利用浸涂技术制备薄膜晶体管栅极介质和半导体

IF 1.1 4区 材料科学 Q4 MATERIALS SCIENCE, MULTIDISCIPLINARY Korean Journal of Metals and Materials Pub Date : 2023-08-05 DOI:10.3365/kjmm.2023.61.8.581
Yong-Wan Kim, Young-Geun Ha
{"title":"利用浸涂技术制备薄膜晶体管栅极介质和半导体","authors":"Yong-Wan Kim, Young-Geun Ha","doi":"10.3365/kjmm.2023.61.8.581","DOIUrl":null,"url":null,"abstract":"The potential applications of advanced electronic materials in large-area, printable, and flexible electronics have generated significant interest. However, creating high-performance, low-voltage thin-film transistors (TFTs) for these applications remains difficult due to a lack of advanced gate dielectric and semiconductor materials that meet both ease-of-fabrication requirements and high electrical performance. In this study, we present high-performance gate dielectric thin-films, which were fabricated using a facile solution-based technique, and then employed to realize low operating voltage organic and metal oxide semiconductor-based thin-film transistors. The high-k oxide gate dielectrics were produced via a simple dip-coating method, resulting in the formation of thin-oxide layers. These novel oxide gate dielectrics demonstrated exceptional dielectric properties, with large capacitances (up to 430 nF/ cm2), low-level leakage current densities (< 3 × 10-8A/cm2 at 4 V), featureless morphology (rms roughness < 0.36 nm), and high transparency (> 85%). Consequently, these dip-coated gate dielectrics can be incorporated into thin-film transistors, utilizing pentacene as p-type organic semiconductors. Furthermore, by employing dip-coating, indium oxide and indium-gallium-zinc oxide can be utilized as n-type inorganic semiconductors, allowing for the fabrication of low-voltage operation and high-performance inorganic TFTs. The resulting TFTs functioned at ultralow voltages (< ± 2 V) and achieved high transistor performance (hole mobility: 0.28 cm2V-1·s-1, electron mobility: ~2.0 cm2V-1·s-1 and on/off current ratio >105).","PeriodicalId":17894,"journal":{"name":"Korean Journal of Metals and Materials","volume":null,"pages":null},"PeriodicalIF":1.1000,"publicationDate":"2023-08-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Utilizing Dip-Coating to Fabricate Gate Dielectric and Semiconductor for Thin-Film Transistors\",\"authors\":\"Yong-Wan Kim, Young-Geun Ha\",\"doi\":\"10.3365/kjmm.2023.61.8.581\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The potential applications of advanced electronic materials in large-area, printable, and flexible electronics have generated significant interest. However, creating high-performance, low-voltage thin-film transistors (TFTs) for these applications remains difficult due to a lack of advanced gate dielectric and semiconductor materials that meet both ease-of-fabrication requirements and high electrical performance. In this study, we present high-performance gate dielectric thin-films, which were fabricated using a facile solution-based technique, and then employed to realize low operating voltage organic and metal oxide semiconductor-based thin-film transistors. The high-k oxide gate dielectrics were produced via a simple dip-coating method, resulting in the formation of thin-oxide layers. These novel oxide gate dielectrics demonstrated exceptional dielectric properties, with large capacitances (up to 430 nF/ cm2), low-level leakage current densities (< 3 × 10-8A/cm2 at 4 V), featureless morphology (rms roughness < 0.36 nm), and high transparency (> 85%). Consequently, these dip-coated gate dielectrics can be incorporated into thin-film transistors, utilizing pentacene as p-type organic semiconductors. Furthermore, by employing dip-coating, indium oxide and indium-gallium-zinc oxide can be utilized as n-type inorganic semiconductors, allowing for the fabrication of low-voltage operation and high-performance inorganic TFTs. The resulting TFTs functioned at ultralow voltages (< ± 2 V) and achieved high transistor performance (hole mobility: 0.28 cm2V-1·s-1, electron mobility: ~2.0 cm2V-1·s-1 and on/off current ratio >105).\",\"PeriodicalId\":17894,\"journal\":{\"name\":\"Korean Journal of Metals and Materials\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":1.1000,\"publicationDate\":\"2023-08-05\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Korean Journal of Metals and Materials\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://doi.org/10.3365/kjmm.2023.61.8.581\",\"RegionNum\":4,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Korean Journal of Metals and Materials","FirstCategoryId":"88","ListUrlMain":"https://doi.org/10.3365/kjmm.2023.61.8.581","RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0

