{"title":"等离子体增强磁控溅射沉积不同碳含量TiSiCN复合涂层的微观结构和摩擦学性能","authors":"Zhubo Liu, Wantao Jin, B. Zhou, Linan Ma, Xiaoguang Ma, Jing-Wei Zhao","doi":"10.1002/sia.7250","DOIUrl":null,"url":null,"abstract":"TiSiCN composite coatings with different C contents were prepared on Cr buffer layer by plasma‐enhanced magnetron sputtering. The structure, composition, surface, and cross‐sectional morphology of the coatings were characterized by X‐ray photoelectron spectroscopy, X‐ray diffraction, Raman spectroscopy, scanning electron microscope, and atomic force microscope. The hardness, elastic modulus, and tribological performance of the coatings were evaluated by nanoindentation and reciprocating friction tests. The results showed that the TiSiCN composite coatings are amorphous structure composed of TiCN compound and microcrystalline graphite, and amorphous phases. The increase of C content changed the content and distribution of TiCN ceramics nanocrystal, amorphous Si3N4 and amorphous carbon (sp3‐ and sp2‐hybridized C), thus affecting the hardness and friction behavior of the coatings. The hardness of the composite coatings was related to the content of TiCN phase and sp3‐C in the coatings. The TiSiCN composite coating with C content of 68.2% had lower coefficient of friction and the lowest wear rate.","PeriodicalId":22062,"journal":{"name":"Surface and Interface Analysis","volume":"1 1","pages":""},"PeriodicalIF":1.6000,"publicationDate":"2023-07-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Microstructure and tribological properties of TiSiCN composite coatings with different carbon contents deposited by plasma‐enhanced magnetron sputtering\",\"authors\":\"Zhubo Liu, Wantao Jin, B. Zhou, Linan Ma, Xiaoguang Ma, Jing-Wei Zhao\",\"doi\":\"10.1002/sia.7250\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"TiSiCN composite coatings with different C contents were prepared on Cr buffer layer by plasma‐enhanced magnetron sputtering. The structure, composition, surface, and cross‐sectional morphology of the coatings were characterized by X‐ray photoelectron spectroscopy, X‐ray diffraction, Raman spectroscopy, scanning electron microscope, and atomic force microscope. The hardness, elastic modulus, and tribological performance of the coatings were evaluated by nanoindentation and reciprocating friction tests. The results showed that the TiSiCN composite coatings are amorphous structure composed of TiCN compound and microcrystalline graphite, and amorphous phases. The increase of C content changed the content and distribution of TiCN ceramics nanocrystal, amorphous Si3N4 and amorphous carbon (sp3‐ and sp2‐hybridized C), thus affecting the hardness and friction behavior of the coatings. The hardness of the composite coatings was related to the content of TiCN phase and sp3‐C in the coatings. The TiSiCN composite coating with C content of 68.2% had lower coefficient of friction and the lowest wear rate.\",\"PeriodicalId\":22062,\"journal\":{\"name\":\"Surface and Interface Analysis\",\"volume\":\"1 1\",\"pages\":\"\"},\"PeriodicalIF\":1.6000,\"publicationDate\":\"2023-07-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Surface and Interface Analysis\",\"FirstCategoryId\":\"92\",\"ListUrlMain\":\"https://doi.org/10.1002/sia.7250\",\"RegionNum\":4,\"RegionCategory\":\"化学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"CHEMISTRY, PHYSICAL\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Surface and Interface Analysis","FirstCategoryId":"92","ListUrlMain":"https://doi.org/10.1002/sia.7250","RegionNum":4,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"CHEMISTRY, PHYSICAL","Score":null,"Total":0}
Microstructure and tribological properties of TiSiCN composite coatings with different carbon contents deposited by plasma‐enhanced magnetron sputtering
TiSiCN composite coatings with different C contents were prepared on Cr buffer layer by plasma‐enhanced magnetron sputtering. The structure, composition, surface, and cross‐sectional morphology of the coatings were characterized by X‐ray photoelectron spectroscopy, X‐ray diffraction, Raman spectroscopy, scanning electron microscope, and atomic force microscope. The hardness, elastic modulus, and tribological performance of the coatings were evaluated by nanoindentation and reciprocating friction tests. The results showed that the TiSiCN composite coatings are amorphous structure composed of TiCN compound and microcrystalline graphite, and amorphous phases. The increase of C content changed the content and distribution of TiCN ceramics nanocrystal, amorphous Si3N4 and amorphous carbon (sp3‐ and sp2‐hybridized C), thus affecting the hardness and friction behavior of the coatings. The hardness of the composite coatings was related to the content of TiCN phase and sp3‐C in the coatings. The TiSiCN composite coating with C content of 68.2% had lower coefficient of friction and the lowest wear rate.
期刊介绍：
Surface and Interface Analysis is devoted to the publication of papers dealing with the development and application of techniques for the characterization of surfaces, interfaces and thin films. Papers dealing with standardization and quantification are particularly welcome, and also those which deal with the application of these techniques to industrial problems. Papers dealing with the purely theoretical aspects of the technique will also be considered. Review articles will be published; prior consultation with one of the Editors is advised in these cases. Papers must clearly be of scientific value in the field and will be submitted to two independent referees. Contributions must be in English and must not have been published elsewhere, and authors must agree not to communicate the same material for publication to any other journal. Authors are invited to submit their papers for publication to John Watts (UK only), Jose Sanz (Rest of Europe), John T. Grant (all non-European countries, except Japan) or R. Shimizu (Japan only).
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