175℃退火铝键垫上2N金丝球键的金属间生长动力学

IF 2.2 4区 工程技术 Q2 Chemistry Gold Bulletin Pub Date : 2016-10-03 DOI:10.1007/s13404-016-0184-6
C. D. Breach
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引用次数: 5

摘要

采用铝合金键垫金属化方法将纯度为2N的金球键合线与硅器件进行了键合。试样在175℃等温退火。在空气环境中,在风扇循环烤箱中温度为°C,不同时间t。对每个样品的球键样品进行横截面,并测量球键中心的总金属间厚度x。x对t的动力学用幂律表达式\( x(t)={x}_0+{\theta}_1{t}^{\theta_2} \)建模,生长参数为θ 1,约束参数为0?&lt;?θ 2≤1。据推测,参数θ 2能够区分扩散控制的金属间生长(晶界和/或体积扩散)和界面反应控制的生长(晶粒是否生长),仅基于其数值。参数θ 1?和θ 2和回归函数分别对响应变量x和解释变量t进行对数变换,并采用简单线性回归(SLR)进行数据拟合,并注意进行诊断检查,以确定转换后的数据满足SLR的要求。从对数正态分布中抽样得到的模拟金属间化合物厚度数据与实验结果非常接近。指数θ 2的取值范围为0.2 ~ 0.4,表明晶界主导了晶粒长大过程中的相互扩散。
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Intermetallic growth kinetics of 2N gold wire ball bonds on aluminium bond pads annealed at 175 °C

Gold ball bonding wires of 2N purity were bonded to Si devices with aluminium alloy bond pad metallisation. Specimens were subjected to isothermal annealing at 175?°C in a fan-circulated oven in an air environment for various times t. Samples of ball bonds from each specimen were cross-sectioned, and the total intermetallic thickness x at the centre of the ball bonds was measured. The kinetics of x versus t were modelled using a power law expression \( x(t)={x}_0+{\theta}_1{t}^{\theta_2} \) with growth parameter θ 1 and constrained parameter 0?<?θ 2?≤?1. The parameter θ 2 is supposedly capable of differentiating between diffusion controlled intermetallic growth (grain boundary and/or volume diffusion) and interfacial reaction controlled growth with the presence/absence of grain growth solely based on its numerical value. The parameters θ 1?and θ 2 and the regression function were obtained by log-transformation of both the response variable x and the explanatory variable t and data fitting using simple linear regression (SLR), taking care to perform diagnostic checks to confirm that transformed data satisfied the requirements of SLR. Simulated intermetallic thickness data obtained by sampling from lognormal distributions was observed to closely approximate the experimental observations. Values of the exponent θ 2 were observed in the range 0.2–0.4, which was interpreted as indicative of grain boundary dominated interdiffusion with grain growth.

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来源期刊
Gold Bulletin
Gold Bulletin 工程技术-材料科学:综合
CiteScore
3.30
自引率
4.50%
发文量
0
审稿时长
3 months
期刊介绍: Gold Bulletin is the premier international peer reviewed journal on the latest science, technology and applications of gold. It includes papers on the latest research advances, state-of-the-art reviews, conference reports, book reviews and highlights of patents and scientific literature. Gold Bulletin does not publish manuscripts covering the snthesis of Gold nanoparticles in the presence of plant extracts or other nature-derived extracts. Gold Bulletin has been published over 40 years as a multidisciplinary journal read by chemists, physicists, engineers, metallurgists, materials scientists, biotechnologists, surface scientists, and nanotechnologists amongst others, both within industry and academia. Gold Bulletin is published in Association with the World Gold Council.
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