铜基合成Cu2O涂层热应力的有限元分析

O. Shorinov
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引用次数: 1

摘要

本文旨在找出具有热合成Cu2O氧化物层的铜样品在冷却过程中产生的热残余应力的大小和性质。使用Ansys软件通过有限元方法进行了热机械分析。热分析的结果用于研究冷却后薄膜/涂层系统的应力-应变状态。基于建模结果,本文确定了涂层试样的最大应力-应变区域,即铜基底与Cu2O氧化物层之间界面的自由边缘。该研究的主要局限性是在条件设置中使用了某些简化,例如,薄膜/涂层系统的均匀冷却、基底和薄膜材料的均匀性和各向同性、它们的性质随温度变化的不变性,所获得的结果可用于控制薄膜/涂层系统的应力-应变状态,并防止薄膜结构在其产品的生产和操作过程中的变形和破坏。研究新的有前景的氧化物纳米结构形成方法,例如在等离子体环境中,需要有足够的理论基础来解决应力的起源和发展。
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Finite element analysis of thermal stress in Cu2O coating synthesized on Cu substrate
The paper aims to find the magnitude and nature of thermal residual stresses that occur during cooling of a copper sample with a thermally synthesized oxide layer of Cu2O. Thermo-mechanical analysis was performed by the finite element method using Ansys Software. The results of thermal analysis were used to study the resulting stress-strain state of the thin film/coating system after cooling. Based on the modeling results, the paper determined the most stress-strain areas of the sample with a coating, which are the free edges of the interfaces between the copper substrate and the Cu2O oxide layer. The main limitations of the study are the use of certain simplifications in the condition setup, for instance, uniform cooling of the thin film/coating system, homogeneity and isotropy of substrate and thin film materials, invariance of their properties with temperature changes, etc. The results obtained can be used to control the stress-strain state of the thin film/coating system and prevent deformations and destruction of thin-film structures during their production and operation of products with them. The study of new promising methods for the formation of oxide nanostructures, for instance in a plasma environment, requires a sufficient theoretical basis in addressing the origin and development of stresses.
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来源期刊
Archives of materials science and engineering
Archives of materials science and engineering Materials Science-Materials Science (all)
CiteScore
2.90
自引率
0.00%
发文量
15
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