Pub Date : 2024-10-30DOI: 10.1109/OJNANO.2024.3488787
Anmol Garg;Sajal Agarwal;Deepak Punetha
This paper reports the comparative analysis of different piezoelectric materials through a MEMS-based piezoelectric actuator model, emphasizing their potential for sensing applications. The polarization and electrostrictive strain tensor capabilities have been extensively studied for different piezoelectric materials such as PZT, LiNbO 3