平行板簧承载机构的分析模型建立及姿态计算

IF 1 4区工程技术 Q4 ENGINEERING, MECHANICAL Mechanical Sciences Pub Date : 2022-04-01 DOI:10.5194/ms-13-311-2022

P. Li, Z. Tong, Wei-hua Zhang

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引用次数: 1

摘要

摘要本文采用基于柔度矩阵的方法研究了一种新型并联板簧承载机构。在分析建模和姿态计算中，考虑了柔性臂的几何误差，包括高度和顶部平面的方向，并采用位移法计算了平衡姿态。分别分析了不同高度下平衡姿态和顶面初始倾斜度的影响。实验验证了姿态计算的有效性和有效性。姿态测量采用激光三角坐标法。计算结果与测量结果的法向矢量偏差小于2×10-4，足以满足实际要求。这可用于保证光刻机中稳定和准确的晶片转移。因此，可以得出结论，分析模型建立和态度计算所采用的方法可以为复杂并联柔顺机构的分析和设计提供参考。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Analytical model establishment and attitude calculation of a parallel leaf-spring carrying mechanism

Abstract. In this paper, a novel parallel leaf-spring carrying mechanism (PLCM) is investigated using a compliance-matrix-based approach. For the analytical modeling and attitude calculation, the geometric errors of the flexible arm, including the height and the top plane's direction, are considered, and the displacement method is used to calculate the equilibrium attitude. The influence of the equilibrium attitude at different heights and the initial tilts of the top planes are analyzed separately. The validity and effectiveness of the attitude calculation are illustrated by experimental verification. The laser triangulation coordinate method is used for attitude measurement. The deviations of the normal vector between the calculation results and measurement results are smaller than 2×10-4, which is small enough to satisfy practical requirements. This can be used to guarantee stable and accurate wafer transfer in a lithography machine. Therefore, it can be concluded that the methods employed for analytical model establishment and attitude calculation can be used as a reference for the analysis and design of a complex parallel compliant mechanism.

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来源期刊

Mechanical Sciences ENGINEERING, MECHANICAL-

CiteScore

2.20

自引率

7.10%

发文量

审稿时长

29 weeks

期刊介绍： The journal Mechanical Sciences (MS) is an international forum for the dissemination of original contributions in the field of theoretical and applied mechanics. Its main ambition is to provide a platform for young researchers to build up a portfolio of high-quality peer-reviewed journal articles. To this end we employ an open-access publication model with moderate page charges, aiming for fast publication and great citation opportunities. A large board of reputable editors makes this possible. The journal will also publish special issues dealing with the current state of the art and future research directions in mechanical sciences. While in-depth research articles are preferred, review articles and short communications will also be considered. We intend and believe to provide a means of publication which complements established journals in the field.