随机粗糙表面上的时间周期性物理气相沉积

IF 1.1 4区物理与天体物理 Q4 NANOSCIENCE & NANOTECHNOLOGY Journal of Nanophotonics Pub Date : 2023-07-01 DOI:10.1117/1.JNP.17.036005

Ricardo A. Fiallo, Chengzhi Li, A. Lakhtakia, M. Horn

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引用次数: 0

摘要

摘要时间周期物理气相沉积(TP-PVD)是一种常用的平面布拉格反射镜制备方法。这些器件在理论上具有无限横向延伸和均匀性，但它们在厚度方向上具有周期性非均匀的电磁本构。在两种不同的格式下进行TP-PVD，我们发现通过在波长尺度上随机粗糙的表面上进行TP-PVD，可以避免某些薄膜应用中的Bragg现象。

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On temporally periodic physical vapor deposition on random rough surfaces

Abstract. Temporally periodic physical vapor deposition (TP-PVD) is commonly used to fabricate Bragg mirrors on planar surfaces. These devices are notionally of infinite transverse extent and homogeneity, but they have periodically nonhomogeneous electromagnetic constitutions in the thickness direction. Undertaking TP-PVD in two different formats, we found that the Bragg phenomenon can be avoided in certain thin-film applications by undertaking TP-PVD on surfaces roughened randomly on the scale of the wavelength.

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来源期刊

Journal of Nanophotonics 工程技术-光学

CiteScore

2.60

自引率

6.70%

发文量

审稿时长

3 months

期刊介绍： The Journal of Nanophotonics publishes peer-reviewed papers focusing on the fabrication and application of nanostructures that facilitate the generation, propagation, manipulation, and detection of light from the infrared to the ultraviolet regimes.