{"title":"扫描激光振动测量MEMS的动态损耗和面外振动","authors":"M. Heaton, A. Zavdoveev, N. McMillan","doi":"10.1680/JNAEN.20.00062","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":44365,"journal":{"name":"Nanomaterials and Energy","volume":"10 1","pages":"1-5"},"PeriodicalIF":0.3000,"publicationDate":"2021-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Scanning laser vibrometry of the dynamic rundown and out-of-plane vibration for MEMS\",\"authors\":\"M. Heaton, A. Zavdoveev, N. McMillan\",\"doi\":\"10.1680/JNAEN.20.00062\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":44365,\"journal\":{\"name\":\"Nanomaterials and Energy\",\"volume\":\"10 1\",\"pages\":\"1-5\"},\"PeriodicalIF\":0.3000,\"publicationDate\":\"2021-06-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Nanomaterials and Energy\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1680/JNAEN.20.00062\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Nanomaterials and Energy","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1680/JNAEN.20.00062","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}