用于宽禁带半导体的低温加工CO2激光辅助射频溅射GaN薄膜

IF 2.2 4区 材料科学 Q2 MATERIALS SCIENCE, CERAMICS Journal of Asian Ceramic Societies Pub Date : 2022-12-13 DOI:10.1080/21870764.2022.2151102
S. Kim, Chang-Hyeon Jo, Min-Sung Bae, M. Ichimura, J. Koh
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引用次数: 0

摘要

摘要GaN由于其宽的带隙(3.4eV)和高的电子迁移率,在太阳能电池、功率晶体管和高电子迁移率晶体管中的应用引起了极大的关注。通过采用物理气相沉积工艺,例如反应性RF溅射和脉冲激光沉积,很难以薄膜形式制备结晶的GaN薄膜,因为沉积薄膜由于其高结合能而需要高驱动能量。本文通过CO2激光辅助射频溅射在200°C的相对较低温度下制备了GaN薄膜。10600nm波长的CO2激光器显示出从光能到热能的优异转换效率。在0.98W/mm2的优化激光能量密度下,GaN薄膜可以具有(0002)取向,带隙能量为3.26eV。使用X射线衍射、FE-SEM、X射线光电子能谱(XPS)、光致发光(PL)光谱和UV-vis光谱对所制备的GaN薄膜的晶体、表面形态和光学性能进行了评估。使用Tauc图测量所制备的GaN薄膜的能带隙,并通过PL确认。使用XPS分析由此获得的薄膜组成。
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Low temperature processed CO2 laser-assisted RF-sputtered GaN thin film for wide bandgap semiconductors
ABSTRACT Owing to its wide bandgap (3.4 eV) and high electron mobility, GaN has attracted significant attention for applications in solar cells, power transistors, and high-electron-mobility transistors. Crystallized GaN thin film can be hardly prepared in thin film form by employing physical vapor deposition processes, such as reactive RF sputtering and pulsed laser deposition, because a high driving energy is required to deposit a thin film due to its high binding energy. Herein, GaN thin films were prepared by CO2 laser-assisted RF sputtering at a relatively low temperature of 200°C. The CO2 laser with a 10,600 nm wavelength shows excellent conversion efficiency from optical energy to thermal energy. At the optimized laser energy density of 0.98 W/mm2, GaN thin film can have a (0002) orientation with a bandgap energy of 3.26 eV. The crystalline, surface morphological, and optical properties of the fabricated GaN thin films were evaluated using X-ray diffraction, FE-SEM, X-ray photoelectron (XPS), and photoluminescence (PL) spectroscopy, and UV-vis spectrometry. The energy bandgap of the fabricated GaN thin film was measured using the Tauc plot and confirmed via PL. The film composition thus obtained was analyzed using XPS.
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来源期刊
Journal of Asian Ceramic Societies
Journal of Asian Ceramic Societies Materials Science-Ceramics and Composites
CiteScore
5.00
自引率
4.30%
发文量
78
审稿时长
10 weeks
期刊介绍: The Journal of Asian Ceramic Societies is an open access journal publishing papers documenting original research and reviews covering all aspects of science and technology of Ceramics, Glasses, Composites, and related materials. These papers include experimental and theoretical aspects emphasizing basic science, processing, microstructure, characteristics, and functionality of ceramic materials. The journal publishes high quality full papers, letters for rapid publication, and in-depth review articles. All papers are subjected to a fair peer-review process.
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