利用两步光刻制造的双焦点微透镜阵列增强集成成像显示器的景深

IF 1.7 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Journal of the Society for Information Display Pub Date : 2023-05-09 DOI:10.1002/jsid.1226
Wenwen Wang, Yongai Zhang, Chaoxing Wu, Qun Yan, Tailiang Guo, Xiongtu Zhou
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引用次数: 0

摘要

传统的微透镜阵列(MLAs)在集成成像显示中受到空间景深(DOF)的限制,中心深度平面难以在大范围内扩展。在此,我们提出了一种基于双焦点mla的微加工方法来提高DOF。采用两步光刻和热回流法制备了双焦扩展DOF的MLAs。该方法允许高到低数值孔径的各种微透镜实现高空间分辨率和准确的深度估计。不同焦距的微透镜通过多次光刻同时沉积在衬底上,并带有对准标记,以定义不同厚度的微柱。对于57.6 μm的透镜直径,六角形封装双焦MLAs的DOF范围为0.004 ~ 4.908 mm,对应的物距范围为0.125 ~ 0.165 mm。基于该方案,该方法在集成成像三维显示或光场显示方面具有潜在的应用前景。
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Enhanced depth of field of integral imaging display using bifocal microlens array fabricated by two-step lithography
Due to the limitation of traditional microlens arrays (MLAs) in integral imaging display, the depth of field (DOF) is restricted in space and the center depth plane is difficult to extend in a large range. Here, we propose a microfabrication method based on bifocal MLAs to improve DOF. The bifocal MLAs for extended DOF were fabricated by using two‐step photolithography and thermal reflow. This method allows diverse microlenses of high to low numerical aperture to achieve high spatial resolution as well as accurate depth estimation. Microlenses of different focal lengths were simultaneously deposited on a substrate by repeated photolithography with multiple photomasks with alignment mark to define micro‐posts of different thicknesses. Hexagonally packaged bifocal MLAs clearly show the DOF extended from 0.004 to 4.908 mm for 57.6 μm in lens diameter, and their corresponding object distance ranges from 0.125 to 0.165 mm. Based on the proposed scheme, this method provides potential applications in integral imaging 3D display or light field display.
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来源期刊
Journal of the Society for Information Display
Journal of the Society for Information Display 工程技术-材料科学:综合
CiteScore
4.80
自引率
8.70%
发文量
98
审稿时长
3 months
期刊介绍: The Journal of the Society for Information Display publishes original works dealing with the theory and practice of information display. Coverage includes materials, devices and systems; the underlying chemistry, physics, physiology and psychology; measurement techniques, manufacturing technologies; and all aspects of the interaction between equipment and its users. Review articles are also published in all of these areas. Occasional special issues or sections consist of collections of papers on specific topical areas or collections of full length papers based in part on oral or poster presentations given at SID sponsored conferences.
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