二硫代氨基甲酸酯锚定单分子层和聚合物在金上的光刻技术。

Alexei P Leonov, Alexander Wei
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引用次数: 14

摘要

研究了二硫代氨基甲酸酯(DTC)锚定的单层和聚合物作为平面和粗糙金表面UV光刻的正性抗蚀剂。在表面钝化之前,CS(2)与一价或多价胺(如线性聚乙烯亚胺(PEI))在温和的碱性水条件下原位缩合形成dtc。多价PEI-DTC对Au表面的强大吸附支持了高水平的光烧蚀抗性,为生成具有梯度功能的薄膜提供了机会。用烷硫醇处理光图型衬底产生二元涂层,可以使用共聚焦显微镜直接直观地比较DTC和硫醇钝化表面对化学诱导腐蚀的影响。
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Photolithography of Dithiocarbamate-Anchored Monolayers and Polymers on Gold.

Dithiocarbamate (DTC)-anchored monolayers and polymers were investigated as positive resists for UV photolithography on planar and roughened Au surfaces. DTCs were formed in situ by the condensation of CS(2) with monovalent or polyvalent amines such as linear polyethyleneimine (PEI) under mildly basic aqueous conditions, just prior to surface passivation. The robust adsorption of the polyvalent PEI-DTC to Au surfaces supported high levels of resistance to photoablation, providing opportunities to generate thin films with gradient functionality. Treatment of photopatterned substrates with alkanethiols produced binary coatings, enabling a direct visual comparison of DTC- and thiol-passivated surfaces against chemically induced corrosion using confocal microscopy.

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来源期刊
Journal of Materials Chemistry
Journal of Materials Chemistry 工程技术-材料科学:综合
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