表面分析的挑战

J. Grant
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XPS and AES measure the kinetic energies of electrons leaving the surface from incident X-rays (XPS) or incident electrons (AES). Auger electrons can also be produced by other means such as X-rays, positrons (Ohdaira and Suzuki, 2013), and even ions (Grant, 2003). SIMS measures the mass spectrum (actually the mass-to-charge ratio) of positively or negatively charged ions ejected from the surface of a material following impact by energetic ions. A variation of SIMS, sputtered neutral mass spectrometry (SNMS), measures the mass spectrum of the neutral species emitted. In SNMS, ionization of the neutral species is made after they leave the surface. Other surface analysis techniques include ion scattering spectroscopy (ISS) and Rutherford backscattering spectrometry (RBS), and these have been compared with the other techniques mentioned above (Powell et al., 1991). 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Isotope detection can be very useful when an oxygen beam is used for analysis, where oxygen from the surface of the material can be distinguished from the oxygen in the beam. The number of papers published each year in AES and SIMS has been fairly constant for the past 20 years, whereas those published in XPS continue to increase. This is illustrated in Figure 1, which is plotted on a logarithmic scale to better show their growth since the early years. The publications using the terms ESCA, PES, HAXPES, NAP-XPS, ARXPS (angle resolved XPS), and ARPES (angle resolved PES) have been included along with those using XPS to compare with the other techniques. Figure 2 illustrates the use of the different terms for XPS and shows that ESCA was the preferred term in the 1960s and 1970s, but was overtaken by the term XPS in the 1980s and remains dominant. 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引用次数: 0

摘要

自20世纪60年代以来,已经开发了许多研究材料表面的技术。其中一些提供了有关表面化学成分的信息,三个已经得到了广泛应用。这三种是X射线光电子能谱(XPS)、俄歇电子能谱(AES)和二次离子质谱(SIMS)。XPS也被称为用于化学分析的电子光谱(ESCA)和光发射光谱(PES)。XPS(Briggs和Grant,2003;Kelly,2004)、AES(Burhop,1952;Briggs和格兰特,2003)和SIMS(Benninghoven et al.,1987;Benninghoen,2001)的历史和背景已经被编写出来,这些技术今天仍在不断发展,提供了更高的灵敏度、空间分辨率和自动化。XPS和AES测量从入射X射线(XPS)或入射电子(AES)离开表面的电子的动能。俄歇电子也可以通过其他方式产生,如X射线、正电子(Ohdaira和Suzuki,2013),甚至离子(Grant,2003)。SIMS测量高能离子撞击后从材料表面喷出的带正电或带负电离子的质谱(实际上是质荷比)。SIMS的一种变体,溅射中性质谱法(SNMS),测量发射的中性物质的质谱。在SNMS中,中性物质的电离是在它们离开表面后进行的。其他表面分析技术包括离子散射光谱法(ISS)和卢瑟福背散射光谱法,并且这些技术已经与上述其他技术进行了比较(Powell等人,1991)。表面分析最常用的技术是XPS,因为它提供了最简单的光谱,也最容易量化。XPS仪器的成本也比AES、SIMS等低得多,因此当集团经济拮据时,他们倾向于使用XPS。在大多数情况下,XPS还提供了关于表面原子化学状态的极好信息。AES有时可以提供优越的化学信息,例如金属表面碳的化学状态(Haas等人,1972;Hooker和Grant,1977年)。虽然XPS和AES不能直接检测材料中的氢和氦,但有时可以用XPS(Smentkowski等人,1995)和AES(Bevolo,1985)观察到氢对表面其他元素的影响。另一方面,SIMS可以检测所有元素并区分同位素;光谱可能相当复杂,因为还形成了来自材料的大分子片段。当使用氧束进行分析时,同位素检测可能非常有用,其中可以将材料表面的氧与束中的氧区分开来。在过去的20年里,每年以AES和SIMS发表的论文数量一直保持不变,而以XPS发表的论文则在继续增加。这一点如图1所示,图1以对数刻度绘制,以更好地显示它们自早年以来的增长情况。使用术语ESCA、PES、HAXPES、NAP-XPS、ARXPS(角度分辨XPS)和ARPES(角度分辨PES)的出版物与使用XPS的出版物一起被包括在内,以与其他技术进行比较。图2说明了XPS的不同术语的使用,并显示ESCA是20世纪60年代和70年代的首选术语,但在20世纪80年代被XPS取代,并保持主导地位。术语PES通常用于开放访问
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Challenges in surface analysis
Many techniques have been developed since the 1960s to study the surfaces of materials. Some of them provide information on the chemical composition of surfaces and three have achieved widespread application. These three are X-ray photoelectron spectroscopy (XPS), Auger electron spectroscopy (AES), and secondary ion mass spectrometry (SIMS). XPS is also referred to as electron spectroscopy for chemical analysis (ESCA), and photoemission spectroscopy (PES). Histories and the backgrounds of XPS (Briggs and Grant, 2003; Kelly, 2004), AES (Burhop, 1952; Briggs and Grant, 2003) and SIMS (Benninghoven et al., 1987; Benninghoven, 2001) have been written, and these techniques continue to be developed today, providing increased sensitivity, spatial resolution, and automation. XPS and AES measure the kinetic energies of electrons leaving the surface from incident X-rays (XPS) or incident electrons (AES). Auger electrons can also be produced by other means such as X-rays, positrons (Ohdaira and Suzuki, 2013), and even ions (Grant, 2003). SIMS measures the mass spectrum (actually the mass-to-charge ratio) of positively or negatively charged ions ejected from the surface of a material following impact by energetic ions. A variation of SIMS, sputtered neutral mass spectrometry (SNMS), measures the mass spectrum of the neutral species emitted. In SNMS, ionization of the neutral species is made after they leave the surface. Other surface analysis techniques include ion scattering spectroscopy (ISS) and Rutherford backscattering spectrometry (RBS), and these have been compared with the other techniques mentioned above (Powell et al., 1991). The most commonly used technique for surface analysis is XPS as it provides the simplest spectrum and is the easiest to quantify. XPS instruments also have a much lower cost than AES, SIMS, etc., so when groups are financially constrained, they tend towards XPS. In most cases, XPS also provides excellent information on the chemical state of surface atoms. AES can sometimes provide superior chemical information, such as the chemical state of carbon onmetal surfaces (Haas et al., 1972; Hooker and Grant, 1977).While XPS and AES do not directly detect hydrogen and helium in materials, the effect of hydrogen on other elements in the surface can sometimes be observed with XPS (Smentkowski et al., 1995) and AES (Bevolo, 1985). On the other hand, SIMS can detect all elements as well as distinguish isotopes; spectra can be quite complex as large molecular fragments from the material are also formed. Isotope detection can be very useful when an oxygen beam is used for analysis, where oxygen from the surface of the material can be distinguished from the oxygen in the beam. The number of papers published each year in AES and SIMS has been fairly constant for the past 20 years, whereas those published in XPS continue to increase. This is illustrated in Figure 1, which is plotted on a logarithmic scale to better show their growth since the early years. The publications using the terms ESCA, PES, HAXPES, NAP-XPS, ARXPS (angle resolved XPS), and ARPES (angle resolved PES) have been included along with those using XPS to compare with the other techniques. Figure 2 illustrates the use of the different terms for XPS and shows that ESCA was the preferred term in the 1960s and 1970s, but was overtaken by the term XPS in the 1980s and remains dominant. The term PES is often used OPEN ACCESS
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