摘要

先进电子材料在大面积、可印刷和柔性电子领域的潜在应用引起了人们极大的兴趣。然而,由于缺乏既能满足易于制造要求又能满足高电气性能的先进栅极介电材料和半导体材料,为这些应用创造高性能、低压薄膜晶体管(TFTs)仍然很困难。在这项研究中,我们提出了高性能的栅极介电薄膜,采用一种简单的基于溶液的技术,然后用于实现低工作电压的有机和金属氧化物半导体薄膜晶体管。采用简单的浸涂方法制备了高钾氧化物栅极电介质,形成了薄氧化层。这些新型氧化栅介质具有优异的介电性能,具有大电容(高达430 nF/ cm2),低泄漏电流密度(在4 V时< 3 × 10-8A/cm2),无特征形态(rms粗糙度< 0.36 nm)和高透明度(> 85%)。因此,这些浸涂栅极电介质可以集成到薄膜晶体管中,利用并五苯作为p型有机半导体。此外,通过浸涂,氧化铟和氧化铟镓锌可以用作n型无机半导体,从而可以制造低电压运行和高性能的无机tft。所得到的TFTs在超低电压(<±2V)下工作,并实现了高晶体管性能(空穴迁移率:0.28 cm2V-1·s-1,电子迁移率:~2.0 cm2V-1·s-1,通断电流比>105)。
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Utilizing Dip-Coating to Fabricate Gate Dielectric and Semiconductor for Thin-Film Transistors
The potential applications of advanced electronic materials in large-area, printable, and flexible electronics have generated significant interest. However, creating high-performance, low-voltage thin-film transistors (TFTs) for these applications remains difficult due to a lack of advanced gate dielectric and semiconductor materials that meet both ease-of-fabrication requirements and high electrical performance. In this study, we present high-performance gate dielectric thin-films, which were fabricated using a facile solution-based technique, and then employed to realize low operating voltage organic and metal oxide semiconductor-based thin-film transistors. The high-k oxide gate dielectrics were produced via a simple dip-coating method, resulting in the formation of thin-oxide layers. These novel oxide gate dielectrics demonstrated exceptional dielectric properties, with large capacitances (up to 430 nF/ cm2), low-level leakage current densities (< 3 × 10-8A/cm2 at 4 V), featureless morphology (rms roughness < 0.36 nm), and high transparency (> 85%). Consequently, these dip-coated gate dielectrics can be incorporated into thin-film transistors, utilizing pentacene as p-type organic semiconductors. Furthermore, by employing dip-coating, indium oxide and indium-gallium-zinc oxide can be utilized as n-type inorganic semiconductors, allowing for the fabrication of low-voltage operation and high-performance inorganic TFTs. The resulting TFTs functioned at ultralow voltages (< ± 2 V) and achieved high transistor performance (hole mobility: 0.28 cm2V-1·s-1, electron mobility: ~2.0 cm2V-1·s-1 and on/off current ratio >105).
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来源期刊
Korean Journal of Metals and Materials
Korean Journal of Metals and Materials MATERIALS SCIENCE, MULTIDISCIPLINARY-METALLURGY & METALLURGICAL ENGINEERING
CiteScore
1.80
自引率
58.30%
发文量
100
审稿时长
4-8 weeks
期刊介绍: The Korean Journal of Metals and Materials is a representative Korean-language journal of the Korean Institute of Metals and Materials (KIM); it publishes domestic and foreign academic papers related to metals and materials, in abroad range of fields from metals and materials to nano-materials, biomaterials, functional materials, energy materials, and new materials, and its official ISO designation is Korean J. Met. Mater.
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