低温探测器用可拆卸三层Au吸收体微加工

IF 2.8 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Micro and Nano Engineering Pub Date : 2023-09-01 DOI:10.1016/j.mne.2023.100220
Jawad Hadid , Matias Rodrigues , Abdelmounaim Harouri , Christophe Dupuis , David Bouville , Antoine Martin , Martin Loidl , Laurence Ferlazzo
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引用次数: 1

摘要

用于衰变能谱法(DES)的低温探测器(LTD)由于其高能分辨率和对感兴趣的辐射接近100%的检测效率,可以提供准确可靠的衰变数据。然而,必须考虑源质量,以减轻由于沉积源中粒子能量的自吸收而引起的光谱失真。这项工作旨在为可重复使用的金属磁性量热计(一类LTD)中的DES生产一种可更换的4π3层金吸收体。我们提出了一种新的3层微制造工艺,用于直径为1mm的吸收体,根据测量的放射性核素(55Fe或241Am),总金厚度在20μm至120μm之间。该吸收器集成了一个金纳米泡沫,其中放射性核素通过纳米滴沉积十分之几μL的放射性溶液来沉积。我们通过使用湿法蚀刻的脱合金工艺制造了具有可控孔隙率的高质量金纳米泡沫层,并将其集成在厚的电沉积金层上。使用高分辨率扫描电子显微镜(SEM)和能量色散x射线光谱(EDX)对纳米泡沫的微制造进行了精细研究。
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Detachable three-layer Au absorber microfabrication for low-temperature detectors

Low temperature detectors (LTDs) used for decay energy spectrometry (DES) can provide accurate and reliable decay data thanks to their high-energy resolution and a near 100% detection efficiency for the radiations of interest. However, it is essential to consider the source quality to mitigate spectral distortion due to the self-absorption of particle energy in the source deposited.

This work aimed to produce a replaceable 4π 3-layer gold absorber for DES in reusable metallic magnetic calorimeters, a class of LTDs. We present a novel 3-layer microfabrication process for a 1 mm diameter absorber with a total gold thickness ranging from 20 μm to 120 μm depending on the measured radionuclide (55Fe or 241Am). The absorber integrates a gold nanofoam in which the radionuclide is deposited by nanodrop deposition of a few tenths of μL of a radioactive solution. We fabricated a high quality gold nanofoam layer with controllable porosity through a dealloying process using wet etching and integrating it on a thick electrodeposited gold layer. The fine study of the nanofoam microfabrication is performed using high-resolution scanning electron microscopy (SEM) and energy dispersive x-ray spectroscopy (EDX).

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来源期刊
Micro and Nano Engineering
Micro and Nano Engineering Engineering-Electrical and Electronic Engineering
CiteScore
3.30
自引率
0.00%
发文量
67
审稿时长
80 days
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