{"title":"Cr Kα激发下Ta和Ta2O5的HAXPES参考光谱","authors":"Dong Zheng, C. N. Young, W. Stickle","doi":"10.1116/6.0002551","DOIUrl":null,"url":null,"abstract":"Monochromatic Cr Kα radiation (5414.8 eV) has been used to acquire XPS and Auger data on sputtered Ta and Ta2O5 samples. Survey data, high-resolution scans of all observed photoelectron peaks, and high-resolution scans of Auger lines are presented herein.","PeriodicalId":22006,"journal":{"name":"Surface Science Spectra","volume":null,"pages":null},"PeriodicalIF":1.6000,"publicationDate":"2023-07-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"HAXPES reference spectra of Ta and Ta2O5 with Cr Kα excitation\",\"authors\":\"Dong Zheng, C. N. Young, W. Stickle\",\"doi\":\"10.1116/6.0002551\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Monochromatic Cr Kα radiation (5414.8 eV) has been used to acquire XPS and Auger data on sputtered Ta and Ta2O5 samples. Survey data, high-resolution scans of all observed photoelectron peaks, and high-resolution scans of Auger lines are presented herein.\",\"PeriodicalId\":22006,\"journal\":{\"name\":\"Surface Science Spectra\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":1.6000,\"publicationDate\":\"2023-07-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Surface Science Spectra\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1116/6.0002551\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"PHYSICS, CONDENSED MATTER\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Surface Science Spectra","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1116/6.0002551","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"PHYSICS, CONDENSED MATTER","Score":null,"Total":0}
HAXPES reference spectra of Ta and Ta2O5 with Cr Kα excitation
Monochromatic Cr Kα radiation (5414.8 eV) has been used to acquire XPS and Auger data on sputtered Ta and Ta2O5 samples. Survey data, high-resolution scans of all observed photoelectron peaks, and high-resolution scans of Auger lines are presented herein.
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