单晶表面车削(111):切削力学和表面/次表面特性

IF 2.4 3区 工程技术 Q3 ENGINEERING, MANUFACTURING Journal of Manufacturing Science and Engineering-transactions of The Asme Pub Date : 2023-03-07 DOI:10.1115/1.4057054
A. Zare, M. Tunesi, T. Harriman, John R. Troutman, M. Davies, D. Lucca
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引用次数: 2

摘要

单晶锗是一种具有广泛应用的半导体,特别是在红外(IR)光的操纵方面。金刚石加工能够有效生产具有光学行业所需公差的表面。在加工各向异性单晶的过程中,相对于平面内晶格取向的切割方向对表面和次表面的最终质量起着重要作用。在本研究中,在未掺杂的(111)Ge晶片上进行了轴面车削实验,以研究晶体各向异性和进给速率对表面和亚表面条件的影响。原子力显微镜和扫描白光干涉测量法用于表征加工表面上是否存在脆性断裂,并评估由此产生的表面粗糙度。拉曼光谱用于评估加工过程中由工具引起的残余应力和晶格无序。使用Berkovich和直角压头尖端进行纳米压痕,以评估加工表面的弹性模量、硬度和断裂韧性,并研究它们随进给速率和切削方向的变化。还对选定压痕进行了压痕后研究,以表征相应的准塑性机制。研究发现,进给速率的增加产生了由刀具施加的合力的旋转,这表明从压痕主导行为转变为切削主导行为。断裂随着进给速度的增加而增加,当切割方向属于家族时,断裂表现出更高的倾向。
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Face Turning of Single Crystal (111)Ge: Cutting Mechanics and Surface/Subsurface Characteristics
Single crystal Ge is a semiconductor that has broad applications, especially in manipulation of infra-red (IR) light. Diamond machining enables the efficient production of surfaces with tolerances required by the optical industry. During machining of anisotropic single crystals, the cutting direction with respect to the in-plane lattice orientation plays a fundamental role in the final quality of the surface and subsurface. In this study, on-axis face turning experiments were performed on an undoped (111)Ge wafer to investigate the effects of crystal anisotropy and feedrate on the surface and subsurface condition. Atomic force microscopy and scanning white light interferometry were used to characterize the presence of brittle fracture on the machined surfaces and to evaluate the resultant surface roughness. Raman spectroscopy was performed to evaluate the residual stresses and lattice disorder induced by the tool during machining. Nanoindentation with Berkovich and cube corner indenter tips was performed to evaluate elastic modulus, hardness, and fracture toughness of the machined surfaces and to study their variations with feedrate and cutting direction. Post-indentation studies of selected indentations were also performed to characterize the corresponding quasi-plasticity mechanisms. It was found that an increase of feedrate produced a rotation of the resultant force imparted by the tool indication a shift from indentation-dominant to cutting-dominant behavior. Fracture increased with the feedrate and showed a higher propensity when the cutting direction belonged to the <112¯> family.
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来源期刊
CiteScore
6.80
自引率
20.00%
发文量
126
审稿时长
12 months
期刊介绍: Areas of interest including, but not limited to: Additive manufacturing; Advanced materials and processing; Assembly; Biomedical manufacturing; Bulk deformation processes (e.g., extrusion, forging, wire drawing, etc.); CAD/CAM/CAE; Computer-integrated manufacturing; Control and automation; Cyber-physical systems in manufacturing; Data science-enhanced manufacturing; Design for manufacturing; Electrical and electrochemical machining; Grinding and abrasive processes; Injection molding and other polymer fabrication processes; Inspection and quality control; Laser processes; Machine tool dynamics; Machining processes; Materials handling; Metrology; Micro- and nano-machining and processing; Modeling and simulation; Nontraditional manufacturing processes; Plant engineering and maintenance; Powder processing; Precision and ultra-precision machining; Process engineering; Process planning; Production systems optimization; Rapid prototyping and solid freeform fabrication; Robotics and flexible tooling; Sensing, monitoring, and diagnostics; Sheet and tube metal forming; Sustainable manufacturing; Tribology in manufacturing; Welding and joining
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