1320nm氘处理硅光源

IF 1.8 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY IEEE Open Journal of Nanotechnology Pub Date : 2020-09-18 DOI:10.1109/OJNANO.2020.3025167
Seref Kalem
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引用次数: 0

摘要

本文报道了一种基于纳米结构硅表面的1320nm通信波长的高效室温光子源。该光源的活化是通过用含有氢氟酸和硝酸混合物的重水(D2O)蒸气处理硅片表面实现的。不含氘的处理在Si的带边处产生一个强发射带,而单独含氘处理在近红外1320nm处产生一个强发射带。从Si- o振动模式的相对强度和N-D键的存在可以看出,氘积极参与了纳米结构Si表面的形成。从氧相关缺陷态和位错的角度讨论了光子源的起源。经含氘混合物处理的硅表面表现出很强的整流电活性,在这些晶圆上制造的肖特基二极管证明了这一点。该源与成熟的硅电路兼容,可以在光子学和光电子学中找到应用。
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1320 nm Light Source From Deuterium Treated Silicon
We report an efficient room temperature photon source at 1320 nm telecommunication wavelength from nanostructured silicon surface. The activation of this light source was realized by treating the surface of Si wafer by vapor of heavy water (D2O) containing a mixture of hydrofluoric and nitric acids. Treatment without deuterium generates an intense light emission band at the band-edge of Si, while the deuterium treatment alone creates a strong emission band at 1320 nm in the near infrared. It was found that the deuterium is actively involved in the formation of a nanostructured Si surface as evidenced from relative strength of the Si-O vibrational modes and presence of N-D bondings. The origin of this photon source was discussed in terms of oxygen related defect states and dislocations. The Si surface treated by Deuterium containing mixture exhibits a strong rectifying electrical activity as it is demonstrated by Schottky diodes fabricated on these wafers. Being compatible with mature silicon circuitry, the source may find applications in photonics and optoelectronics.
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来源期刊
CiteScore
3.90
自引率
17.60%
发文量
10
审稿时长
12 weeks
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