Investigation of the tribochemical reaction mechanism in dry-type CMP of 6H-SiC substrate

ABSTRACT In this paper, the tribochemical reaction mechanism between solid powder and 6H-SiC substrate was investigated. White light interferometer was used to detect surface roughness, FESEM was used to observe surface characteristics, EDS was used to detect surface elements and XRD was used to detect surface components. The tribochemical reaction mechanism of the reduced iron powder, anhydrous sodium carbonate and deionized water with 6H-SiC was analysed by the detection results. It is found that the reduced iron powder, anhydrous sodium carbonate and deionized water react with the 6H-SiC surface to form a soft interfacial transition layer which can be removed. The removal rate of the reduced iron powder is the highest at 191 nm h–1. The surface quality decreases after polishing with the anhydrous sodium carbonate. The results of this study provide a new idea for the field of ultra-precision machining.