{"title":"柔性微机电系统传感器和器件综述","authors":"Xiaopeng Yang, Menglun Zhang","doi":"10.1063/10.0004301","DOIUrl":null,"url":null,"abstract":"Today, the vast majority of microelectromechanical system (MEMS) sensors are mechanically rigid and therefore suffer from disadvantages when used in intimately wearable or bio-integrated applications. By applying new engineering strategies, mechanically bendable and stretchable MEMS devices have been successfully demonstrated. This article reviews recent progress in this area, focusing on high-performance flexible devices based on inorganic thin films. We start with the common design and fabrication strategies for flexibility and stretchability, summarize the recent application-oriented flexible devices, and conclude with criteria and opportunities for the future development of flexible MEMS sensors.","PeriodicalId":35428,"journal":{"name":"Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering","volume":null,"pages":null},"PeriodicalIF":3.5000,"publicationDate":"2021-04-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1063/10.0004301","citationCount":"27","resultStr":"{\"title\":\"Review of flexible microelectromechanical system sensors and devices\",\"authors\":\"Xiaopeng Yang, Menglun Zhang\",\"doi\":\"10.1063/10.0004301\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Today, the vast majority of microelectromechanical system (MEMS) sensors are mechanically rigid and therefore suffer from disadvantages when used in intimately wearable or bio-integrated applications. By applying new engineering strategies, mechanically bendable and stretchable MEMS devices have been successfully demonstrated. This article reviews recent progress in this area, focusing on high-performance flexible devices based on inorganic thin films. We start with the common design and fabrication strategies for flexibility and stretchability, summarize the recent application-oriented flexible devices, and conclude with criteria and opportunities for the future development of flexible MEMS sensors.\",\"PeriodicalId\":35428,\"journal\":{\"name\":\"Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":3.5000,\"publicationDate\":\"2021-04-27\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1063/10.0004301\",\"citationCount\":\"27\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering\",\"FirstCategoryId\":\"1087\",\"ListUrlMain\":\"https://doi.org/10.1063/10.0004301\",\"RegionNum\":3,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering","FirstCategoryId":"1087","ListUrlMain":"https://doi.org/10.1063/10.0004301","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
Review of flexible microelectromechanical system sensors and devices
Today, the vast majority of microelectromechanical system (MEMS) sensors are mechanically rigid and therefore suffer from disadvantages when used in intimately wearable or bio-integrated applications. By applying new engineering strategies, mechanically bendable and stretchable MEMS devices have been successfully demonstrated. This article reviews recent progress in this area, focusing on high-performance flexible devices based on inorganic thin films. We start with the common design and fabrication strategies for flexibility and stretchability, summarize the recent application-oriented flexible devices, and conclude with criteria and opportunities for the future development of flexible MEMS sensors.
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