{"title":"宏微运动平台控制方法的研究动向","authors":"Lufan Zhang, Pengqi Zhang, Boshi Jiang, Heng Yan","doi":"10.1063/10.0019384","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":35428,"journal":{"name":"Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering","volume":null,"pages":null},"PeriodicalIF":3.5000,"publicationDate":"2023-05-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Research trends in methods for controlling macro-micro motion platforms\",\"authors\":\"Lufan Zhang, Pengqi Zhang, Boshi Jiang, Heng Yan\",\"doi\":\"10.1063/10.0019384\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":35428,\"journal\":{\"name\":\"Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":3.5000,\"publicationDate\":\"2023-05-17\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering\",\"FirstCategoryId\":\"1087\",\"ListUrlMain\":\"https://doi.org/10.1063/10.0019384\",\"RegionNum\":3,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering","FirstCategoryId":"1087","ListUrlMain":"https://doi.org/10.1063/10.0019384","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0