{"title":"AlN薄膜在Cl2/Ar电感耦合等离子体中的蚀刻机理","authors":"J. Woo, Dong-pyo Kim, Gwan-Ha Kim","doi":"10.1007/s42341-022-00408-6","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":23222,"journal":{"name":"Transactions on Electrical and Electronic Materials","volume":"23 1","pages":"569-577"},"PeriodicalIF":1.6000,"publicationDate":"2022-08-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Etch Mechanism of AlN Thin Film in Cl2/Ar Inductively Coupled Plasma\",\"authors\":\"J. Woo, Dong-pyo Kim, Gwan-Ha Kim\",\"doi\":\"10.1007/s42341-022-00408-6\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":23222,\"journal\":{\"name\":\"Transactions on Electrical and Electronic Materials\",\"volume\":\"23 1\",\"pages\":\"569-577\"},\"PeriodicalIF\":1.6000,\"publicationDate\":\"2022-08-04\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Transactions on Electrical and Electronic Materials\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1007/s42341-022-00408-6\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Transactions on Electrical and Electronic Materials","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1007/s42341-022-00408-6","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
期刊介绍：
The main purpose of Transactions on Electrical and Electronic Materials (Trans. Electr. Electron. Mater. : TEEM) is to provide an open forum to report and share significant new findings on electrical and electronic materials for the materials research communities.The topics covered by the journal include but not limited to new semiconductor materials and devices, electronic ceramics, electrical insulation materials, thin film devices/sensors, display/optical devices, superconducting magnetic materials and devices, nanomaterials and nanodevices, photovoltaic materials and devices, and disaster prevention materials.Transactions on Electrical and Electronic Materials enables professionals in research and industry to keep track of up-to-date developments in the above-mentioned fields and their importance for future developments and success.
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