基于3D打印模具和真空辅助变形复制工艺的曲面MLA光栅制作

IF 2.6 4区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Microelectronic Engineering Pub Date : 2023-07-15 DOI:10.1016/j.mee.2023.112059
Jian Jin , Jun Wu , Zhenhua Yu , Zhong Wang , Xudi Wang
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引用次数: 0

摘要

微透镜阵列(MLA)与光栅结构相结合,由于两者的光色散效应,是提高光整形效率的有效手段。本文提出了一种利用3D打印模具和真空辅助变形复制工艺制造曲面mla -光栅复合元件的创新方法。该工艺除了具有成本优势外,还可以有效控制光栅的类型和线密度、微透镜的曲率和孔径大小等光学参数,从而带来不同的衍射和聚焦效果。实验结果表明,弯曲的mla -光栅元件具有良好的色散效率,可用于提高光源的照明范围。此外,由于弯曲衬底的聚焦效果,该元件有望提高光伏领域的光能利用率。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

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Fabrication of curved MLA-grating based on 3D printing mold and vacuum-assisted deformation replication process

The combination of Microlens Array (MLA) with a grating structure is an effective means of improving light shaping efficiency due to the light dispersion effects of both elements. This paper proposes an innovative method for fabricating a curved MLA-grating composite element using a 3D printing mold and vacuum-assisted deformation replication process. In addition to the cost advantages of the process, the optical parameters such as type and line-density of grating, curvature and aperture size of the microlens can be effectively controlled, so as to bring different diffraction and focusing effects. Test results demonstrate that the curved MLA-grating element has superior light dispersion efficiency, making it useful in improving the illumination range of light sources. Additionally, due to the focusing effect of the curved substrate, this element holds promise for enhancing the light energy utilization rate in the photovoltaic field.

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来源期刊
Microelectronic Engineering
Microelectronic Engineering 工程技术-工程:电子与电气
CiteScore
5.30
自引率
4.30%
发文量
131
审稿时长
29 days
期刊介绍: Microelectronic Engineering is the premier nanoprocessing, and nanotechnology journal focusing on fabrication of electronic, photonic, bioelectronic, electromechanic and fluidic devices and systems, and their applications in the broad areas of electronics, photonics, energy, life sciences, and environment. It covers also the expanding interdisciplinary field of "more than Moore" and "beyond Moore" integrated nanoelectronics / photonics and micro-/nano-/bio-systems. Through its unique mixture of peer-reviewed articles, reviews, accelerated publications, short and Technical notes, and the latest research news on key developments, Microelectronic Engineering provides comprehensive coverage of this exciting, interdisciplinary and dynamic new field for researchers in academia and professionals in industry.
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