导电材料填充电极在微细电化学加工中的侧壁绝缘性能研究

IF 4.2 2区 工程技术 Q2 ENGINEERING, MANUFACTURING Advances in Manufacturing Pub Date : 2023-03-21 DOI:10.1007/s40436-022-00429-7
Guo-Dong Liu, Yu-Lan Zhu, Sheng-Gui Liu, Chao-Jiang Li
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引用次数: 1

摘要

在微细电化学加工(ECM)过程中,杂散腐蚀会导致不希望的金属溶解和形状精度的下降。采用侧壁绝缘电极是抑制杂散腐蚀的有效途径。大多数侧壁绝缘电极是由金属衬底和非金属薄膜制成的。然而,附着在金属衬底上的薄膜绝缘材料在电解环境中容易受到损坏。本研究提出了一种新的导电材料填充电极的概念,以获得更好的侧壁绝缘性能。微尺度石英管作为绝缘衬底。商业上可用的导电填料包括金属丝、熔融金属和银粉填充在石英管的工作阴极内。为此,设计并制备了金属丝填充电极、熔融金属填充电极和纳米粉末填充电极。从电极韧性、材料去除率和表面形貌的验证结果来看,金属丝填充电极和熔融金属填充电极具有与传统金属基电极相同的性能,并且具有更好的耐久性。相比之下,纳米粉末填充的电极由于失去了固化的粉末颗粒而无法承受长期的ECM工艺。在ECM实验中,采用金属丝填充电极和熔融金属填充电极加工了具有陡峭侧壁(锥角<9.7°)的微结构,可以替代传统电极,获得更长的使用寿命和更好的侧壁绝缘性能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

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Research on conductive-material-filled electrodes for sidewall insulation performance in micro electrochemical machining

In micro electrochemical machining (ECM) processes, stray corrosion causes undesired metal dissolution and the deterioration of shape accuracy. Adopting a sidewall-insulated electrode is an effective approach to suppressing stray corrosion. Most sidewall-insulated electrodes are made of metal substrate and non-metallic thin films. Nevertheless, the thin-film insulating materials attached to a metal substrate are susceptible to damage in an electrolytic environment. This study presents a novel concept of the conductive-material-filled electrode for better sidewall-insulation performance. The micro-scale quartz tube serves as the insulating substrate. Commercially available conductive fillers including metal wire, molten metals, and silver powder are filled inside the working cathode of the quartz tube. Consequently, the metal-wire-filled electrode, molten-metal-filled electrode, and nano-powder-filled electrode are designed and fabricated. From the verification results of electrode toughness, material removal rate, and surface topography, the metal-wire-filled electrode and molten-metal-filled electrode exhibit the same performance as a traditional metal-based electrode and much better durability. By contrast, the nano-powder-filled electrode is unable to withstand long-term ECM processes because of the loss of cured powder particles. In ECM experiments, microstructures with steep sidewalls (taper angle <9.7°) were machined using the metal-wire-filled electrode and molten-metal-filled electrode, which could replace the traditional electrode, achieving a longer service life and superior sidewall-insulation performance.

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来源期刊
Advances in Manufacturing
Advances in Manufacturing Materials Science-Polymers and Plastics
CiteScore
9.10
自引率
3.80%
发文量
274
期刊介绍: As an innovative, fundamental and scientific journal, Advances in Manufacturing aims to describe the latest regional and global research results and forefront developments in advanced manufacturing field. As such, it serves as an international platform for academic exchange between experts, scholars and researchers in this field. All articles in Advances in Manufacturing are peer reviewed. Respected scholars from the fields of advanced manufacturing fields will be invited to write some comments. We also encourage and give priority to research papers that have made major breakthroughs or innovations in the fundamental theory. The targeted fields include: manufacturing automation, mechatronics and robotics, precision manufacturing and control, micro-nano-manufacturing, green manufacturing, design in manufacturing, metallic and nonmetallic materials in manufacturing, metallurgical process, etc. The forms of articles include (but not limited to): academic articles, research reports, and general reviews.
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