pquantelec.2020.100304","citationCount":"5","resultStr":"{\"title\":\"Selective area epitaxy by metalorganic chemical vapor deposition– a tool for photonic and novel nanostructure integration\",\"authors\":\"P. Daniel Dapkus , Chun Yung Chi , Sang Jun Choi , Hyung Joon Chu , Mitchell Dreiske , Rijuan Li , Yenting Lin , Yoshitake Nakajima , Dawei Ren , Ryan Stevenson , Maoqing Yao , Ting Wei Yeh , Hanmin Zhao\",\"doi\":\"10.1016/j.pquantelec.2020.100304\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p><span>Selective area epitaxial (SAE) growth of III-V materials and devices by metalorganic chemical vapor deposition<span> is selectively reviewed to illustrate the concepts employed in this technology and its most relevant applications. Special focus on the use of SAE use for photonic integration, heterogeneous integration of materials relevant to photonic integration, and </span></span>nanostructure integration is made. Throughout, the pioneering work led by Professor James J. Coleman is used to illustrate the value of using selective growth for various applications.</p></div>\",\"PeriodicalId\":414,\"journal\":{\"name\":\"Progress in Quantum Electronics\",\"volume\":\"75 \",\"pages\":\"Article 100304\"},\"PeriodicalIF\":7.4000,\"publicationDate\":\"2021-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1016/j.pquantelec.2020.100304\",\"citationCount\":\"5\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Progress in Quantum Electronics\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S007967272030063X\",\"RegionNum\":1,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Progress in Quantum Electronics","FirstCategoryId":"101","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S007967272030063X","RegionNum":1,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
Selective area epitaxy by metalorganic chemical vapor deposition– a tool for photonic and novel nanostructure integration
Selective area epitaxial (SAE) growth of III-V materials and devices by metalorganic chemical vapor deposition is selectively reviewed to illustrate the concepts employed in this technology and its most relevant applications. Special focus on the use of SAE use for photonic integration, heterogeneous integration of materials relevant to photonic integration, and nanostructure integration is made. Throughout, the pioneering work led by Professor James J. Coleman is used to illustrate the value of using selective growth for various applications.
期刊介绍：
Progress in Quantum Electronics, established in 1969, is an esteemed international review journal dedicated to sharing cutting-edge topics in quantum electronics and its applications. The journal disseminates papers covering theoretical and experimental aspects of contemporary research, including advances in physics, technology, and engineering relevant to quantum electronics. It also encourages interdisciplinary research, welcoming papers that contribute new knowledge in areas such as bio and nano-related work.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
