Cr-Zr和Cr-Zr-O纳米结构的合成与表征

IF 1 4区 材料科学 Journal of Ovonic Research Pub Date : 2023-08-01 DOI:10.15251/jor.2023.194.439
V. Ciupină, M. Albu, A. Caraiane, C. Porosnicu, C. Staicu, P. Dinca, V. Nicolescu, R. Manu
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引用次数: 0

摘要

在10-6 mbar真空条件下,在抽真空容积为0.05 m3的圆形外壳中,采用磁控溅射连续模式共沉积了500 nm厚的Cr-Zr和Cr-Zr- o涂层。采用12x15mm的硅和碳衬底进行沉积。通过扫描电子显微镜(SEM)研究了沉积在硅和碳衬底上的所有CrZr和CrZrO2涂层的拓扑结构,放大倍数分别为1000倍、5000倍和10000倍。对于沉积在硅衬底上的所有涂层,在所有三个放大倍数下,观察到表面非常光滑,只有小的拓扑元素。在一些样品中,可以观察到很少的液滴在100nm左右。颗粒的出现是由沉积过程中靶表面发生的拱起事件引起的,在反应溅射过程中更为明显。沉积在碳衬底上的涂层表现出更多的形态学特征,因为这些衬底具有较低等级的表面抛光,而不是切片硅晶圆;沉积膜倾向于遵循衬底拓扑结构,表面可以看到裂纹。采用Bruker Hysitron TI 980摩擦压头,分别对Cr+Zr和Cr+Zr+O2试样的力学性能进行了研究,该摩擦压头可以推断出杨氏模量(YM)和硬度(H)等力学性能。在无氧沉积(Zr-Cr结构)过程中,杨氏模量和硬度受到Cr和Zr两组分浓度比的影响,即通过相应改变结构组分浓度来调节YM和H这两个参数是可行的。在Cr+Zr+O2结构中,对于铬浓度最高、锆浓度最低的样品,氧的存在分别导致YM和H的降低(在这种情况下,Cr- o键占主导地位)。在样品中,锆的浓度最大,铬的浓度最小,在氧存在的情况下(现在键Zr-O占主导地位),YM和H的增加被观察到。采用x射线衍射(XRD)方法对晶体结构进行了研究,实验装置由配备cu - k - α x射线源的衍射仪组成,特定波长为0.154nm,呈Bragg-Bretano型几何形状。在Cr-Zr样品中,衍射图显示只有与Si衬底对应的峰可见,突出了结构的非晶态特征。此外,测量结果还揭示了Cr-Zr-O样品的非晶性。为了突出Cr元素与Zr、O元素共同作用的效果,对ZrO2样品的衍射图和Cr-Zr-O样品的衍射图进行比较。考虑到这些材料在牙科中的应用,在ZrO2样品中发现的2条宽的非晶带和在Cr-Zr-O样品中发现的非晶特征,可以对应于用于将贴面附着在这种结构的牙齿上的粘合剂。从这个角度来看,可以说Cr- zr - o结构中Cr元素的存在扩大了其作为粘接剂将贴面附着在牙齿上的可能性。
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Synthesis and characterization of some Cr-Zr and Cr-Zr-O nanostructures
The co-depositions of Cr-Zr and those of Cr-Zr-O coatings of 500 nm thick were made using magnetron sputtering in continuous mode, in a circular enclosure with a volume of 0.05 m3 evacuated prior to the deposition process under 10-6 mbar vacuum conditions. Silicon and Carbon substrates measuring 12x15mm were used for deposition. The topology of all of the CrZr and CrZrO2 coatings deposited on silicon and carbon substrates have been investigated by Scanning Electron Microscopy (SEM) at three magnifications: 1000x, 5000x and 10.000x. For all of the coatings deposited on Silicon substrates, at all three magnifications, was observed very smooth surfaces with only small topological elements. In some samples, few droplets of around 100nm can be observed. The appearance of particulates is caused by the arching events that occur at target surface during the deposition proces and are more pronounced during reactive sputtering. The coatings deposited on the Carbon substrate show more morphological features as these substrates have a lower grade surface polish finish as to sliced Silicon wafers; the deposited film tends to follow the substrate topology and cracks can be seen on the surface. Were investigated the mechanical properties of the samples of Cr+Zr, respectively Cr+Zr+O2 using The Bruker Hysitron TI 980 TriboIndenter which allows to extrapolate mechanical properties such Young’ s Modulus (YM) and Hardness (H). The experimental results obtained through nanoindentation studies, show: In the absence of oxygen during deposition ( Zr-Cr structures), the Young’s Modulus and Hardness are influenced by the concentration ratio of the two components Cr and Zr, i.e., there is the practical possibility of adjusting the two parameters YM and H by correspondingly changing the concentrations of the components of the structure . In the case of the Cr+Zr+O2 structures, for sample where the concentration of Chromium is maximum and the concentration of Zirconium is minimum, the presence of Oxygen causes a decrease for YM and respectively a decrease for H (in this case Cr-O bonds are predominant). In the case of sample in which the concentration of Zirconium is maximum and the concentration of Chromium is minimum, in the presence of Oxygen (now the bonds Zr-O being predominant), an increase for YM and an increase for H are observed. The crystalline structure was investigated using X-Ray Diffraction (XRD) method, using a setup composed of a diffractometer equipped with a Cu-Kα X-ray sourse, with a specific wavelength of 0.154nm, in a Bragg-Bretano type geometry. In the case of the Cr-Zr sample, diffractograms show that only the peaks corresponding to the Si substrate are visible, highlighting the amorphous character of the structure. Also, the measurements reveal the amorfous character of the Cr-Zr-O sample. In order to highlight the effect of the element Cr together with Zr and O, the diffractogram of the ZrO2 sample and diffractogram of Cr-Zr-O sample are examinated for comparison. Considering the application of these materials in dentistry, the 2 wide amorphous strips in the case of ZrO2 sample and amorfous character found in the case of Cr-Zr-O sample, could correspond to the adhesive used to attach the veneer to the tooth of such structures. From this perspective, it can be stated that the presence of the Cr element in the Cr-Zr-O structure widens the possibility of its use as an adhesive to attach the veneer to the tooth.
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来源期刊
Journal of Ovonic Research
Journal of Ovonic Research Materials Science-Electronic, Optical and Magnetic Materials
CiteScore
1.60
自引率
20.00%
发文量
77
期刊介绍: Journal of Ovonic Research (JOR) appears with six issues per year and is open to the reviews, papers, short communications and breakings news inserted as Short Notes, in the field of ovonic (mainly chalcogenide) materials for memories, smart materials based on ovonic materials (combinations of various elements including chalcogenides), materials with nano-structures based on various alloys, as well as semiconducting materials and alloys based on amorphous silicon, germanium, carbon in their various nanostructured forms, either simple or doped/alloyed with hydrogen, fluorine, chlorine and other elements of high interest for applications in electronics and optoelectronics. Papers on minerals with possible applications in electronics and optoelectronics are encouraged.
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