石墨烯在钨上诱导金刚石成核

IF 1.8 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY IEEE Open Journal of Nanotechnology Pub Date : 2020-11-13 DOI:10.1109/OJNANO.2020.3038055
Yonhua Tzeng;Chih-Chun Chang
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引用次数: 4

摘要

化学气相沉积(CVD)在非金刚石衬底上的金刚石膜开始于金刚石种子的插入或衬底上金刚石核的形成。为了沉积光滑、大面积、无针孔、粘附良好的金刚石膜,金刚石种子或金刚石核需要密度高、分布均匀、粘附良好。钻石播种不是钻石成核的过程。偏置增强成核(BEN)是CVD金刚石非均相成核最有效的方法。它是基于衬底和金刚石CVD等离子体之间的负偏置电压来加速等离子体中的正离子轰击衬底。在实际应用中,直接播种法和人工智能都存在技术障碍。需要新的金刚石成核技术。本文报道了一种新型的沿石墨烯边缘线的非均质金刚石成核,从而导致连续金刚石膜的沉积。在实验观察的基础上,提出了石墨烯边缘sp3碳钨键辅助下的金刚石成核机制。希望科学家们对揭示金刚石成核的精确机制产生兴趣。因此,本发明的进一步优化可能导致一种新的、互补的金刚石成核工艺,用于实际沉积金刚石薄膜。
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Graphene Induced Diamond Nucleation on Tungsten
Chemical vapor deposition (CVD) of a diamond film on a non-diamond substrate begins with the insertion of diamond seeds or the formation of diamond nuclei on the substrate. For the deposition of a smooth, large-area and pin-hole free diamond film that adheres well to the substrate, diamond seeds or nuclei need to be of high density, uniformly distributed and adhere well to the substrate. Diamond seeding is not a diamond nucleation process. Bias enhanced nucleation (BEN) is the most effective means of heterogeneous nucleation of diamond for CVD diamond. It is based on a negative biasing voltage between the substrate and the diamond CVD plasma to accelerate positive ions from the plasma to bombard the substrate. Both direct diamond seeding and BEN have technical barriers in practical applications. New diamond nucleation techniques are desired. This paper reports novel heterogenous diamond nucleation along edge line of graphene on tungsten leading to the deposition of continuous diamond films. Based on experimental observation, a diamond nucleation mechanism assisted by sp3 C-W bonds at graphene edge is proposed. It is wished that scientists will become interested in revealing the precise diamond nucleation mechanism. With that, further optimization of this invention may lead to a new, complementary diamond nucleation process for practical deposition of diamond films.
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来源期刊
CiteScore
3.90
自引率
17.60%
发文量
10
审稿时长
12 weeks
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